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    • 7. 发明授权
    • Method for producing a unit having a three-dimensional surface patterning, and use of this method
    • 用于制造具有三维表面图案化的单元的方法和使用该方法
    • US07067241B2
    • 2006-06-27
    • US10430887
    • 2003-05-05
    • Patrick GrabherClaus Heine-KempkensRoger Bischofberger
    • Patrick GrabherClaus Heine-KempkensRoger Bischofberger
    • G03F7/00G03F7/40
    • G03F7/0007G03F7/40G03F7/405G03F7/42G03F7/422G03F7/425
    • A method for producing a unit having a three-dimensional surface patterning on a base layer. A photoresist is applied to a base layer and subjected to a masked exposure matched to a predetermined final surface patterning. Parts of the photoresist layer are removed by developing to provide an initial surface patterning, including photoresist sacrificial subregions. A coating which covers the initial surface patterning is then applied. Energy is then applied to the initial surface patterning to destabilize the sacrificial layer regions. The initial surface patterning is acted on by a high-pressure liquid jet at a predetermined treatment temperature such that at least part of the coating which covers the sacrificial layer regions are mechanically removed or at least broken open to produce the final surface patterning. The liquid has a negligible chemical reaction rate and/or physical dissolution rate with respect to materials of the unit and/or organic fluid-sealing means.
    • 一种在基底层上制造具有三维表面图案化的单元的方法。 将光致抗蚀剂施加到基底层并进行与预定的最终表面图案化匹配的掩模曝光。 通过显影除去光致抗蚀剂层的部分,以提供包括光致抗蚀剂牺牲子区域的初始表面图案化。 然后施加覆盖初始表面图案化的涂层。 然后将能量施加到初始表面图案化以使牺牲层区域不稳定。 初始表面图案化在预定处理温度下通过高压液体射流作用,使得覆盖牺牲层区域的涂层的至少一部分被机械地去除或至少断开以产生最终的表面图案化。 相对于单元和/或有机流体密封装置的材料,液体具有可忽略的化学反应速率和/或物理溶解速率。
    • 10. 发明授权
    • Light splitter and optical transmitter configuration with a light splitter
    • 光分路器和光发射机配置与光分路器
    • US06476972B2
    • 2002-11-05
    • US09933205
    • 2001-08-20
    • Johannes EdlingerClaus Heine
    • Johannes EdlingerClaus Heine
    • G02B2714
    • H04N9/3167G02B5/285G02B27/1026G02B27/142G02B27/145G02B27/149G02B27/283H04N9/3105
    • Method for manufacturing a selective light splitter and recombining device that divides white light into red, green and blue light and recombines red, green and blue light independently of polarization, provides two coating systems, each reflecting and transmitting color-selectivity. A transparent base body is embedded in or is on the coating systems and at least one of the coating systems has a layer of a material with lower refractive index and at least one of a material with higher refractive index. The lower refractive index is selected so that 1.7≦NLS≦2.1 and the refractive index of the transparent base body is selected so that 1.52≧NK≧1. The method also includes determining an emergent face for the red, green and blue light, and tilting one emergent face such that it forms an angle p deviating from zero by more than is caused by fabrication tolerances for which &phgr;≦5°.
    • 制造选择性光分离器和复合装置的方法,其将白光分为红色,绿色和蓝色光,并且独立于极化而重新组合红色,绿色和蓝色光,提供两种涂覆系统,每种反射和透射颜色选择性。 透明基体嵌入涂层系统中或涂覆系统上,并且至少一个涂层体系具有具有较低折射率的材料层和具有较高折射率的材料中的至少一种。 选择较低折射率使得1.7 <= NLS <= 2.1,并且选择透明基体的折射率使得1.52> = NK> = 1。 该方法还包括确定红色,绿色和蓝色光的紧急面,以及倾斜一个出射面,使得它形成偏离零的角度p大于由phi <= 5°的制造公差引起的角度p。