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    • 2. 发明申请
    • Process adapter
    • 工艺适配器
    • US20060065058A1
    • 2006-03-30
    • US11238384
    • 2005-09-29
    • Christopher EriksenFred Sittler
    • Christopher EriksenFred Sittler
    • G01L7/00
    • G01L19/0636G01L9/006G01L19/0038G01L19/0609G01L19/147
    • A pressure transducer for clean environments is disclosed. The pressure transducer includes a process coupler, a sensor module, a shield and electronics. The process coupler is configured to couple to a source of process media at a process inlet. The sensor module is coupled to the process coupler and has a pressure sensor therein. The pressure sensor has an electrical characteristic that varies in response to pressure within the sensor module. The shield is disposed adjacent to the process coupler and configured to obstruct substantially all lines of sight between the process inlet and the pressure sensor. Electronics within the transducer are coupled to the pressure sensor to measure the electrical characteristic and provide an indication thereof. A method of sensing a pressure in a clean environment is also provided.
    • 公开了用于清洁环境的压力传感器。 压力传感器包括过程耦合器,传感器模块,屏蔽和电子器件。 过程耦合器被配置为在过程入口处耦合到处理介质源。 传感器模块耦合到过程耦合器并且在其中具有压力传感器。 压力传感器具有响应于传感器模块内的压力而变化的电特性。 屏蔽件邻近过程联接器设置并且构造成阻碍过程入口和压力传感器之间的基本上所有的视线。 传感器内的电子器件耦合到压力传感器以测量电特性并提供其指示。 还提供了一种感测清洁环境中的压力的​​方法。