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    • 5. 发明授权
    • System making it possible to control the shape of a charged particle beam
    • 系统使得可以控制带电粒子束的形状
    • US5336973A
    • 1994-08-09
    • US999227
    • 1992-12-31
    • Thierry LerouxChristophe Py
    • Thierry LerouxChristophe Py
    • H01J1/304H01J3/02H01J3/18H01J3/30H01J29/46
    • H01J3/022H01J3/029
    • A system for controlling the shape of a charged particle beam. The particle beam is emitted from a source (58) of the said particles. Said source is associated with a collecting electrode which collects the particles. The system comprises at least one resistive zone (56) and at least two control electrodes (52, 54). The resistive zone and the control electrodes are arranged substantially at the same level as the source. The control electrodes are also placed on either side of the resistive zone and serve to polarize the latter. The electrical resistance profile of the resistive zone is chosen in such a way that it has the potential distribution so that it is possible to obtain the desired shape of the beam from the source when the control electrodes are appropriately polarized.
    • 一种用于控制带电粒子束形状的系统。 粒子束从所述粒子的源(58)发射。 所述源与收集颗粒的收集电极相关联。 该系统包括至少一个电阻区(56)和至少两个控制电极(52,54)。 电阻区和控制电极基本上设置在与源相同的水平。 控制电极也放置在电阻区的两侧,并用于使电极区域极化。 电阻区域的电阻分布以这样一种方式选择,使得其具有电势分布,使得当控制电极被适当地极化时,可以从源获得期望的光束形状。
    • 6. 发明授权
    • Multilayer microstructures and laser based method for precision and reduced damage patterning of such structures
    • 多层微结构和基于激光的方法用于这种结构的精确和减少的损伤图案化
    • US06719916B2
    • 2004-04-13
    • US10122236
    • 2002-04-16
    • Jan J. DubowskiYe TaoChristophe Py
    • Jan J. DubowskiYe TaoChristophe Py
    • B44C122
    • H01L21/268H01L51/0017H01L51/0059H01L51/0081H01L51/5221H01L51/56
    • Many integrated circuits require a multilayer structure which contains layer of an organic or polymeric material with a patterned metallic layer on it. Laser patterning has many favorable characteristics but it also damages the organic or polymeric material. A novel method is disclosed that makes possible laser patterning of conductive metal electrode deposited on top of an organic and/or polymeric material without significant ablation of the organic and/or polymeric material. The method can achieve higher patterning resolution, resulting in higher quality integrated circuits. The method is based on the application of a thin coating of an inexpensive anti-reflector deposited on top of the desired metal electrode which in turn lies on the organic and/or polymeric material. The thin anti-reflecting coating allows the use of a lower fluence laser for ablation of metal layer without damaging the underlying organic and/or polymeric material.
    • 许多集成电路需要一层多层结构,其中包含一层有机或聚合物材料,其上具有图案化的金属层。 激光图案具有许多有利的特性,但也损害有机或聚合材料。 公开了一种新颖的方法,其使得可能激光图案化沉积在有机和/或聚合物材料的顶部上的导电金属电极,而无需有机和/或聚合物材料的显着消融。 该方法可以实现更高的图案分辨率,从而产生更高质量的集成电路。 该方法基于沉积在期望的金属电极的顶部上的廉价防反射体的薄涂层的应用,其又位于有机和/或聚合物材料上。 薄的抗反射涂层允许使用较低的注量激光器来消融金属层,而不会损坏下面的有机和/或聚合物材料。