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    • 1. 发明申请
    • SYSTEM AND METHOD FOR TEST STRUCTURE ON A WAFER
    • 用于测试结构的系统和方法
    • US20100164508A1
    • 2010-07-01
    • US12616749
    • 2009-11-11
    • WANG JIAN PINGChin Chang LiaoWaisum Wong
    • WANG JIAN PINGChin Chang LiaoWaisum Wong
    • G01R31/02H01L23/48
    • H01L22/30G01R31/2884H01L22/34H01L2924/0002H01L2924/00
    • System and method for test structure on a wafer. According to an embodiment, the present invention provides a test structure for testing a chip. For example, the test structure and the chip are manufactured on a same substrate material and the testing being conducted is in a temperature-controlled environment. The test structure includes a top structure positioned above the chip. For example, the top structure can be characterized by a first surface area. The top structure includes a first metal material occupying less than 60% of the surface area. The test structure also includes a bottom structure positioned below the chip. For example, the bottom structure can be characterized by a second surface area. The second surface area is substantially equal to the first surface area. The bottom structure includes a first silicon material. The first silicon material occupies substantially all of the second surface area.
    • 晶圆上测试结构的系统和方法。 根据实施例,本发明提供了一种用于测试芯片的测试结构。 例如,测试结构和芯片在相同的基板材料上制造,并且正在进行的测试是在温度控制的环境中。 测试结构包括位于芯片上方的顶部结构。 例如,顶部结构可以由第一表面区域表征。 顶部结构包括占据表面积的不到60%的第一金属材料。 测试结构还包括位于芯片下方的底部结构。 例如,底部结构可以由第二表面区域表征。 第二表面积基本上等于第一表面积。 底部结构包括第一硅材料。 第一硅材料占据基本上所有的第二表面积。
    • 2. 发明授权
    • System and method for test structure on a wafer
    • 晶圆上测试结构的系统和方法
    • US08415663B2
    • 2013-04-09
    • US12616749
    • 2009-11-11
    • Wang Jian PingChin Chang LiaoWaisum Wong
    • Wang Jian PingChin Chang LiaoWaisum Wong
    • H01L23/48
    • H01L22/30G01R31/2884H01L22/34H01L2924/0002H01L2924/00
    • System and method for test structure on a wafer. According to an embodiment, the present invention provides a test structure for testing a chip. For example, the test structure and the chip are manufactured on a same substrate material and the testing being conducted is in a temperature-controlled environment. The test structure includes a top structure positioned above the chip. For example, the top structure can be characterized by a first surface area. The top structure includes a first metal material occupying less than 60% of the surface area. The test structure also includes a bottom structure positioned below the chip. For example, the bottom structure can be characterized by a second surface area. The second surface area is substantially equal to the first surface area. The bottom structure includes a first silicon material. The first silicon material occupies substantially all of the second surface area.
    • 晶圆上测试结构的系统和方法。 根据实施例,本发明提供了一种用于测试芯片的测试结构。 例如,测试结构和芯片在相同的基板材料上制造,并且正在进行的测试是在温度控制的环境中。 测试结构包括位于芯片上方的顶部结构。 例如,顶部结构可以由第一表面区域表征。 顶部结构包括占据表面积的不到60%的第一金属材料。 测试结构还包括位于芯片下方的底部结构。 例如,底部结构可以由第二表面区域表征。 第二表面积基本上等于第一表面积。 底部结构包括第一硅材料。 第一硅材料占据基本上所有的第二表面积。
    • 6. 发明授权
    • System and method for input pin ESD protection with floating and/or biased polysilicon regions
    • 具有浮置和/或偏置多晶硅区域的输入引脚ESD保护的系统和方法
    • US08319286B2
    • 2012-11-27
    • US12979306
    • 2010-12-27
    • Ting Chieh SuMin Chie JengChin Chang LiaoJun Cheng Huang
    • Ting Chieh SuMin Chie JengChin Chang LiaoJun Cheng Huang
    • H01L23/60H01L27/07
    • H01L27/027
    • A system and method for electrostatic discharge protection. The system includes a first transistor including a first drain, a second transistor including a second drain, and a resistor including a first terminal and a second terminal. The first terminal is coupled to the first drain and the second drain. Additionally, the system includes a third transistor coupled to the second terminal and a protected system. The third transistor includes a first gate, a first dielectric layer located between the first gate and a first substrate, a first source, and a third drain. The protected system includes a fourth transistor, and the fourth transistor includes a second gate, a second dielectric layer located between the second gate and a second substrate, a second source, and a fourth drain.
    • 一种用于静电放电保护的系统和方法。 该系统包括第一晶体管,其包括第一漏极,包括第二漏极的第二晶体管和包括第一端子和第二端子的电阻器。 第一端子耦合到第一漏极和第二漏极。 另外,该系统包括耦合到第二终端的第三晶体管和受保护的系统。 第三晶体管包括第一栅极,位于第一栅极和第一衬底之间的第一介电层,第一源极和第三漏极。 受保护的系统包括第四晶体管,并且第四晶体管包括第二栅极,位于第二栅极和第二衬底之间的第二电介质层,第二源极和第四漏极。
    • 7. 发明申请
    • SYSTEM AND METHOD FOR INPUT PIN ESD PROTECTION WITH FLOATING AND/OR BIASED POLYSILICON REGIONS
    • 具有浮动和/或偏置多晶硅区域的输入引脚ESD保护的系统和方法
    • US20120001261A1
    • 2012-01-05
    • US12979306
    • 2010-12-27
    • Ting Chieh SuMin Chie JengChin Chang LiaoJun Cheng Huang
    • Ting Chieh SuMin Chie JengChin Chang LiaoJun Cheng Huang
    • H01L23/60
    • H01L27/027
    • A system and method for electrostatic discharge protection. The system includes a first transistor including a first drain, a second transistor including a second drain, and a resistor including a first terminal and a second terminal. The first terminal is coupled to the first drain and the second drain. Additionally, the system includes a third transistor coupled to the second terminal and a protected system. The third transistor includes a first gate, a first dielectric layer located between the first gate and a first substrate, a first source, and a third drain. The protected system includes a fourth transistor, and the fourth transistor includes a second gate, a second dielectric layer located between the second gate and a second substrate, a second source, and a fourth drain.
    • 一种用于静电放电保护的系统和方法。 该系统包括第一晶体管,其包括第一漏极,包括第二漏极的第二晶体管和包括第一端子和第二端子的电阻器。 第一端子耦合到第一漏极和第二漏极。 另外,该系统包括耦合到第二终端的第三晶体管和受保护的系统。 第三晶体管包括第一栅极,位于第一栅极和第一衬底之间的第一介电层,第一源极和第三漏极。 受保护的系统包括第四晶体管,并且第四晶体管包括第二栅极,位于第二栅极和第二衬底之间的第二电介质层,第二源极和第四漏极。