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1. 发明授权

US06221199B1 Apparatus and method for removing an adhesive bonded pad 有权
标题翻译：用于去除粘合剂粘合垫的设备和方法
公开(公告)号：US06221199B1
公开(公告)日：2001-04-24
申请号：US09243033
申请日：1999-02-03
申请人： Yu-Chia Chang , Chih-I Peng , Chen-Chia Chiu , Yu-Sheng Shen
发明人： Yu-Chia Chang , Chih-I Peng , Chen-Chia Chiu , Yu-Sheng Shen
IPC分类号： B32B3500
CPC分类号： B24B37/20 , B24B37/34 , Y10T156/1174 , Y10T156/1184 , Y10T156/195
摘要： An apparatus and a method for removing an adhesive bonded pad from a backing plate are disclosed. The apparatus and the method are particularly suitable for removing a polishing pad in a chemical mechanical polishing apparatus, however, they can be used for removal of any other adhesively bonded pad on a rigid surface. The removal apparatus can be advantageously used without causing any danger to a machine operator even when a slippage of the tool has occurred. The T-shaped removal tool can be operated in a rotational motion such that an adhesive bond existed between a pad and a backing surface may be broken by shear force. A minimal amount of force is required due to the large T-shaped handle used for the removal operation.
摘要翻译：公开了一种用于从背板去除粘合剂粘合垫的设备和方法。该装置和方法特别适合于去除化学机械抛光装置中的抛光垫，然而，它们可用于去除刚性表面上的任何其它粘合粘合垫。即使当工具的滑动发生时，也可以有利地使用去除装置，而不会对机器操作者造成任何危险。 T形去除工具可以以旋转运动操作，使得存在于垫和背衬表面之间的粘合剂粘合可能被剪切力破坏。由于用于拆卸操作的大的T形把手需要最小的力。

2. 发明授权

US06516675B1 Bubble ultrasonic flow meter 有权
标题翻译：泡泡超声波流量计
公开(公告)号：US06516675B1
公开(公告)日：2003-02-11
申请号：US10053180
申请日：2002-01-15
申请人： Chin-Tsan Jan , Chen-Chia Chiu
发明人： Chin-Tsan Jan , Chen-Chia Chiu
IPC分类号： G01F144
CPC分类号： G01F1/662
摘要： A method and apparatus for preventing flow rate errors derived from an ultrasonic flow meter utilized in semiconductor fabrication operations. The ultrasonic flow meter is generally configured to include an extension chamber connected to a thin branch tube of the ultrasonic flow meter. A venturi tube can be positioned at an outflow location of the ultrasonic flow meter, such that the thin branch tube is broached into the venturi tube, wherein bubbles contained in a slurry flow are forced directly into the outflow location to thereby prevent inaccurate flow measurements derived from the ultrasonic flow meter. The extension chamber may be configured to reduce an inflow velocity associated with the slurry slow and ensure that the bubbles with not drift with the slurry flow. Additionally, a diameter of the branch tube may be configured such that the diameter is much smaller than a diameter associated with an inflow and/or outflow tube of the ultrasonic flow meter.
摘要翻译：一种用于防止从半导体制造操作中使用的超声波流量计得到的流量误差的方法和装置。超声波流量计通常被配置为包括连接到超声波流量计的薄分支管的延伸室。文丘里管可以位于超声波流量计的流出位置处，使得细分支管被拉入文丘里管，其中包含在浆液流中的气泡被迫直接进入流出位置，从而防止不精确的流量测量得到从超声波流量计。延伸室可以被配置为减少与浆料相关的进入速度慢，并且确保随着浆料流动而不漂移的气泡。此外，分支管的直径可以被配置成使得直径远小于与超声波流量计的流入和/或流出管相关联的直径。

3. 发明授权

US6068544A Apparatus and method for calibrating a polishing head 失效
标题翻译：用于校准抛光头的装置和方法
公开(公告)号：US6068544A
公开(公告)日：2000-05-30
申请号：US323343
申请日：1999-06-01
申请人： Chen-Chia Chiu , Fang-Lin Lu , Kuo-Pao Yeh , Yu-Sheng Shen
发明人： Chen-Chia Chiu , Fang-Lin Lu , Kuo-Pao Yeh , Yu-Sheng Shen
IPC分类号： B24B37/34 , B24B41/047 , B24B7/00
CPC分类号： B24B37/345 , B24B41/047
摘要： An apparatus for calibrating the centering of polishing heads in a polishing machine that is equipped with a plurality of spindles onto which polishing heads are mounted and a method for using such apparatus are disclosed. In the apparatus, a calibration disc is provided which has a hollow shaft mounted at a center of the bottom surface of the disc. A centering pin slidingly engaging an elongated cavity in the hollow shaft such that its protruded tip portion may be adjusted by using a locking device such as a set screw for different calibration procedures. The present invention novel apparatus can be used to calibrate the positioning of a polishing head mounted in a spindle with a pedestal in a load cup that is equipped with a center alignment aperture. The calibration can be conducted not only in the X, Y direction (or in the circumferential direction) of the spindle movement, but also in the Z direction (or a sweep direction) of the traversing spindle that occurs during a polishing operation.
摘要翻译：公开了一种用于校准抛光机中心的装置，该抛光机配备有多个主轴，抛光头安装在抛光机上，以及使用该装置的方法。在该装置中，提供了一个校准盘，其具有安装在盘的底表面的中心处的中空轴。定心销可滑动地接合空心轴中的细长空腔，使得其突出的末端部分可以通过使用诸如用于不同校准程序的固定螺钉的锁定装置来调节。本发明新颖的装置可用于校准安装在具有基座的主轴中的抛光头在装配有中心对准孔的装载杯中的定位。校准不仅可以在主轴移动的X，Y方向（或圆周方向）上进行，而且可以在抛光操作期间发生的横动主轴的Z方向（或扫掠方向）进行。

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