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1. 发明授权

US08705043B2 Height measurement by correlating intensity with position of scanning object along optical axis of a structured illumination microscope 有权
标题翻译：通过与结构化照明显微镜的光轴相关联的强度与扫描对象的位置进行高度测量
公开(公告)号：US08705043B2
公开(公告)日：2014-04-22
申请号：US12966207
申请日：2010-12-13
申请人： Chau-Hwang Lee , Chun-Chieh Wang
发明人： Chau-Hwang Lee , Chun-Chieh Wang
IPC分类号： G01B9/021 , G01B11/24 , G01B11/30
CPC分类号： G01B11/25 , G01B11/0608 , G06T7/521 , G06T2207/10016 , G06T2207/10056 , G06T2207/30004
摘要： A method for imaging an object using a microscope includes obtaining axial response data, the axial response data representative of a relationship between a separation between a top surface of the object and an objective lens of the microscope and an intensity of light reflected by the top surface of the object; positioning the object at a distance from the objective lens that is within a linear region of the axial response data; sequentially illuminating the object with a plurality of periodic patterns; obtaining a plurality of images of the object, each image resulting from the illumination of the object with a corresponding one of the plurality of periodic patterns; determining a reconstructed image of the object based on the plurality of images of the object; and, based on variations in the intensity of the reconstructed image, determining a topographic profile of the top surface of the object.
摘要翻译：使用显微镜成像物体的方法包括获得轴向响应数据，轴向响应数据表示物体的顶表面与显微镜的物镜之间的间隔与由顶表面反射的光的强度之间的关系的对象; 将物体定位在与轴向响应数据的线性区域内的离开物镜的距离处; 以多个周期性图案依次照明物体; 获得所述对象的多个图像，所述每个图像由所述对象的照明产生，所述每个图像具有所述多个周期性图案中的对应的一个; 基于对象的多个图像确定对象的重建图像; 并且基于重建图像的强度的变化，确定对象的顶表面的地形轮廓。

2. 发明授权

US5804813A Differential confocal microscopy 失效
标题翻译：差分共焦显微镜
公开(公告)号：US5804813A
公开(公告)日：1998-09-08
申请号：US659647
申请日：1996-06-06
申请人： Jyh Pyng Wang , Chau-Hwang Lee
发明人： Jyh Pyng Wang , Chau-Hwang Lee
IPC分类号： G02B21/00 , G02B21/06 , G02B21/26
CPC分类号： G02B21/0072 , G02B21/006 , G02B21/0084
摘要： The linear slope range of the axial response curve of confocal imaging is utilized to obtain nanometer depth resolution, a sample which is at the top of a piezo-electric translator (PZT) 6, using a highly spatial-coherent light source, high numerical aperture focusing devices, a pinhole, and an optical detector to produce the axial response of confocal imaging Before the measurement, the calibration of height and resolution must be done by fitting the linear slope range of the axial response curve to a straight fitting line. While measuring surface profiles, the sample height is first finely adjusted to the linear slope range, and a two-dimensional scanning is then performed on the plane vertical to the detecting light beam. The signal of optical detector which represents the variation of the surface height, is then recorded. In this way, a three-dimensional image of the sample surface profile can be obtained with nanometer depth resolution. As the system does not require any feed-back control circuit to lock the position of the sample to be detected, it operates in open-loop and has the ability of real-time image display.
摘要翻译：利用共焦成像的轴向响应曲线的线性斜率范围获得纳米深度分辨率，一个位于压电转换器（PZT）6顶部的样本，使用高空间相干光源，高数值孔径聚焦装置，针孔和光学检测器以产生共焦成像的轴向响应在测量之前，必须通过将轴向响应曲线的线性斜率范围拟合成直线拟合线来进行高度和分辨率的校准。在测量表面轮廓时，首先将样品高度精细调整到线性斜率范围，然后在垂直于检测光束的平面上进行二维扫描。然后记录表示表面高度变化的光学检测器的信号。以这种方式，可以用纳米深度分辨率获得样品表面轮廓的三维图像。由于系统不需要任何反馈控制电路来锁定待检测样品的位置，因此它可以开环工作，具有实时图像显示的能力。

3. 发明申请

US20110141483A1 OPTICAL PROFILOMETRY 有权
标题翻译：光学特性
公开(公告)号：US20110141483A1
公开(公告)日：2011-06-16
申请号：US12966207
申请日：2010-12-13
申请人： Chau-Hwang Lee , Chun-Chieh Wang
发明人： Chau-Hwang Lee , Chun-Chieh Wang
IPC分类号： G01B11/25
CPC分类号： G01B11/25 , G01B11/0608 , G06T7/521 , G06T2207/10016 , G06T2207/10056 , G06T2207/30004
摘要： A method for imaging an object using a microscope includes obtaining axial response data, the axial response data representative of a relationship between a separation between a top surface of the object and an objective lens of the microscope and an intensity of light reflected by the top surface of the object; positioning the object at a distance from the objective lens that is within a linear region of the axial response data; sequentially illuminating the object with a plurality of periodic patterns; obtaining a plurality of images of the object, each image resulting from the illumination of the object with a corresponding one of the plurality of periodic patterns; determining a reconstructed image of the object based on the plurality of images of the object; and, based on variations in the intensity of the reconstructed image, determining a topographic profile of the top surface of the object.
摘要翻译：使用显微镜成像物体的方法包括获得轴向响应数据，轴向响应数据表示物体的顶表面与显微镜的物镜之间的间隔与由顶表面反射的光的强度之间的关系的对象; 将物体定位在与轴向响应数据的线性区域内的离开物镜的距离处; 以多个周期性图案依次照明物体; 获得所述对象的多个图像，所述每个图像由所述对象的照明产生，所述每个图像具有所述多个周期性图案中的对应的一个; 基于对象的多个图像确定对象的重建图像; 并且基于重建图像的强度的变化，确定对象的顶表面的地形轮廓。

4. 发明授权

US08019136B2 Optical sectioning microscopy 有权
标题翻译：光学切片显微镜
公开(公告)号：US08019136B2
公开(公告)日：2011-09-13
申请号：US12341447
申请日：2008-12-22
申请人： Chau-Hwang Lee , Jiunn-Yuan Lin
发明人： Chau-Hwang Lee , Jiunn-Yuan Lin
IPC分类号： G06K9/00
CPC分类号： G06T3/4084 , G02B21/367 , G06T2207/10056 , G06T2207/10152
摘要： Systems and methods for optical sectioning microscopy with structured illumination are provided. A light source generates a light beam with a spatial pattern for successively illuminating a sample at each phase of a plurality of phases. A detector detects a first set of images of the sample at a first axial resolution and a first lateral resolution, each image being associated with a respective phase of the plurality of phases of the illumination. A processor processes the first set of images to generate an enhanced sectioned image of the sample. More specifically, the processor generates data representing a second set of images at a second axial resolution greater than the first axial resolution; and subsequently, performs spectral analysis on the data representing the second set of images to form data representing the enhanced sectioned image of the sample at a second lateral resolution greater than the first lateral resolution.
摘要翻译：提供了具有结构照明的光学切片显微镜的系统和方法。光源产生具有空间图案的光束，用于在多个相的每个相位处连续照射样品。检测器以第一轴向分辨率和第一横向分辨率检测样本的第一组图像，每个图像与照明的多个相位的相应相位相关联。处理器处理第一组图像以生成样本的增强分段图像。更具体地，处理器以大于第一轴向分辨率的第二轴向分辨率产生表示第二组图像的数据; 并且随后对表示第二组图像的数据进行光谱分析，以形成大于第一横向分辨率的第二横向分辨率的表示样本的增强分割图像的数据。

5. 发明授权

US07545510B2 Method of characterizing transparent thin-films using differential optical sectioning interference microscopy 失效
标题翻译：使用差分光学切片干涉显微镜表征透明薄膜的方法
公开(公告)号：US07545510B2
公开(公告)日：2009-06-09
申请号：US11789769
申请日：2007-04-25
申请人： Chau-Hwang Lee , Chun-Chieh Wang
发明人： Chau-Hwang Lee , Chun-Chieh Wang
IPC分类号： G01B11/02
CPC分类号： G01N21/45 , G01B9/04 , G01B11/0633 , G01N21/8422 , G01N2021/4126
摘要： An imaging, differential optical sectioning interference microscopy (DOSIM) system and method for measuring refractive indices and thicknesses of transparent thin-films. The refractive index and thickness are calculated from two interferometric images of the sample transparent thin-film having a vertical offset that falls within the linear region of an axial response curve of optically sectioning microscopy. Here, the images are formed by a microscope objective in the normal direction, i.e., in the direction perpendicular to the latitudinal surface of the thin-film. As a result, the lateral resolution of the transparent thin-film is estimated based on the Rayleigh criterion, 0.61λ/NA.
摘要翻译：用于测量透明薄膜的折射率和厚度的成像，差分光学切片干涉显微镜（DOSIM）系统和方法。折射率和厚度由具有落在光学切片显微镜的轴向响应曲线的线性区域内的垂直偏移的样品透明薄膜的两个干涉图像计算。这里，图像由显微镜物镜沿正交方向，即在与薄膜的纬向表面垂直的方向上形成。结果，透明薄膜的横向分辨率基于Rayleigh标准估计，为0.61λ/ NA。

6. 发明申请

US20100135547A1 OPTICAL SECTIONING MICROSCOPY 有权
标题翻译：光学部分显微镜
公开(公告)号：US20100135547A1
公开(公告)日：2010-06-03
申请号：US12341447
申请日：2008-12-22
申请人： Chau-Hwang Lee , Jiunn-Yuan Lin
发明人： Chau-Hwang Lee , Jiunn-Yuan Lin
IPC分类号： G06K9/00
CPC分类号： G06T3/4084 , G02B21/367 , G06T2207/10056 , G06T2207/10152
摘要： Systems and methods for optical sectioning microscopy with structured illumination are provided. A light source generates a light beam with a spatial pattern for successively illuminating a sample at each phase of a plurality of phases. A detector detects a first set of images of the sample at a first axial resolution and a first lateral resolution, each image being associated with a respective phase of the plurality of phases of the illumination. A processor processes the first set of images to generate an enhanced sectioned image of the sample. More specifically, the processor generates data representing a second set of images at a second axial resolution greater than the first axial resolution; and subsequently, performs spectral analysis on the data representing the second set of images to form data representing the enhanced sectioned image of the sample at a second lateral resolution greater than the first lateral resolution.
摘要翻译：提供了具有结构照明的光学切片显微镜的系统和方法。光源产生具有空间图案的光束，用于在多个相的每个相位处连续照射样品。检测器以第一轴向分辨率和第一横向分辨率检测样本的第一组图像，每个图像与照明的多个相位的相应相位相关联。处理器处理第一组图像以生成样本的增强分段图像。更具体地，处理器以大于第一轴向分辨率的第二轴向分辨率产生表示第二组图像的数据; 并且随后对表示第二组图像的数据进行光谱分析，以形成大于第一横向分辨率的第二横向分辨率的表示样本的增强分段图像的数据。

7. 发明申请

US20080266548A1 Method for characterizing transparent thin-films using differential optical sectioning interference microscopy 失效
标题翻译：使用差分光学切片干涉显微镜表征透明薄膜的方法
公开(公告)号：US20080266548A1
公开(公告)日：2008-10-30
申请号：US11789769
申请日：2007-04-25
申请人： Chau-Hwang Lee , Chun-Chieh Wang
发明人： Chau-Hwang Lee , Chun-Chieh Wang
IPC分类号： G01N21/00 , G06F15/00
CPC分类号： G01N21/45 , G01B9/04 , G01B11/0633 , G01N21/8422 , G01N2021/4126
摘要： An imaging, differential optical sectioning interference microscopy (DOSIM) system and method for measuring refractive indices and thicknesses of transparent thin-films. The refractive index and thickness are calculated from two interferometric images of the sample transparent thin-film having a vertical offset that falls within the linear region of an axial response curve of optically sectioning microscopy. Here, the images are formed by a microscope objective in the normal direction, i.e., in the direction perpendicular to the latitudinal surface of the thin-film. As a result, the lateral resolution of the transparent thin-film is estimated based on the Rayleigh criterion, 0.61λ/NA.
摘要翻译：用于测量透明薄膜的折射率和厚度的成像，差分光学切片干涉显微镜（DOSIM）系统和方法。折射率和厚度由具有落在光学切片显微镜的轴向响应曲线的线性区域内的垂直偏移的样品透明薄膜的两个干涉图像计算。这里，图像由显微镜物镜沿正交方向，即在与薄膜的纬向表面垂直的方向上形成。结果，透明薄膜的横向分辨率基于Rayleigh标准估计，为0.61λ/ NA。

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