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1. 发明授权

US4895446A Particle detection method and apparatus 失效
标题翻译：粒子检测方法及装置
公开(公告)号：US4895446A
公开(公告)日：1990-01-23
申请号：US246464
申请日：1988-09-19
申请人： Mario A. Maldari , Charly Allemand
发明人： Mario A. Maldari , Charly Allemand
IPC分类号： G01N15/02 , G01N21/94
CPC分类号： G01N21/94 , G01N15/0227
摘要： An apparatus and method are disclosed for detecting the presence of particles on the surface of an object such as the front side of a patterned semiconductor wafer. A collimated beam of light is directed onto an area on the surface of the object at a grazing angle of incidence. A detector positioned above the surface detects light scattered from any particles which may be present on the surface, but not specularly reflected light. The output of the detector is fed into a computer where the information is processed and then displayed on a display. The surface is prepositioned relative to the incident light beam so that the diffracted light from the surface and the pattern on the surface is at a minimum. The object is then moved translationally to expose another area to the incident light beam so that the entire surface of the object or selected portions thereof can be examined, an area at a time.
摘要翻译：公开了一种用于检测物体表面上诸如图案化半导体晶片的正面之间的颗粒的存在的装置和方法。准直光束以掠射角被引导到物体表面上的区域上。位于表面上方的检测器检测从表面上可能存在的任何颗粒散射的光，而不是镜面反射光。检测器的输出被馈送到计算机中，其中处理信息，然后显示在显示器上。表面相对于入射光束被预定位，使得来自表面的衍射光和表面上的图案处于最小。然后将物体平移移动以将另一区域暴露于入射光束，使得物体的整个表面或其选定部分可以一次检查一个区域。

2. 发明授权

US5132922A Emissivity independent multiwavelength pyrometer 失效
标题翻译：发射率独立的多波长高温计
公开(公告)号：US5132922A
公开(公告)日：1992-07-21
申请号：US673261
申请日：1991-03-20
申请人： Mansoor A. Khan , Charly Allemand , Thomas W. Eagar
发明人： Mansoor A. Khan , Charly Allemand , Thomas W. Eagar
IPC分类号： G01J5/00 , G01J5/60
CPC分类号： G01J5/60 , G01J2005/0051
摘要： An apparatus and method for non-contact temperature measurement of an object, using least-squares-based multiwavelength pyrometry techniques. Radiances from an object are detected by a spectrograph/detector apparatus and are converted into electronic signals readable by a computer. The computer then operates on these signals as data to be curve-fit, using least squares analysis, to a predetermined theoretical function for the dependence of the radiance on the wavelength. When the computer has minimized the least-squares difference function, the computer identified a parameter representing the temperature and reports this value to the user, along with a collaterally calculated maximum error in the temperature estimate.
摘要翻译：一种用于物体非接触式温度测量的装置和方法，使用基于最小二乘法的多波长高温测量技术。来自物体的辐射由光谱仪/检测器装置检测，并被转换为计算机可读的电子信号。然后，计算机将这些信号作为数据进行曲线拟合，使用最小二乘法分析，以达到辐射度对波长的依赖性的预定理论函数。当计算机最小化最小平方差函数时，计算机识别出一个表示温度的参数，并将该值报告给用户，以及在温度估计中相互计算的最大误差。

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