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1. 发明授权

US4642438A Workpiece mounting and clamping system having submicron positioning repeatability 失效
标题翻译：具有亚微米定位重复性的工件安装和夹紧系统
公开(公告)号：US4642438A
公开(公告)日：1987-02-10
申请号：US672724
申请日：1984-11-19
申请人： Karl W. Beumer , Charles A. Gaston , Charles H. Locke , Alfred Mack , Brian C. O'Neill , Warren J. Pinckney , Alan D. Wilson
发明人： Karl W. Beumer , Charles A. Gaston , Charles H. Locke , Alfred Mack , Brian C. O'Neill , Warren J. Pinckney , Alan D. Wilson
IPC分类号： H01L21/30 , H01J37/20 , H01L21/027 , H01L21/68 , B23K26/00
CPC分类号： H01L21/68 , H01J37/20
摘要： A high precision, high throughput submicrometer workpiece positioning system, particularly useful as a workpiece positioning means in electron beam lithography tools. The positioning system increases mechanical stability by essentially eliminating mechanical hysteresis, which allows state of the art electron beam lithography systems to provide the repeatable, accurate and dense circuit patterns that modern semiconductor trends demand.The positioning system in preferred form comprises a movable positioning table, a workpiece supporting superstructure which is elastically joined to the movable positioning table by three geometrically distinct kinematic support means and a two-stage coupling means which mounts a workpiece (i.e., semiconductor mask or wafer) to the workpiece supporting superstructure. A laser interferometer locating-positioning system is utilized to position the workpiece. The interferometer mirrors are integral with the workpiece supporting superstructure.The coupling means mounts a workpiece to the workpiece supporting superstructure with a minimum of mechanical distortion. Three two-stage coupling means are utilized in preferred form. The first stage is removable from the positioning, and allows for workpiece loading and unloading outside of the positioning system. The removable stage comprises an integral unit which includes two opposing arms with large radii spherical ends and a tab member. The spherical end center lines are collinear, providing for vertical clamping of the workpiece. The second stage is stationary and integral with the workpiece supporting superstructure. The stationary stage comprises two opposing arms with large radii spherical ends and clamps the tab of the removable stage by vertical clamping.
摘要翻译：高精度，高吞吐量的亚微米工件定位系统，特别适用于电子束光刻工具中的工件定位手段。定位系统通过基本上消除机械滞后来增加机械稳定性，这允许现有技术的电子束光刻系统提供现代半导体趋势需要的可重复，准确和密集的电路图案。优选形式的定位系统包括可移动定位台，通过三个几何不同的运动支撑装置弹性地连接到可移动定位台的工件支撑上部结构和安装工件（即半导体掩模或晶片）的两级联接装置）到工件支撑上部结构。使用激光干涉仪定位定位系统来定位工件。干涉仪镜与工件支撑上部结构是一体的。联接装置以最小的机械变形将工件安装到工件支撑上部结构。以优选的形式使用三个两级耦合装置。第一阶段可以从定位中移除，并允许在定位系统之外的工件加载和卸载。可拆卸台包括整体单元，其包括具有大半径球面端的两个相对臂和突片构件。球形端中心线是共线的，用于垂直夹紧工件。第二阶段是固定的，与工件支撑上部结构成一体。固定台包括两个具有大半径球面的相对臂，并通过垂直夹紧夹紧可拆卸台的突出部。

2. 发明授权

US4419714A Low inductance ceramic capacitor and method for its making 失效
标题翻译：低电感陶瓷电容器及其制造方法
公开(公告)号：US4419714A
公开(公告)日：1983-12-06
申请号：US364819
申请日：1982-04-02
申请人： Charles H. Locke
发明人： Charles H. Locke
IPC分类号： H01G4/232 , H01G4/12 , H01G4/30 , H01G4/38 , H01G4/34 , H01G13/00 , H01L1/02
CPC分类号： H01G4/385 , H01G4/30 , Y10T29/435
摘要： Described is an improved common faced terminated multi-layer ceramic capacitor structure capable of embodying multiple capacitors of various maximum voltage and capacitance rating and method for its making. The structure features a ceramic body including multiple sections having a dielectric element and companion plate of one or more types, the types defined by the number and placement on the plate of plate tabs. The sections are aligned in the body such that the plates are located at displaced intervals in the direction of the body length while the plate tabs are located at displaced intervals in the direction of the body width and exposed at a common body face. Buses interconnect the tabs and plate in groups at common face. By selectively connecting the buses, one or more capacitors may be formed in the body. A structure is improved by providing grooves in the common face to align tabs in groups and to maintain the groups separated with the effect that the maximum voltage the structure can withstand is not reduced to mis-alignment of tabs during formation of the body. The method features steps for grooving the common face and simultaneously aligning tabs in the body.
摘要翻译：描述了一种改进的共面端接多层陶瓷电容器结构，其能够体现各种最大电压和电容额定值的多个电容器及其制造方法。该结构具有陶瓷体，该陶瓷体包括具有一个或多个类型的电介质元件和伴随板的多个部分，其类型由板片的板上的数量和位置限定。这些部分在主体中对准，使得板沿主体长度的方向以移动的间隔定位，同时板突片位于沿着身体宽度的方向上移动的间隔并且暴露在共同的身体表面。公共汽车将公共面上的标签和板块组合在一起。通过选择性地连接总线，可以在主体中形成一个或多个电容器。通过在公共面中设置凹槽来改进结构，并且保持基体分离，使结构能够承受的最大电压不会在形成身体期间减小到突片的不对准。该方法具有用于切割公共面并同时对准身体中的突片的步骤。

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