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    • 1. 发明授权
    • Atomic absorption apparatus using a phase-modulated light beam
    • 使用相位调制光束的原子吸收装置
    • US5530541A
    • 1996-06-25
    • US396215
    • 1995-02-28
    • Charles H. AhnMalcolm R. BeasleySteven J. BenerofeMartin M. FejerRobert H. HammondWeizhi Wang
    • Charles H. AhnMalcolm R. BeasleySteven J. BenerofeMartin M. FejerRobert H. HammondWeizhi Wang
    • G01J3/433G01N21/31G01N21/39
    • G01N21/3103G01J3/4338
    • An atomic absorption apparatus using a laser for producing a light beam having a characteristic frequency f, typically ranging from several MHz to several GHz, and a characteristic polarization for measuring the absorption of that light beam by atoms of interest. The apparatus has a modulator to generate a modulating signal to modulate the characteristic frequency f and produce a phase-modulated light beam. The apparatus includes a domain where the specific atoms are located. This domain is positioned in the path of the phase-modulated light beam such that the phase-modulated light beam encounters the specific atoms when passing through the domain and some of the specific atoms absorb a portion of the phase-modulated light beam. Typically, the domains containing the atoms of interest include process chambers for vacuum coating, ion milling, sputtering, mass spectroscopy vapor coating or deposition, and the like. The amount of light absorbed depends on the motion of the atoms relative to the phase-modulated light beam.
    • 一种使用激光产生具有特征频率f(通常为几MHz至几GHz)的光束的原子吸收装置,以及用于测量该光束被感兴趣原子吸收的特征极化。 该装置具有调制器以产生调制信号以调制特征频率f并产生相位调制光束。 该装置包括特定原子所在的区域。 该域位于相位调制光束的路径中,使得相位调制光束在通过畴时遇到特定原子,并且一些特定原子吸收相位调制光束的一部分。 通常,包含感兴趣原子的结构域包括用于真空涂覆,离子研磨,溅射,质谱法蒸镀或沉积的处理室。 吸收的光量取决于原子相对于相位调制光束的运动。