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    • 7. 发明申请
    • APPARATUS AND METHOD FOR MEASURING CHARACTERISTICS OF MULTI-LAYERED THIN FILMS
    • 用于测量多层薄膜特性的装置和方法
    • US20120176623A1
    • 2012-07-12
    • US13076060
    • 2011-03-30
    • Chang Yun LeeSuk Jin HamJune Sik Park
    • Chang Yun LeeSuk Jin HamJune Sik Park
    • G01B11/02
    • G01B9/02044G01B9/0203G01B9/0209G01B9/02091G01B11/0675G01N21/45G01N21/8422G01N2021/8438
    • Disclosed herein are an apparatus and method for measuring characteristics of multi-layered thin films. There is provided an apparatus for measuring characteristics of multi-layered films, including: a light source member irradiating light to a sample formed of the multi-layered thin films; an interference-reflection member splitting light into a first beam for acquiring reference reflection light and a second beam for acquiring sample reflection light, and generating an interference signal when the light shutter is opened, and generating the reflection signal when the light shutter is closed; a sample member scanning and irradiating the sample by the second beam and transferring a support to which the sample is fixed; an interference-reflection light detection member splitting and detecting the intensity of the generated interference signal and reflection signal for each wavelength; and a signal processing member using the intensity of the interference signal for each wavelength and the reflection signal for each wavelength detected from the interference-reflection detection unit to image the multi-layered thin films of the sample, calculating reflectivity, refractive index, and the thickness of the multi-layered thin films. By this configuration, the performance of measuring characteristics of multi-layered thin films can be improved.
    • 本发明公开了一种用于测量多层薄膜特性的装置和方法。 提供了一种用于测量多层膜的特性的装置,包括:将光照射到由多层薄膜形成的样品上的光源; 干涉反射构件将光分成用于获取参考反射光的第一光束和用于获取样本反射光的第二光束,并且当光闸打开时产生干涉信号,并且当光快门关闭时产生反射信号; 样品构件通过第二光束扫描和照射样品并转移固定有样品的载体; 干涉反射光检测部件,分别检测所生成的干涉信号的强度和各波长的反射信号; 以及信号处理部件,对于每个波长使用干涉信号的强度和从干涉反射检测部检测出的每个波长的反射信号,对样品的多层薄膜进行成像,计算反射率,折射率和 多层薄膜的厚度。 通过该结构,能够提高多层薄膜的测定特性的性能。