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    • 3. 发明申请
    • METHOD FOR OBTAINING A HARD SURFACE AT THE NANOSCALE
    • 在纳米岩上获得硬表面的方法
    • US20090113726A1
    • 2009-05-07
    • US12237441
    • 2008-09-25
    • Cedric DUCROSFrederic SANCHETTEVincent SANZONE
    • Cedric DUCROSFrederic SANCHETTEVincent SANZONE
    • B26B21/54C23C14/35
    • B26B21/60B82Y30/00C23C14/025C23C14/0688
    • The invention relates to a method for forming a thin, high hardness coating and devices comprising it.The method of the invention consists in depositing, by magnetron cathode sputtering, a titanium film on at least one surface of a substrate under a partial pressure of argon of 1 Pa, then in depositing, by magnetron cathode sputtering, a titanium nitride film, onto the film obtained by introducing nitrogen into the cathodic sputtering chamber while maintaining a partial pressure of 1 Pa, and in depositing a film of a composite nanostructured material based on titanium, zirconium, boron and nitrogen onto the film obtained by magnetron cathode sputtering in active co-sputtering mode.The method of the invention can be applied in many fields, and in particular in the mechanical field in order to improve the surface hardness of mechanical components.
    • 本发明涉及一种形成薄的高硬度涂层的方法和包括它的装置。 本发明的方法在于通过磁控管阴极溅射在1Pa氩气的分压下在衬底的至少一个表面上沉积钛膜,然后通过磁控管阴极溅射将氮化钛膜沉积到 通过在保持分压为1Pa的同时将氮气引入阴极溅射室中,并且在基于钛,锆,硼和氮的复合纳米结构材料的膜上沉积到通过活性钴中的磁控管阴极溅射获得的膜上而获得的膜 - 溅射模式。 本发明的方法可以应用于许多领域,特别是在机械领域中,以提高机械部件的表面硬度。