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    • 1. 发明授权
    • Apparatus and method for checking thickness dimensions of an element while it is being machined
    • 用于在加工元件时检查元件的厚度尺寸的装置和方法
    • US08546760B2
    • 2013-10-01
    • US12668720
    • 2008-07-18
    • Carlo Dall'Aglio
    • Carlo Dall'Aglio
    • G01N21/35G01B11/06
    • G01B11/06B24B7/228B24B49/12H01L22/26
    • An apparatus for checking thickness dimensions in a semiconductor wafer (1) during grinding operations includes an optical probe (3) which transmits infrared radiations on the surface (2) being machined of the wafer (1), and detects beams that are reflected by said surface, by an opposite surface (2′) of the wafer and/or by surfaces (2″, 2′″) separating different layers in the wafer. The beam of emitted and reflected radiations travels along a path (4) with known and constant discontinuities, in part through the air (15) and in part through a cushion (30) of low flow liquid, which flows with substantially laminar flow. A support and positioning element (7) for the optical probe includes hydraulic ducts (22,25) that generate the liquid cushion. A method for checking the thickness dimensions includes the generation of the liquid cushion at the path along which the beam of emitted and reflected radiations travels.
    • 一种用于在研磨操作期间检查半导体晶片(1)中的厚度尺寸的装置,包括在被加工晶片(1)的表面(2)上透过红外辐射的光学探头(3),并且检测由所述 表面,由晶片的相对表面(2')和/或通过分离晶片中的不同层的表面(2“,”2“)。 发射和反射辐射的光束沿着具有已知和恒定不连续性的路径(4)行进,部分地通过空气(15)并且部分地通过基本上层流流动的低流动液体的衬垫(30)。 用于光学探针的支撑和定位元件(7)包括产生液体垫的液压管道(22,25)。 用于检查厚度尺寸的方法包括在发射和反射辐射束行进的路径处产生液体缓冲垫。
    • 2. 发明申请
    • TOUCH PROBE AND RELATED CHECKING METHOD
    • 触摸探针和相关检查方法
    • US20130205609A1
    • 2013-08-15
    • US13880335
    • 2011-10-25
    • Antonio GambiniCarlo Dall'Aglio
    • Antonio GambiniCarlo Dall'Aglio
    • G01B7/016
    • G01B7/016G01B5/016G01B7/012G01B21/04G01L1/16
    • A touch probe (1;1′;1″;1′″) for applications in machine tools or measuring machines includes a support frame (2) with a protective casing (3), and a movable armset (5) with a feeler (11) to touch a part to be checked (13). The probe includes a detection device (23) with a laminar piezoelectric transducer (25) made of polymeric material, such as polyvinylidene fluoride, which is connected to the support frame and fixed at a bearing and locating area (7), on which the movable armset rests in a position defined by an isostatic rest system (17). Conditioning electronics (30) connected to the support frame include processing means for processing a force signal (M) provided by the detection device, comparing it with a threshold value (S) and generating a touch signal (T). The conditioning electronics include differential charge amplifiers (3) and a processing system (55) to dynamically vary the threshold value depending on the most recent values of the force signal detected.
    • 用于在机床或测量机中应用的触摸探针(1; 1'; 1“; 1”)包括具有保护壳体(3)的支撑框架(2)和具有保护壳体 触摸(11)触摸待检查的部分(13)。 探针包括检测装置(23),其具有由诸如聚偏二氟乙烯的聚合物材料制成的层状压电换能器(25),其连接到支撑框架并固定在轴承和定位区域(7)上,可移动 臂架搁置在由等静止休息系统(17)限定的位置。 连接到支撑框架的调节电子设备(30)包括用于处理由检测装置提供的力信号(M)的处理装置,将其与阈值(S)进行比较并产生触摸信号(T)。 调理电子器件包括差分电荷放大器(3)和处理系统(55),以根据检测到的力信号的最近值来动态地改变阈值。
    • 3. 发明授权
    • Apparatus for checking diametral dimensions of a rotating cylindrical part during a grinding thereof
    • 用于在其研磨期间检查旋转圆柱形部件的直径尺寸的装置
    • US07954253B2
    • 2011-06-07
    • US12559642
    • 2009-09-15
    • Carlo Dall'AglioRiccardo Cipriani
    • Carlo Dall'AglioRiccardo Cipriani
    • G01B3/00G01D21/00
    • B24B49/04B24B5/42
    • An apparatus for checking the diameter of crankpins (18) of a crankshaft (34) in the course of the machining in a grinding machine comprises a first arm (9) rotating with respect to a support (5) arranged on the grinding-wheel slide (1) of the grinding machine, a second arm (12) rotating with respect to the first, a reference device (20) carried by the second arm and a measuring device (16, 17, 40-45) associated with a reference device. A guide device (21), fixed to the reference device (20), enables the apparatus to engage a crankpin, in the course of the orbital motion of the crankpin, and limit the displacements of the first arm and those of the second arm when a control device (28-30) displaces the apparatus to a rest position.
    • 一种用于在磨床中在机加工过程中检查曲轴(34)的曲柄销(18)的直径的装置包括相对于布置在研磨轮滑块上的支撑件(5)旋转的第一臂(9) (1),相对于第一臂旋转的第二臂(12),由第二臂承载的参考装置(20)和与参考装置相关联的测量装置(16,17,40-45) 。 固定在参考装置(20)上的引导装置(21)使得该装置能够在曲柄销的轨道运动过程中与曲柄销接合,并且限制第一臂和第二臂的位移 控制装置(28-30)将装置移动到静止位置。
    • 4. 发明授权
    • Apparatus for the dimensional checking of an orbitally rotating crankpin of a crankshaft
    • 用于曲轴的轨道旋转曲柄销的尺寸检查的装置
    • US07690127B2
    • 2010-04-06
    • US12268248
    • 2008-11-10
    • Carlo Dall'AglioWilliam Montanari
    • Carlo Dall'AglioWilliam Montanari
    • G01B3/38
    • B24B49/045B24B5/42B24B49/04G01B5/08
    • An apparatus for checking the diameter of crankpins of a crankshaft in the course of the machining in a grinding machine includes a Vee-shaped reference device, a measuring device associated with the reference device and including a feeler axially movable along the bisecting line of the Vee-shaped reference device, and a support device with a first arm rotating with respect to a support arranged on the grinding-wheel slide and a second arm rotating with respect to the first and carrying the Vee-shaped reference device.A guiding mechanism includes a limiting device, with mutually abutting surfaces and coupled to the support device, that guides the displacement of the reference device along a trajectory substantially parallel to the profile of the grinding wheel, allows the engagement of the reference device on a crankpin to be checked while the latter is orbitally moving, and does not interfere with the displacements of the support device caused by the orbital motion of the crankpin in the checking condition.
    • 一种用于在研磨机中加工过程中检查曲轴的曲柄销直径的装置包括V形形状的参考装置,与参考装置相关联的测量装置,包括沿着Vee的平分线可轴向运动的测头 以及支撑装置,其具有相对于布置在研磨轮滑块上的支撑件旋转的第一臂和相对于第一臂旋转并承载V形形状的参考装置的第二臂。 引导机构包括具有彼此邻接的表面并且联接到支撑装置的限制装置,其引导参考装置沿着基本上平行于砂轮的轮廓的轨迹的位移,允许参考装置接合在曲柄销 在后者被轨道移动时被检查,并且不会在检查条件下干扰由曲柄销的轨道运动引起的支撑装置的位移。
    • 5. 发明申请
    • APPARATUS FOR THE DIMENSIONAL CHECKING OF AN ORBITALLY ROTATING CRANKPIN OF A CRANKSHAFT
    • 用于尺寸检查起重机的旋转起重机的装置
    • US20090113736A1
    • 2009-05-07
    • US12268248
    • 2008-11-10
    • Carlo Dall'AglioWilliam Montanari
    • Carlo Dall'AglioWilliam Montanari
    • G01B3/38
    • B24B49/045B24B5/42B24B49/04G01B5/08
    • An apparatus for checking the diameter of crankpins of a crankshaft in the course of the machining in a grinding machine includes a Vee-shaped reference device, a measuring device associated with the reference device and including a feeler axially movable along the bisecting line of the Vee-shaped reference device, and a support device with a first arm rotating with respect to a support arranged on the grinding-wheel slide and a second arm rotating with respect to the first and carrying the Vee-shaped reference device.A guiding mechanism includes a limiting device, with mutually abutting surfaces and coupled to the support device, that guides the displacement of the reference device along a trajectory substantially parallel to the profile of the grinding wheel, allows the engagement of the reference device on a crankpin to be checked while the latter is orbitally moving, and does not interfere with the displacements of the support device caused by the orbital motion of the crankpin in the checking condition.
    • 一种用于在研磨机中加工过程中检查曲轴的曲柄销直径的装置包括V形形状的参考装置,与参考装置相关联的测量装置,包括沿着Vee的平分线可轴向运动的测头 以及支撑装置,其具有相对于布置在研磨轮滑块上的支撑件旋转的第一臂和相对于第一臂旋转并承载V形形状的参考装置的第二臂。 引导机构包括具有彼此邻接的表面并且联接到支撑装置的限制装置,其引导参考装置沿着基本上平行于砂轮的轮廓的轨迹的位移,允许参考装置接合在曲柄销 在后者被轨道移动时被检查,并且不会在检查条件下干扰由曲柄销的轨道运动引起的支撑装置的位移。
    • 7. 发明授权
    • Gauge for checking linear dimensions of mechanical pieces
    • 用于检查机械件的线性尺寸的量规
    • US4393592A
    • 1983-07-19
    • US283875
    • 1981-07-16
    • Carlo Dall'Aglio
    • Carlo Dall'Aglio
    • G01D5/02G01B3/00G01B5/00G01B5/012G01B5/20G01B7/00G01B7/28G01B21/00G01B5/02G01B7/02
    • G01B3/002
    • A gauge for checking linear dimensions of mechanical parts comprises a support, a movable gauging arm, a transducer coupled to the movable arm and the support, and a helical spring defining a longitudinal geometrical axis and having a first end in abutment with the movable arm and the second end in aubtment with a movable element of an adjustment device for adjusting the force applied by the spring to the gauging arm, the device comprising a screw coaxial to the spring and arranged within the spring coils, and a stanchion which controls a translation movement of the movable element along an axis substantially coinciding with the spring axis, translation movement of the movable element changing the axial length of the spring and, consequently, the force it applies to the gauging arm.
    • 用于检查机械部件的线性尺寸的量规包括支撑件,可移动测量臂,耦合到可动臂和支撑件的换能器以及限定纵向几何轴线并具有与可动臂邻接的第一端的螺旋弹簧,以及 所述第二端与调节装置的可移动元件配合,用于将由弹簧施加的力调节到测量臂,该装置包括与弹簧同轴并布置在弹簧圈内的螺钉,以及控制平移运动的支柱 可移动元件沿着基本上与弹簧轴线重合的轴线,可移动元件的平移运动改变了弹簧的轴向长度,并因此改变了它对测量臂的力。
    • 10. 发明授权
    • Head and apparatus for the linear dimension checking of mechanical pieces
    • 机械件的线性尺寸检查头和设备
    • US07076882B2
    • 2006-07-18
    • US11152391
    • 2005-06-15
    • Carlo Dall'AglioLuciano Ventura
    • Carlo Dall'AglioLuciano Ventura
    • G01B5/20
    • G01B5/0004B24B49/04G01B3/008G01B7/001G01B7/012G01B7/12G01B7/34G01D3/022
    • A head for the linear dimension checking of mechanical pieces including a casing, an arm carrying a feeler for touching the mechanical piece to be checked, a fulcrum for enabling displacements of the arm with respect to the casing and a transducer for providing signals depending on the position of the arm with respect to the casing. Various components of the head can be adjusted and/or replaced from the exterior of the casing. The transducer is of the inductive, half-bridge type, with multiple windings. An integral element for the electric connection to a processing unit includes the windings of the transducer, a cable and a connector. A checking apparatus, including at least a gauging or measuring head, includes a stationary structure and at least a support structure for the head, coupled to the stationary structure in an adjustable and removable way.
    • 用于机械件的线性尺寸检查的头部,包括壳体,承载用于接触要检查的机械件的触觉件的臂,用于使臂相对于壳体移位的支点和用于根据所述壳体提供信号的换能器 臂相对于外壳的位置。 可以从外壳的外部调整和/或更换头部的各种部件。 传感器是电感式,半桥型,具有多个绕组。 用于与处理单元的电连接的整体元件包括换能器的绕组,电缆和连接器。 包括至少一个测量头或测量头的检查装置包括固定结构和用于头部的至少一个支撑结构,其以可调节和可移除的方式联接到固定结构。