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    • 7. 发明授权
    • Process for forming a filter on a solid state imager
    • 在固态成像器上形成滤光片的工艺
    • US5268245A
    • 1993-12-07
    • US911001
    • 1992-07-09
    • Carl A. Chiulli
    • Carl A. Chiulli
    • G03F7/004B41M5/337C09B11/28C09B47/00C09K9/02G02B5/22G03C8/10G03F7/00H01L27/14G03F9/00
    • G03F7/0007
    • A filter is formed on a solid state imager by:forming, on the imaging surface of the imager, an adherent layer of a dye-containing photoresist composition comprising a photoresist resin and a thermochromic dye, this dye being substantially non-absorbent of actinic radiation of a first wavelength, but capable, upon heating, of undergoing a thermally-induced color change which renders it absorptive of actinic radiation of the first wavelength;imagewise exposing the adherent layer of dye-containing photoresist composition to actinic radiation of the first wavelength;removing one of the exposed and unexposed areas of the layer, while leaving the other of the exposed and unexposed areas on the imaging surface, to form a pattern of filter elements; andheating the solid state imager to a temperature and for a time sufficient to cause the dye to undergo its color change, thereby causing the filter elements to become absorptive of radiation of the first wavelength.This process avoids the long exposure times otherwise required when forming filter elements of a color which strongly absorbs the exposing radiation.
    • 在固态成像器上形成滤光器,方法是:在成像器的成像表面上形成包含光致抗蚀剂树脂和热致变色染料的含染料的光致抗蚀剂组合物的粘合层,该染料基本上不吸收光化辐射 第一波长但能够在加热时经受热诱导的颜色变化,其使其吸收第一波长的光化辐射; 将含染料的光致抗蚀剂组合物的粘附层成像曝光于第一波长的光化辐射; 去除所述层的暴露和未曝光区域中的一个,同时在成像表面上留下暴露和未曝光的区域中的另一个,以形成过滤元件的图案; 并将固态成像器加热到足以使染料发生颜色变化的温度和时间,从而使过滤元件吸收第一波长的辐射。 当形成强烈吸收曝光辐射的颜色的滤光元件时,该过程避免了另外需要的长曝光时间。
    • 9. 发明授权
    • Filter and solid state imager incorporating this filter
    • 滤波器和固态成像器结合此滤波器
    • US5140396A
    • 1992-08-18
    • US715100
    • 1991-06-13
    • Christopher R. NeedhamCarl A. ChiulliStephen F. Clark
    • Christopher R. NeedhamCarl A. ChiulliStephen F. Clark
    • G03F7/00H01L31/0216
    • G03F7/0007H01L31/02162
    • A filter is formed on a substrate, such as a solid state imager, by providing successively on the substrate a layer of an absorber material, a layer of a barrier material, and a layer of a photoresist material. The photoresist is patternwise exposed and developed, thereby baring regions of the barrier layer underlying selected regions of the photoresist layer. The coated substrate is reactive ion etched under a first set of etching conditions to etch away the bared regions of the barrier layer and to bare but not substantially etch the underlying regions of the absorber layer, and then reactive ion etched under a second set of etching conditions, thereby etching away the remaining regions of the photoresist layer and the bared regions of the absorber layer, so forming a filter on the substrate. To form multi-colored filters, the process may be repeated with a different dye, or additional dyes may be deposited by other processes, such as that described in U.S. Pat. No. 4,808,501.
    • 通过在衬底上依次提供吸收材料层,阻挡材料层和光致抗蚀剂材料层,在诸如固态成像器的衬底上形成滤光器。 光致抗蚀剂被图案化地曝光和显影,从而阻挡在光致抗蚀剂层的选定区域下面的区域。 涂覆的基底在第一组蚀刻条件下被反应离子蚀刻,以蚀刻掉阻挡层的裸露区域并且裸露但基本上不蚀刻吸收层的下面的区域,然后在第二组蚀刻下进行反应离子蚀刻 从而蚀刻掉光致抗蚀剂层的剩余区域和吸收层的裸露区域,从而在衬底上形成过滤器。 为了形成多色过滤器,该方法可以用不同的染料重复,或者可以通过其它方法沉积另外的染料,例如美国专利No. 第4,808,501号。