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1. 发明申请

US20040046248A1 Microsystem packaging and associated methods 审中-公开
标题翻译：微系统封装及相关方法
公开(公告)号：US20040046248A1
公开(公告)日：2004-03-11
申请号：US10235363
申请日：2002-09-05
申请人： Corning Intellisense Corporation
发明人： Marc Waelti , Amy Catherine Bowman , William Patrick Taylor , Jin Zou
IPC分类号： H01L023/34 , H01L023/48 , H01L023/52
CPC分类号： B81B7/0048 , G02B6/4232 , H01L23/13 , H01L23/14 , H01L23/16 , H01L23/3121 , H01L24/32 , H01L24/48 , H01L24/73 , H01L24/83 , H01L2224/05599 , H01L2224/131 , H01L2224/13109 , H01L2224/13111 , H01L2224/16225 , H01L2224/29109 , H01L2224/29111 , H01L2224/2919 , H01L2224/32014 , H01L2224/45099 , H01L2224/48091 , H01L2224/48227 , H01L2224/73204 , H01L2224/73257 , H01L2224/83194 , H01L2224/8385 , H01L2224/85399 , H01L2924/00013 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01027 , H01L2924/01033 , H01L2924/01049 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/0132 , H01L2924/01322 , H01L2924/0133 , H01L2924/014 , H01L2924/0665 , H01L2924/07802 , H01L2924/09701 , H01L2924/12042 , H01L2924/12044 , H01L2924/15153 , H01L2924/15165 , H01L2924/15311 , H01L2924/1532 , H01L2924/15787 , H01L2924/181 , H01L2924/1815 , H01L2924/3511 , H01L2224/13099 , H01L2924/00 , H01L2924/01026 , H01L2924/01028 , H01L2924/01029 , H01L2924/01047 , H01L2924/0105 , H01L2924/01083 , H01L2224/45015 , H01L2924/207
摘要： Methods and apparatus are provided for sealing and reducing warpage in a microsystem device. The microsystem device is assembled with a substrate and packaged.
摘要翻译：提供了用于密封和减少微系统装置中翘曲的方法和装置。微系统装置与衬底组装并封装。

2. 发明申请

WO2003014784A3 MICRO-ELECTRO-MECHANICAL MIRROR DEVICES HAVING A HIGH LINEAR MIRROR FILL FACTOR 审中-公开
公开(公告)号：WO2003014784A3
公开(公告)日：2003-02-20
申请号：PCT/US2002/026981
申请日：2002-08-09
申请人： CORNING INTELLISENSE CORPORATION
发明人： BERNSTEIN, Jonathan, Jay , CARLEN, Edwin, Thomas , MASTRANGELO, Carlos, Horacio , TAYLOR, William, Patrick
IPC分类号： G02B26/08
摘要： An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.

3. 发明申请

WO2002080255A1 ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL DEVICES AND METHOD OF MANUFACTURE 审中-公开
标题翻译：静电致动微电子机械装置及其制造方法
公开(公告)号：WO2002080255A1
公开(公告)日：2002-10-10
申请号：PCT/US2002/007669
申请日：2002-03-15
申请人： CORNING INTELLISENSE CORPORATION , ANDOSCA, Robert, G.
发明人： ANDOSCA, Robert, G.
IPC分类号： H01L21/311
CPC分类号： B81B3/0062 , G02B26/0841
摘要： A method is provided for fabricating electrodes for an electrostatically actuated MEMS device. The method includes patterning a wafer to define trenches, with each trench having an area selected in accordance with a desired depth; etching the wafer to form the trenches with the etch rate being varied in accordance with the trench area such that the trenches have depths determined by their respective areas (132); depositing a conductive material in the trenches to form the electrodes; and removing portions of the wafer surrounding the electrodes. A method of fabrication an electrostatically actuated MEMS mirror device is provided. The mirror structure includes a mirror and a suspension mechanism for supporting the mirror. An electrostatically actuated MEMS mirror device is formed. The device includes a middle wafer having raised and inclined steering electrodes; a top wafer including a mirror structure; and a handle wafer providing contacts for the electrodes.
摘要翻译：提供了一种用于制造用于静电MEMS装置的电极的方法。该方法包括图案化晶片以限定沟槽，每个沟槽具有根据期望深度选择的区域; 蚀刻所述晶片以形成所述沟槽，其中所述蚀刻速率根据所述沟槽面积而变化，使得所述沟槽具有由它们各自的区域（132）确定的深度; 在沟槽中沉积导电材料以形成电极; 以及去除围绕电极的晶片的部分。提供一种制造静电致动MEMS镜装置的方法。镜面结构包括镜子和用于支撑镜子的悬挂机构。形成静电驱动的MEMS反射镜装置。该装置包括具有升高和倾斜的转向电极的中间晶片; 包括镜子结构的顶部晶片; 以及提供用于电极的触点的手柄晶片。

4. 发明申请

WO2003053843A2 METAL ALLOY ELEMENTS IN MICROMACHINED DEVICES 审中-公开
标题翻译：微型机器中的金属合金元件
公开(公告)号：WO2003053843A2
公开(公告)日：2003-07-03
申请号：PCT/US2002/039610
申请日：2002-12-11
申请人： CORNING INTELLISENSE CORPORATION
发明人： BERNSTEIN, Jonathan, Jay , TAYLOR, William, Patrick
IPC分类号： B81B3/00
CPC分类号： H01H1/0036 , B81B3/0078 , B81B2201/045 , B81B2203/0118 , C23C14/165 , H01H1/023 , H01H2001/0057 , Y10T428/12597
摘要： A microelectromechanical device, comprizing: at least one flexible member formed from an alloy comprising: one or more noble metals selected from the group consisting of gold, platinum and palladium; and one or more alloying elements, the elements selected from iridium, ruthenium, rhodium, palladium, gold, tungsten, osmium and nickel, wherein the one or more alloying elements form a solid solution with the one or more noble metals and wherein the one or more alloying elements are present in an amount sufficient to provide at least one performance characteristic at least 50% greater than the noble metal alone, said performance characteristic selected from the group consisting of yield srength, tensile strength and hardness.
摘要翻译：一种微机电装置，其包括：至少一个柔性构件，所述柔性构件由合金形成，所述合金包含：选自由金，铂和钯组成的组中的一种或多种贵金属; 和一种或多种合金元素，所述元素选自铱，钌，铑，钯，金，钨，锇和镍，其中所述一种或多种合金元素与所述一种或多种贵金属形成固溶体，并且其中所述一种或多种合金元素更多合金元素的存在量足以提供比单独贵金属大至少50％的至少一个性能特征，所述性能特征选自屈服强度，拉伸强度和硬度。

5. 发明申请

WO2003014784A2 MICRO-ELECTRO-MECHANICAL MIRROR DEVICES HAVING A HIGH LINEAR MIRROR FILL FACTOR 审中-公开
标题翻译：具有高线性反射膜的微机电镜件
公开(公告)号：WO2003014784A2
公开(公告)日：2003-02-20
申请号：PCT/US2002/026981
申请日：2002-08-09
申请人： CORNING INTELLISENSE CORPORATION
发明人： BERNSTEIN, Jonathan, Jay , CARLEN, Edwin, Thomas , MASTRANGELO, Carlos, Horacio , TAYLOR, William, Patrick
IPC分类号： G02B6/00
CPC分类号： G02B6/3584 , G02B6/3512 , G02B6/3546 , G02B6/356 , G02B6/357 , G02B6/3572 , G02B6/3576 , G02B6/3578 , G02B7/1821 , G02B26/0833 , G02B26/085
摘要： An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.
摘要翻译：提供具有高线性镜填充因子的可移动MEMS镜装置的阵列。阵列包括基部结构和可枢转地安装在基部结构上的可选择性地移动的镜像结构。每个反射镜结构由连接到基部结构的挠曲件可枢转地支撑。反射镜结构各自包括反射表面部分，反射表面部分布置成紧邻其他反射镜结构的反射表面部分并且以大致线性的对准方式形成行结构。支撑相邻镜结构的挠曲在行结构的相对侧交错。

6. 发明申请

WO2002019011A3 MICROMECHANICAL OPTICAL SWITCH AND METHOD OF MANUFACTURE 审中-公开
公开(公告)号：WO2002019011A3
公开(公告)日：2002-03-07
申请号：PCT/US2001/023388
申请日：2001-07-25
申请人： CORNING INTELLISENSE CORPORATION
发明人： AKKARAJU, Sandeep , IYER, Nan , MASTRANGELO, Carlos, H.
IPC分类号： G02B26/08
摘要： The present invention relates to optical MEMS components, and in particular, to methods of fabricating a micromechanical optical switch. A removable layer is used during fabrication to define the gap between optical waveguides and a moveable element in the form of a mirror that is moved between states. This provides a high speed, low-power optical switch that is readily manufacturable.

7. 发明申请

US20030223676A1 Latching mechanism for magnetically actuated micro-electro-mechanical devices 有权
标题翻译：用于磁力微机电装置的锁定机构
公开(公告)号：US20030223676A1
公开(公告)日：2003-12-04
申请号：US10158623
申请日：2002-05-30
申请人： Corning Intellisense Corporation
发明人： Jonathan Jay Bernstein
IPC分类号： G02B006/35
CPC分类号： G02B6/358 , G02B6/3518 , G02B6/3546 , G02B6/3572
摘要： A latching mechanism is provided for selectively latching mirrors in an optical switch. The mirrors are selectively movable between rest and actuated positions. The latching mechanism provides stable latching of mirrors in an actuated position, i.e., without power being applied to maintain the actuated state.
摘要翻译：提供了一种用于选择性地锁定光开关中的反射镜的闭锁机构。反射镜可选择性地在静止位置和致动位置之间移动。闩锁机构提供镜子在致动位置的稳定闩锁，即没有施加动力以保持致动状态。

8. 发明申请

US20030202234A1 Magnetically actuated microelectromechanical devices and method of manufacture 有权
标题翻译：磁致动微机电装置及其制造方法
公开(公告)号：US20030202234A1
公开(公告)日：2003-10-30
申请号：US10133111
申请日：2002-04-26
申请人： Corning Intellisense Corporation
发明人： William Patrick Taylor , Jonathan Jay Bernstein
IPC分类号： G02B026/00 , G02B007/182
CPC分类号： G02B26/085
摘要： One embodiment is directed to a mirror device (for a device such as an optical switch, scanner or projector) having a movable mirror structure with an attached magnet. The mirror structure is movably mounted on a base structure, which includes an actuation coil for controlling movement of the mirror structure. Another embodiment is directed to a mirror device (in a device such as an optical switch, scanner or projector) having a high mirror fill factor. The device includes a mirror mounted on a support member, which is connected to a gimbal frame. The support member includes an enlarged portion configured to at least partially extend over the gimbal frame. The mirror substantially covers the enlarged portion of the support member, thereby providing the device with a high mirror fill factor. A further embodiment is directed to a mirror support structure for a movable mirror device (in a device such as an optical switch, scanner or projector). The mirror support structure includes a post member and an enlarged lid member, one of which includes a plurality of holes and the other of which includes a corresponding plurality of projections. The post and lid members are assembled by positioning the projections in the corresponding holes.
摘要翻译：一个实施例涉及具有带有附接磁体的可移动镜面结构的反射镜装置（用于诸如光学开关，扫描器或投影仪的装置）。反射镜结构可移动地安装在基座结构上，该基座结构包括用于控制反射镜结构的运动的致动线圈。另一个实施例涉及具有高反射镜填充因子的反射镜装置（诸如光学开关，扫描仪或投影仪的装置）。该装置包括安装在支撑构件上的反射镜，其连接到万向架框架。支撑构件包括被配置为至少部分地延伸在万向架框架上的扩大部分。反射镜基本上覆盖支撑构件的扩大部分，从而为装置提供高镜面填充因子。另一实施例涉及用于可移动镜装置（在诸如光开关，扫描器或投影仪的装置中）的镜支撑结构。镜支撑结构包括柱构件和放大盖构件，其中一个包括多个孔，另一个包括相应的多个突起。通过将突起定位在相应的孔中来组装柱盖和盖构件。

9. 发明申请

WO2002079853A1 ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL DEVICES AND METHOD OF MANUFACTURE 审中-公开
标题翻译：静电致动微电子机械装置及其制造方法
公开(公告)号：WO2002079853A1
公开(公告)日：2002-10-10
申请号：PCT/US2002/007670
申请日：2002-03-15
申请人： CORNING INTELLISENSE CORPORATION , KUDRLE, Thomas, David , MASTRANGELO, Carlos, Horacio , WAELTI, Marc , WANG, ChanChe , SHEDD, Gordon, M. , KIRKOS, Gregory, A. , BANCU, Mirela, Gabriela , HSIAO, James, Ching-Ming
发明人： KUDRLE, Thomas, David , MASTRANGELO, Carlos, Horacio , WAELTI, Marc , WANG, ChanChe , SHEDD, Gordon, M. , KIRKOS, Gregory, A. , BANCU, Mirela, Gabriela , HSIAO, James, Ching-Ming
IPC分类号： G02B26/08
CPC分类号： G02B6/357 , B81B3/0062 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , H01L2924/19107 , Y10S359/904
摘要： One embodiment is directed to a gimbal mechanism for a MEMS mirror device having folded flexure hinges (40, 42). Another embodiment is directed to a gimbal mechanism having a frame with through-holes or recesses (72) distributed thereabout to reduce weight of said frame. Other embodiments are directed to improved electrode structues for electrostatically actuated MEMS devices. Other embodiments are directed to methods for fabricating electrodes electrostatically acutated MEMS devices. Other embodiments are directed to methods of fabricating through-wafer interconnect devices. Other embodiments are directed MEMS mirror array packaging. Other embodiments are directed to electrostatically acutated MEMS devices having driver circuits integrated therewith. Other embodiments are directed to methods of patterning wafers with a plurality of through-holes. Other embodiments are directed to methods of forming moveable structues in MEMS devices. Other embodiments are directed to methods of depositing a thin film an the back of MEMS device.
摘要翻译：一个实施例涉及一种具有折叠的弯曲铰链（40,42）的MEMS反射镜装置的万向架机构。另一个实施例涉及一种万向节机构，其具有框架，该框架具有分布在其周围的通孔或凹槽（72），以减轻所述框架的重量。其他实施例涉及用于静电致动MEMS器件的改进的电极结构。其他实施例涉及用于制造静电极性MEMS器件的电极的方法。其他实施例涉及制造跨晶片互连器件的方法。其他实施例是定向的MEMS镜阵列封装。其他实施例涉及具有与其集成的驱动电路的静电适应MEMS器件。其他实施例涉及用多个通孔图案化晶片的方法。其他实施例涉及在MEMS器件中形成可移动结构的方法。其他实施例涉及在MEMS器件背面沉积薄膜的方法。

10. 发明申请

US20030137716A1 Tilting mirror with rapid switching time 审中-公开
标题翻译：倾斜镜具有快速切换时间
公开(公告)号：US20030137716A1
公开(公告)日：2003-07-24
申请号：US10053844
申请日：2002-01-22
申请人： Corning Intellisense Corporation
发明人： Robert George Andosca , Ijaz Hussain Jafri , Gregory Arthur Kirkos , Jonathan Jay Bernstein
IPC分类号： G02B026/00
CPC分类号： G02B26/0841
摘要： A device for rapid optical switching includes a membrane having a reflecting surface on at least a portion of an upper surface of the membrane, first and second spacers at opposing ends of the membrane for securing the membrane to a substrate, whereby the membrane is spaced apart from the substrate, and first and second actuation electrodes positioned on the same side of the membrane and spaced a distance from the membrane so as to form a gap therebetween, whereby actuation of the actuation electrodes applies a force to the membrane to tilt the reflective portion of the membrane at an angle with respect to the substrate.
摘要翻译：一种用于快速光学切换的装置包括在膜的上表面的至少一部分上具有反射表面的膜，用于将膜固定到基底的膜的相对端处的第一和第二间隔物，由此膜间隔开以及位于所述膜的同一侧并与所述隔膜隔开一段距离的第一和第二致动电极，以便在其之间形成间隙，由此所述致动电极的致动向所述膜施加力以使所述反射部分的膜相对于基底成一定角度。

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