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1. 发明申请

WO1998031848A1 PROCESSING SYSTEM AND METHOD FOR PROCESSING DISCRETE SHEETS 审中-公开
标题翻译：处理系统和处理分页的方法
公开(公告)号：WO1998031848A1
公开(公告)日：1998-07-23
申请号：PCT/US1997020727
申请日：1997-11-13
申请人： SOLAR CELLS, INC. , CICAK, Michael, J.
发明人： SOLAR CELLS, INC.
IPC分类号： C23C16/54
CPC分类号： C23C14/56
摘要： A processing system (20) and a method for processing discrete sheets (26) utilizes a housing (22) having an enclosed processing chamber (24) and at least one seal assembly which may be an ingress seal assembly (30) or an egress seal assembly (32). The seal assembly includes an elongated passage (34) of a uniform cross section and at least two seals (40) that are shaped to seal with the passage and being movable therethrough in a spaced relationship from each other along the length of the passage to permit at least one sheet to be received between the seals. An evacuation port (42) for drawing a vacuum within the passage (34) is provided at a location spaced from its outer end (36). When this spacing is a greater distance than the spacing between the seals (40), the vacuum is continuously drawn by the evacuation port (42). Second and third evacuation ports (44, 46) are provided to facilitate drawing of the vacuum at locations spaced successively inwardly from the next outer evacuation port (42, 44) by a distance greater than the spacing between the seals. Different embodiments are disclosed as including a carrier (48) connected to one seal (40), a carrier (48') connected to a pair of the seals (40), a processing mold (52) that can be carried by either carrier, and connectors (54) that extend between the seals. Rolls (66) are utilized to support the seals (40) for movement through the associated passage (34) in one embodiment, and in another embodiment the passage (34) of the seal assembly has a lower floor surface (70) along which the seals (40) are slidably moved through the passage.
摘要翻译：处理系统（20）和用于处理离散片（26）的方法利用具有封闭处理室（24）的壳体（22）和至少一个密封组件，所述密封组件可以是入口密封组件（30）或出口密封件总成（32）。密封组件包括具有均匀横截面的细长通道（34）和至少两个密封件（40），其被成形为与通道密封并且可沿着通道的长度以间隔开的关系彼此间隔地移动，以允许要在密封件之间容纳的至少一个片材。在与其外端（36）间隔开的位置处设置有用于在通道（34）内抽真空的抽空口（42）。当该间隔比密封件（40）之间的间隔更大的距离时，抽真空端口（42）连续地抽真空。提供第二和第三排气口（44,46）以便于在距离下一个外排气口（42,44）连续向内间隔大于密封件之间的距离的位置处抽真空。公开了不同的实施例，包括连接到一个密封件（40）的承载件（48），连接到一对密封件（40）的承载件（48'），可由任一载体承载的加工模具（52）以及在密封件之间延伸的连接器（54）。在一个实施例中，辊（66）用于支撑用于运动通过相关通道（34）的密封件（40），并且在另一个实施例中，密封组件的通道（34）具有下部地板表面（70）密封件（40）可滑动地移动通过通道。

2. 发明申请

WO2008094845A3 SYSTEM AND METHOD FOR GLASS SHEET SEMICONDUCTOR COATING 审中-公开
标题翻译：玻璃薄片半导体涂层的系统和方法
公开(公告)号：WO2008094845A3
公开(公告)日：2008-11-27
申请号：PCT/US2008052159
申请日：2008-01-28
申请人： WILLARD & KELSEY SOLAR GROUP L , HEIDER JAMES E , CICAK MICHAEL J , ADOLINE LEO JR , FAYKOSH GARY T
发明人： HEIDER JAMES E , CICAK MICHAEL J , ADOLINE LEO JR , FAYKOSH GARY T
IPC分类号： C23C16/00
CPC分类号： H01L29/0657 , B65G49/066 , B65G2249/02 , C23C14/50 , C23C14/566 , C23C16/458 , C23C16/46 , H01L21/67236 , H01L21/67706 , H01L21/67712 , H01L21/67721 , H01L21/67754 , H01L21/6776 , H01L21/68707 , H01L29/0649
摘要： A system (20) and method for coating semiconductor material on glass sheets is performed by conveying the glass sheets vertically suspended at upper extremities thereof through a system (20) having a housing (22) including a vacuum chamber (24). The glass sheets are conveyed on shuttles (42) through an entry load lock station (26) into the housing vacuum chamber (24), through a heating station (30) and at least one deposition station (32, 34) in the housing (22), and to a cooling station 36 prior to exiting of the system through an exit load lock station (28). The resultant semiconductor coated glass sheet (G) has tong marks (44') formed during the coating processing.
摘要翻译：通过将具有包括真空室（24）的壳体（22）的系统（20）输送到垂直悬挂在玻璃板上部的玻璃板的系统（20）和玻璃板上涂覆半导体材料的方法。玻璃板通过入口装载锁定站（26）穿过梭子（42）通过加热站（30）和壳体中的至少一个沉积站（32,34）输送到壳体真空室（24） 22），并且在通过出口加载锁定站（28）离开系统之前到达冷却站36。所得到的半导体涂覆玻璃板（G）在涂覆处理期间形成有钳痕（44'）。

3. 发明申请

WO2008094845A2 SYSTEM AND METHOD FOR GLASS SHEET SEMICONDUCTOR COATING AND RESULTANT PRODUCT 审中-公开
标题翻译：玻璃薄片半导体涂层和结果产品的系统和方法
公开(公告)号：WO2008094845A2
公开(公告)日：2008-08-07
申请号：PCT/US2008/052159
申请日：2008-01-28
申请人： WILLARD & KELSEY SOLAR GROUP, LLC , HEIDER, James, E. , CICAK, Michael, J. , ADOLINE, Leo, Jr. , FAYKOSH, Gary, T.
发明人： HEIDER, James, E. , CICAK, Michael, J. , ADOLINE, Leo, Jr. , FAYKOSH, Gary, T.
CPC分类号： H01L29/0657 , B65G49/066 , B65G2249/02 , C23C14/50 , C23C14/566 , C23C16/458 , C23C16/46 , H01L21/67236 , H01L21/67706 , H01L21/67712 , H01L21/67721 , H01L21/67754 , H01L21/6776 , H01L21/68707 , H01L29/0649
摘要： A system (20) and method for coating semiconductor material on glass sheets is performed by conveying the glass sheets vertically suspended at upper extremities thereof through a system (20) having a housing (22) including a vacuum chamber (24). The glass sheets are conveyed on shuttles (42) through an entry load lock station (26) into the housing vacuum chamber (24), through a heating station (30) and at least one deposition station (32, 34) in the housing (22), and to a cooling station 36 prior to exiting of the system through an exit load lock station (28). The resultant semiconductor coated glass sheet (G) has tong marks (44') formed during the coating processing.
摘要翻译：通过将具有包括真空室（24）的壳体（22）的系统（20）输送到垂直悬挂在其上端的玻璃板，进行玻璃板上的半导体材料的涂覆的系统（20）和方法。玻璃板通过入口装载锁定站（26）在穿梭台（42）上通过加热站（30）和壳体中的至少一个沉积站（32,34）输送到壳体真空室（24）中 22），并且在通过出口加载锁定站（28）离开系统之前到达冷却站36。所得到的半导体涂覆玻璃板（G）在涂布处理期间形成有钳痕（44'）。

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