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1. 发明专利

JP2015504598A 基板処理システムおよび基板処理方法有权
标题翻译：一种基板处理系统和衬底处理方法
公开(公告)号：JP2015504598A
公开(公告)日：2015-02-12
申请号：JP2014541275
申请日：2012-11-08
申请人：インテヴァックインコーポレイテッド , インテヴァックインコーポレイテッド , テリーペダーソンPEDERSON, Terry , テリーペダーソンPEDERSON, Terry , ヘンリーヒーズルマイアーHIESLMAIR, Henry , ヘンリーヒーズルマイアーHIESLMAIR, Henry , ムーンチュンCHUN, Moon , ムーンチュンCHUN, Moon , ヴィナイプラボカーPRABHAKAR, Vinay , ヴィナイプラボカーPRABHAKAR, Vinay , ババクアディビADIBI, Babak , ババクアディビADIBI, Babak , テリーブラックBLUCK, Terry , テリーブラックBLUCK, Terry
发明人：ペダーソンテリー , ペダーソンテリー , ヒーズルマイアーヘンリー , ヒーズルマイアーヘンリー , チュンムーン , チュンムーン , プラボカーヴィナイ , プラボカーヴィナイ , アディビババク , アディビババク , ブラックテリー , ブラックテリー
IPC分类号： H01L21/683 , B65G49/06 , H01L21/266 , H01L21/677
CPC分类号： H01L21/6833 , H01L21/26506 , H01L21/67745 , H01L21/6776 , H01L21/681 , H01L21/6831 , H01L31/1876 , H02N13/00 , Y02E10/50 , Y02P70/521
摘要：基板処理のためのシステムは、真空外囲器および真空外囲器内の処理領域のウェハを処理するのに適した位置に存在する処理チャンバを有する。2つのレールアセンブリが、処理領域の両側にそれぞれ設けられる。2つのチャックアレイがレールアセンブリのそれぞれに載せられ、それぞれがレールアセンブリ上に片持ち状に設けられ、複数のチャックを支持する。レールアセンブリは、レールを処理のための上の位置および新たなウェハをロードするためにチャックアセンブリを返送するための下の位置に配置する昇降機構に連結される。ピックアップヘッドアセンブリはウェハをコンベアからチャックアセンブリにロードする。ピックアップヘッドはウェハをウェハの前側から持ち上げる複数の静電チャックを有する。処理チャックの冷却チャネルを用いてエアクッションを発生させ、ピックアップヘッドから輸送されたウェハの位置合わせを補助する。
摘要翻译：系统用于在衬底处理包括在适合于处理所述真空外壳的晶片处理区域和包络外的真空的位置的处理腔室。设置在处理区域的两侧的两个导轨组件。放置在每个所述轨道组件的两个卡盘阵列，每个在上轨道组件的悬臂提供支持多个卡盘。轨道组件被耦合到升降机构以将较低位置返回卡盘组件来定位和加工轨道的顺序上加载新的晶片。拾取头组件是从输送到卡盘组件加载晶片。拾取头具有多个静电夹盘，以从晶片的前侧抬起晶片。冷却通道处理卡盘气垫使用，用于从所述拾取头协助输送晶片的对准产生。

2. 发明公开

EP2777069A4 SUBSTRATE PROCESSING SYSTEM AND METHOD 审中-公开
标题翻译：基板处理系统及方法
公开(公告)号：EP2777069A4
公开(公告)日：2015-01-14
申请号：EP12847303
申请日：2012-11-08
申请人： INTEVAC INC , PEDERSON TERRY , HIESLMAIR HENRY , CHUN MOON , PRABHAKAR VINAY , ADIBI BABAK , BLUCK TERRY
发明人： PEDERSON TERRY , HIESLMAIR HENRY , CHUN MOON , PRABHAKAR VINAY , ADIBI BABAK , BLUCK TERRY
IPC分类号： H01L21/677 , H01L21/68 , H01L21/683 , H01L31/18
CPC分类号： H01L21/6833 , H01L21/26506 , H01L21/67745 , H01L21/6776 , H01L21/681 , H01L21/6831 , H01L31/1876 , H02N13/00 , Y02E10/50 , Y02P70/521
摘要： A system for processing substrates has a vacuum enclosure and a processing chamber situated to process wafers in a processing zone inside the vacuum enclosure. Two rail assemblies are provided, one on each side of the processing zone. Two chuck arrays ride, each on one of the rail assemblies, such that each is cantilevered on one rail assemblies and support a plurality of chucks. The rail assemblies are coupled to an elevation mechanism that places the rails in upper position for processing and at lower position for returning the chuck assemblies for loading new wafers. A pickup head assembly loads wafers from a conveyor onto the chuck assemblies. The pickup head has plurality of electrostatic chucks that pick up the wafers from the front side of the wafers. Cooling channels in the processing chucks are used to create air cushion to assist in aligning the wafers when delivered by the pickup head.

3. 发明公开

EP2777069A2 SUBSTRATE PROCESSING SYSTEM AND METHOD 审中-公开
标题翻译：基板处理系统及方法
公开(公告)号：EP2777069A2
公开(公告)日：2014-09-17
申请号：EP12847303.0
申请日：2012-11-08
申请人： Intevac, Inc. , Pederson, Terry , Hieslmair, Henry , Chun, Moon , Prabhakar, Vinay , Adibi, Babak , Bluck, Terry
发明人： PEDERSON, Terry , HIESLMAIR, Henry , CHUN, Moon , PRABHAKAR, Vinay , ADIBI, Babak , BLUCK, Terry
IPC分类号： H01L21/677 , H01L21/687
CPC分类号： H01L21/6833 , H01L21/26506 , H01L21/67745 , H01L21/6776 , H01L21/681 , H01L21/6831 , H01L31/1876 , H02N13/00 , Y02E10/50 , Y02P70/521
摘要： A system for processing substrates has a vacuum enclosure and a processing chamber situated to process wafers in a processing zone inside the vacuum enclosure. Two rail assemblies are provided, one on each side of the processing zone. Two chuck arrays ride, each on one of the rail assemblies, such that each is cantilevered on one rail assemblies and support a plurality of chucks. The rail assemblies are coupled to an elevation mechanism that places the rails in upper position for processing and at lower position for returning the chuck assemblies for loading new wafers. A pickup head assembly loads wafers from a conveyor onto the chuck assemblies. The pickup head has plurality of electrostatic chucks that pick up the wafers from the front side of the wafers. Cooling channels in the processing chucks are used to create air cushion to assist in aligning the wafers when delivered by the pickup head.

4. 发明专利

SG11201402177XA SUBSTRATE PROCESSING SYSTEM AND METHOD 未知
公开(公告)号：SG11201402177XA
公开(公告)日：2014-06-27
申请号：SG11201402177X
申请日：2012-11-08
申请人： INTEVAC INC , PEDERSON TERRY , HIESLMAIR HENRY , CHUN MOON , PRABHAKAR VINAY , ADIBI BABAK , BLUCK TERRY
发明人： PEDERSON TERRY , HIESLMAIR HENRY , CHUN MOON , PRABHAKAR VINAY , ADIBI BABAK , BLUCK TERRY
IPC分类号： H01L21/677 , H01L21/687
摘要： A system for processing substrates has a vacuum enclosure and a processing chamber situated to process wafers in a processing zone inside the vacuum enclosure. Two rail assemblies are provided, one on each side of the processing zone. Two chuck arrays ride, each on one of the rail assemblies, such that each is cantilevered on one rail assemblies and support a plurality of chucks. The rail assemblies are coupled to an elevation mechanism that places the rails in upper position for processing and at lower position for returning the chuck assemblies for loading new wafers. A pickup head assembly loads wafers from a conveyor onto the chuck assemblies. The pickup head has plurality of electrostatic chucks that pick up the wafers from the front side of the wafers. Cooling channels in the processing chucks are used to create air cushion to assist in aligning the wafers when delivered by the pickup head.

5. 发明申请

WO2013070978A4 SUBSTRATE PROCESSING SYSTEM AND METHOD 审中-公开
标题翻译：基板加工系统及方法
公开(公告)号：WO2013070978A4
公开(公告)日：2013-09-26
申请号：PCT/US2012064241
申请日：2012-11-08
申请人： INTEVAC INC , PEDERSON TERRY , HIESLMAIR HENRY , CHUN MOON , PRABHAKAR VINAY , ADIBI BABAK , BLUCK TERRY
发明人： PEDERSON TERRY , HIESLMAIR HENRY , CHUN MOON , PRABHAKAR VINAY , ADIBI BABAK , BLUCK TERRY
IPC分类号： H01L21/677 , H01L21/687
CPC分类号： H01L21/6833 , H01L21/26506 , H01L21/67745 , H01L21/6776 , H01L21/681 , H01L21/6831 , H01L31/1876 , H02N13/00 , Y02E10/50 , Y02P70/521
摘要： A system for processing substrates has a vacuum enclosure and a processing chamber situated to process wafers in a processing zone inside the vacuum enclosure. Two rail assemblies are provided, one on each side of the processing zone. Two chuck arrays ride, each on one of the rail assemblies, such that each is cantilevered on one rail assemblies and support a plurality of chucks. The rail assemblies are coupled to an elevation mechanism that places the rails in upper position for processing and at lower position for returning the chuck assemblies for loading new wafers. A pickup head assembly loads wafers from a conveyor onto the chuck assemblies. The pickup head has plurality of electrostatic chucks that pick up the wafers from the front side of the wafers.
摘要翻译：用于处理衬底的系统具有真空外壳和位于处理真空外壳内的处理区中的晶片的处理室。提供两个轨道组件，一个在处理区域的每一侧。两个卡盘阵列，每个在一个导轨组件上，使得每个卡盘阵列悬挂在一个导轨组件上并支撑多个卡盘。轨道组件联接到升降机构，其将轨道放置在用于处理的上部位置，并且在较低位置处返回用于装载新晶片的卡盘组件。拾取头组件将晶片从传送器装载到卡盘组件上。拾取头具有从晶片的前侧拾取晶片的多个静电卡盘。

6. 发明申请

WO1998000389A1 2-HYDROXYPROPIONIC ACID DERIVATIVE AND ITS MANUFACTURING METHOD 审中-公开
标题翻译： 2-羟基丙酸衍生物及其制备方法
公开(公告)号：WO1998000389A1
公开(公告)日：1998-01-08
申请号：PCT/KR1997000133
申请日：1997-07-02
申请人： JEW, Sang, Sup , KO, Kwang, Ho , KIM, Bak, Kwang , KANG, Suk, Ku , KIM, Deuk, Joon , KIM, Won, Ki , KIM, Hwa, Jung , MOON, Chang, Kiu , PARK, Jeong, Hill , SUH, Young, Ger , LEE, Bong, Jin , LEE, Jee, Woo , JUNG, Ki, Hwa , CHUN, Moon, Woo , HUH, Hoon , LEE, Eung, Seok , KIM, Hyung, Ook , KIM, Eun, Kyung , KIM, Sung, Jin , CHEONG, Jae, Hoon
IPC分类号： C07C69/712
CPC分类号： C07D231/12 , C07C69/708 , C07D233/56 , C07D249/08 , C07D307/42 , C07D333/16 , C07D333/26 , C07D333/32
摘要： This invention relates to a novel 2-hydroxypropionic acid derivative and its manufacturing method. Based on its mechanism to inhibit the CPT I, 2-hydroxypropionic acid derivative of this invention has blood glucose lowering effects so that the derivative may be effectively used as an antidiabetic agent having remarkable antidiabetic activity and fewer side effects.
摘要翻译：本发明涉及一种新的2-羟基丙酸衍生物及其制备方法。基于其抑制CPT I的机制，本发明的2-羟基丙酸衍生物具有降血糖作用，因此该衍生物可有效用作具有显着抗糖尿病活性和较少副作用的抗糖尿病药。

7. 发明申请

WO2012068417A1 DIRECT CURRENT ION IMPLANTATION FOR SOLID PHASE EPITAXIAL REGROWTH IN SOLAR CELL FABRICATION 审中-公开
标题翻译：用于太阳能电池制造中固相相位延迟的直接电流离子注入
公开(公告)号：WO2012068417A1
公开(公告)日：2012-05-24
申请号：PCT/US2011/061274
申请日：2011-11-17
申请人： INTEVAC, INC. , CHUN, Moon , ADIBI, Babak
发明人： CHUN, Moon , ADIBI, Babak
IPC分类号： H01L21/20
CPC分类号： H01L31/1864 , H01L21/2236 , H01L21/324 , H01L31/068 , H01L31/1804 , H01L31/1872 , Y02E10/547 , Y02P70/521
摘要： An apparatus and methods for ion implantation of solar cells. The disclosure provide enhanced throughput and recued or elimination of defects after SPER anneal step. The substrate is continually implanted using continuous high dose-rate implantation, leading to efficient defect accumulation, i.e., amorphization, while suppressing dynamic self-annealing.
摘要翻译：太阳能电池离子注入的装置和方法。本发明在SPER退火步骤之后提供增强的生产量和再现或消除缺陷。使用连续的高剂量率注入连续注入基片，导致有效的缺陷积累，即非晶化，同时抑制动态自退火。

8. 发明申请

WO1998000422A1 OXIRANE CARBOXYLIC ACID DERIVATIVE AND ITS MANUFACTURING METHOD 审中-公开
标题翻译：氧化羧酸衍生物及其制备方法
公开(公告)号：WO1998000422A1
公开(公告)日：1998-01-08
申请号：PCT/KR1997000132
申请日：1997-07-02
申请人： JEW, Sang, Sup , KO, Kwang, Ho , KIM, Bak, Kwang , KANG, Suk, Ku , KIM, Deuk, Joon , KIM, Won, Ki , KIM, Hwa, Jung , MOON, Chang, Kiu , PARK, Jeong, Hill , SUH, Young, Ger , LEE, Bong, Jin , LEE, Jee, Woo , JUNG, Ki, Hwa , CHUN, Moon, Woo , HUH, Hoon , LEE, Eung, Seok , KIM, Hyung, Ook , KIM, Eun, Kyung , KIM, Sung, Jin , CHEONG, Jae, Hoon
IPC分类号： C07D405/04
CPC分类号： C07D405/12 , C07D303/48 , C07D407/12 , C07D409/12
摘要： This invention relates to a novel oxirane carboxylic acid derivative and thereof manufacturing method. Based on thereof mechanism to inhibit the CPT I, oxirane carboxylic acid derivative of this invention has blood glucose lowering effects so that the derivative may be effectively used as an antidiabetic agent having remarkable antidiabetic activity and less side effects.
摘要翻译：本发明涉及一种新型环氧乙烷羧酸衍生物及其制备方法。基于抑制CPT I的机制，本发明的环氧乙烷羧酸衍生物具有降血糖作用，使得该衍生物可有效用作具有显着抗糖尿病活性和较少副作用的抗糖尿病药。

9. 发明申请

WO2011059225A3 PREPARATION METHOD OF VINYL AROMATIC HYDROCARBON-CONJUGATED DIENE BLOCK COPOLYMER USING COUPLING REACTION WITH IMPROVED ION STABILITY 审中-公开
标题翻译：乙烯芳香烃共轭二烯嵌段共聚物的改进离子稳定性的耦合反应制备方法
公开(公告)号：WO2011059225A3
公开(公告)日：2011-10-27
申请号：PCT/KR2010007913
申请日：2010-11-10
申请人： LG CHEMICAL LTD , LEE CHOON HWA , CHUN MOON SEOK
发明人： LEE CHOON HWA , CHUN MOON SEOK
IPC分类号： C08F297/04 , C08F2/44 , C08F236/10
CPC分类号： C08F297/044
摘要： The present invention relates to a preparation method of a vinyl aromatic hydrocarbon-conjugated diene block copolymer using coupling polymerization with improved ion stability. According to the present invention, the preparation method of a vinyl aromatic hydrocarbon-conjugated diene block copolymer comprises the following steps of: (a) polymerizing a vinyl aromatic hydrocarbon monomer with an organolithium compound polymerization initiator in a hydrocarbon solvent to prepare a first mixture solution containing a vinyl aromatic hydrocarbon block; and (b) adding a conjugated diene monomer to the first mixture solution of the step (a) to form a conjugated diene block to the terminal of the vinyl aromatic hydrocarbon block, thereby preparing a second mixture solution containing a vinyl aromatic hydrocarbon block-conjugated diene block copolymer, wherein the preparation method comprises the step of (c) adding a Lewis acid to the first mixture solution before the initiation of polymerization of the vinyl aromatic hydrocarbon monomer of the step (a), during polymerization, or the termination of polymerization.
摘要翻译：乙烯基芳香烃 - 共轭二烯嵌段共聚物的制备方法本发明涉及使用离子稳定性提高的偶联聚合制备乙烯基芳香烃 - 根据本发明，乙烯基芳香烃 - 共轭二烯嵌段共聚物的制备方法包括以下步骤：（a）使乙烯基芳烃单体与有机锂化合物聚合引发剂在烃溶剂中聚合以制备第一混合物溶液含有乙烯基芳烃嵌段; 和（b）在步骤（a）的第一混合溶液中加入共轭二烯单体以在乙烯基芳烃嵌段的末端形成共轭二烯嵌段，由此制备含乙烯基芳烃嵌段共轭物的第二混合溶液二烯嵌段共聚物，其中所述制备方法包括以下步骤：（c）在步骤（a）的乙烯基芳烃单体的聚合引发之前，在聚合期间或聚合的终止期间，将路易斯酸添加至第一混合物溶液。

10. 发明申请

WO2011005582A1 PLASMA GRID IMPLANT SYSTEM FOR USE IN SOLAR CELL FABRICATIONS 审中-公开
标题翻译：用于太阳能电池制造的等离子体网格植入系统
公开(公告)号：WO2011005582A1
公开(公告)日：2011-01-13
申请号：PCT/US2010/039690
申请日：2010-06-23
申请人： SOLAR IMPLANT TECHNOLOGIES INC. , ADIBI, Babak , CHUN, Moon
发明人： ADIBI, Babak , CHUN, Moon
IPC分类号： H01J37/08
CPC分类号： H01L31/1876 , C23C14/042 , C23C14/48 , H01J37/185 , H01J37/3171 , H01J37/32412 , H01J37/32422 , H01J2237/0437 , H01J2237/184 , H01J2237/201 , H01J2237/327 , H01J2237/3365 , H01L21/2236 , H01L31/068 , H01L31/0682 , H01L31/1804 , H01L31/1864 , Y02E10/547 , Y02P70/521
摘要： A method of ion implantation comprising: providing a plasma within a plasma region of a chamber; positively biasing a first grid plate, wherein the first grid plate comprises a plurality of apertures; negatively biasing a second grid plate, wherein the second grid plate comprises a plurality of apertures; flowing ions from the plasma in the plasma region through the apertures in the positively-biased first grid plate; flowing at least a portion of the ions that flowed through the apertures in the positively-biased first grid plate through the apertures in the negatively-biased second grid plate; and implanting a substrate with at least a portion of the ions that flowed through the apertures in the negatively-biased second grid plate.
摘要翻译：一种离子注入的方法，包括：在室的等离子体区域内提供等离子体; 使第一格栅板向正偏置，其中第一格栅板包括多个孔; 负偏置第二格栅板，其中所述第二格板包括多个孔; 使来自等离子体区域中的等离子体的离子通过正偏置的第一格栅板中的孔流动; 使流经所述正偏置的第一格栅板中的孔的至少一部分离子流过负偏压的第二格栅板中的孔; 以及用至少一部分离子注入衬底，所述离子流过所述负偏压的第二栅格板中的所述孔。

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