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    • 8. 发明申请
    • NANOPOROUS DIELECTRICS FOR PLASMA GENERATOR
    • 用于等离子体发生器的纳米电介质
    • WO2004032176A1
    • 2004-04-15
    • PCT/KR2003/002023
    • 2003-10-01
    • LEE, Kyu-WangPARK, Sung-JinCHO, Jin-Hoon
    • LEE, Kyu-WangPARK, Sung-JinCHO, Jin-Hoon
    • H01J37/32
    • H01J37/32559H01J37/32018
    • The present invention provides a plasma electrode with nanoporous dielectrics of their pore size of few nm to few um. According to an embodiment of the present invention, regular or irregular nanoporous dielectrics are formed on the electrodes and arranged symmetrically or asymmetrically to produce a glow discharge with various modes of volume, surface and coplanar discharge. Simple modification of plasma parameters and consequently the improvement of stability and efficiency of plasma can be achieved by changing the thickness, homogeneity, pore diameter and porosity of the nanoporous dielectrics and by impregnation or forming the plasma reforming materials such as conductor, semiconductor or secondary electron emissive materials inside of the pore or surface of the dielectrics.
    • 本发明提供一种等离子体电极,其具有孔径小至几毫米的纳米多孔电介质。 根据本发明的实施例,在电极上形成规则或不规则的纳米多孔介电体,对称或不对称地布置以产生具有各种体积,表面和共面放电模式的辉光放电。 通过改变纳米多孔电介质的厚度,均匀性,孔径和孔隙率以及通过浸渍或形成诸如导体,半导体或二次电子的等离子体重整材料,可以实现等离子体参数的简单修改,从而提高等离子体的稳定性和效率 在电介质的孔或表面内的发射材料。