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1. 发明申请

WO2012173845A2 APPARATUS AND METHOD FOR COMBINATORIAL PLASMA DISTRIBUTION THROUGH A MULTI-ZONED SHOWERHEAD 审中-公开
标题翻译：通过多区淋浴器组合等离子体分布的装置和方法
公开(公告)号：WO2012173845A2
公开(公告)日：2012-12-20
申请号：PCT/US2012/041151
申请日：2012-06-06
申请人： INTERMOLECULAR, INC. , ENDO, Richard , CHILD, Kent, Riley
发明人： ENDO, Richard , CHILD, Kent, Riley
IPC分类号： H01L21/205
CPC分类号： C23C16/04 , B01J2219/0043 , B01J2219/00443 , B01J2219/00527 , B01J2219/00585 , B01J2219/00596 , B01J2219/00603 , B01J2219/00659 , C23C16/45519 , C23C16/45565 , C23C16/45574 , C23C16/5096 , C23C16/52 , H01J37/3244 , H01J37/32449
摘要： A multi-zone, combinatorial, single wafer showerhead is used to concurrently develop hardware, materials, unit processes, and unit process sequences. The multi-zone, combinatorial, single wafer showerhead utilizes showerhead pucks to perform process sequences on isolated regions of a single substrate. The showerhead pucks are designed so that they are easily interchangeable to allow the characterization of the interaction between hardware characteristics, process parameters, and their influence on the result of the process sequence.
摘要翻译：多区域，组合单晶片喷头用于同时开发硬件，材料，单元工艺和单元工艺顺序。多区域，组合单晶片喷头利用喷头冰球在单个基板的隔离区域上执行处理序列。喷头冰球设计成使得它们可以容易地互换，以便表征硬件特性，过程参数及其对过程顺序结果的影响之间的相互作用。

2. 发明申请

WO2008021460A3 CATCH-CUP TO DIVERTER ALIGNMENT LEVELING JIG 审中-公开
标题翻译：水槽对流水平对准
公开(公告)号：WO2008021460A3
公开(公告)日：2008-11-27
申请号：PCT/US2007018195
申请日：2007-08-15
申请人： APPLIED MATERIALS INC , CHILD KENT RILEY , EGAMI GLEN , KO ALEXANDER SOU-KANG
发明人： CHILD KENT RILEY , EGAMI GLEN , KO ALEXANDER SOU-KANG
IPC分类号： H01L21/306 , B08B7/00 , B65G49/07 , F26B11/08 , G05B19/04 , G11B7/00 , H01L21/68
CPC分类号： H01L21/67023
摘要： An apparatus for leveling and centering a catch-cup chamber to a diverter chamber of a semiconductor processing chamber is described, hi one embodiment, the apparatus has a frame with branches. A coupler is mounted to the end of each branch. A measuring device is mounted to each branch. The apparatus is placed in the diverter. The measuring device measures a distance from a branch to a top surface of the catch-cup chamber.
摘要翻译：描述了一种用于将捕捉杯室调平和定心到半导体处理室的转向室的装置。在一个实施例中，该装置具有带有分支的框架。耦合器安装到每个分支的末端。测量装置安装到每个分支。该设备放置在分流器中。测量装置测量从分支到捕捉杯室的顶表面的距离。

3. 发明申请

WO2012154682A1 COMBINATORIAL AND FULL SUBSTRATE SPUTTER DEPOSITION TOOL AND METHOD 审中-公开
标题翻译：组合和全基板溅射沉积工具和方法
公开(公告)号：WO2012154682A1
公开(公告)日：2012-11-15
申请号：PCT/US2012/036804
申请日：2012-05-07
申请人： INTERMOLECULAR, INC. , CHILD, Kent, Riley , YANG, Hong, Sheng , KELEKAR, Rajesh
发明人： CHILD, Kent, Riley , YANG, Hong, Sheng , KELEKAR, Rajesh
IPC分类号： C23C14/32
CPC分类号： C23C14/3464 , C23C14/04
摘要： A dual purpose processing chamber is provided. The dual purpose processing chamber includes a lid disposed over a top surface of a processing region of the processing chamber. A plurality of sputter guns with a target affixed to one end of each of the sputter guns is included. The plurality of sputter guns extend through the lid of the process chamber, wherein each of the plurality of sputter guns is oriented such that a surface of the target affixed to each gun is angled toward an outer periphery of a substrate. In another embodiment, each of the sputter guns is affixed to an extension arm and the extension arm is configured to enable movement in four degrees of freedom. A method of performing a deposition process is also included.
摘要翻译：提供了一个双重目的的处理室。双用途处理室包括设置在处理室的处理区域的顶表面上的盖子。包括固定在每个溅射枪的一端的目标的多个溅射枪。多个溅射枪延伸穿过处理室的盖，其中多个溅射枪中的每一个被定向成使得固定到每个喷枪的靶的表面朝向衬底的外周边成角度。在另一个实施例中，每个溅射枪被固定到延伸臂上，并且延伸臂构造成能够以四个自由度运动。还包括执行沉积工艺的方法。

4. 发明申请

WO2008033339A3 SYSTEM AND METHOD FOR AUTOMATICALLY CLAMPING A TUBE IN AN ORBITAL WELDER 审中-公开
标题翻译：用于自动夹紧在轨道焊接机中的管的系统和方法
公开(公告)号：WO2008033339A3
公开(公告)日：2008-08-07
申请号：PCT/US2007019726
申请日：2007-09-11
申请人： THERMA CORP INC , CHILD KENT RILEY
发明人： CHILD KENT RILEY
IPC分类号： B25B27/14 , B23K9/12 , B23K9/127 , B23K31/02 , B23K37/00 , B23K37/053
CPC分类号： B23K9/1274 , B23K37/0533 , B23K2201/06 , Y10T29/4943
摘要： A novel orbital welder includes a body defining a tube passage, a weld tip, a light source disposed to emit light toward the tube passage such that the emitted light will impinge upon one or more tubes placed in the tube passage, a detector to detect the light emitted by the light source from the tube passage, a clamp adjacent the tube passage, and a control unit operative to close the clamp responsive to a signal from the detector. A method is also disclosed for automatically clamping tubes in an orbital welder when they are properly aligned. The method includes the steps of emitting light from the light source into the tube passage, monitoring the light from the tube passage with the detector, receiving a signal indicative of the position of the tube(s) based on the intensity of the detected light, and automatically closing a clamp depending on the signal from the detector.
摘要翻译：一种新颖的轨道焊接机包括限定管通道的主体，焊接尖端，设置成朝向管通道发射光的光源，使得发射的光将撞击放置在管通道中的一个或多个管，检测器以检测由光源从管通道发射的光，邻近管通道的夹具，以及控制单元，用于响应于来自检测器的信号闭合夹具。还公开了一种方法，用于在管道焊接机正确对准时自动夹紧管道。该方法包括以下步骤：将来自光源的光发射到管通道中，利用检测器监测来自管通道的光，基于检测到的光的强度接收指示管的位置的信号，并根据来自检测器的信号自动关闭钳位。

5. 发明申请

WO2008033339A2 SYSTEM AND METHOD FOR AUTOMATICALLY CLAMPING A TUBE IN AN ORBITAL WELDER 审中-公开
标题翻译：一种用于自动夹紧管件的系统和方法
公开(公告)号：WO2008033339A2
公开(公告)日：2008-03-20
申请号：PCT/US2007/019726
申请日：2007-09-11
申请人： THERMA CORPORATION, INC. , CHILD, Kent, Riley
发明人： CHILD, Kent, Riley
IPC分类号： B23P17/00 , G06F19/00
CPC分类号： B23K9/1274 , B23K37/0533 , B23K2201/06 , Y10T29/4943
摘要： A novel orbital welder includes a body defining a tube passage, a weld tip, a light source disposed to emit light toward the tube passage such that the emitted light will impinge upon one or more tubes placed in the tube passage, a detector to detect the light emitted by the light source from the tube passage, a clamp adjacent the tube passage, and a control unit operative to close the clamp responsive to a signal from the detector. A method is also disclosed for automatically clamping tubes in an orbital welder when they are properly aligned. The method includes the steps of emitting light from the light source into the tube passage, monitoring the light from the tube passage with the detector, receiving a signal indicative of the position of the tube(s) based on the intensity of the detected light, and automatically closing a clamp depending on the signal from the detector.
摘要翻译：一种新型轨道焊机包括限定管通道的主体，焊接尖端，设置成朝向管通道发光的光源，使得发射的光将撞击置于管通道中的一个或多个管，检测器光源从管通道发射的光，靠近管通道的夹具，以及控制单元，用于响应于来自检测器的信号而闭合夹具。还公开了一种在轨道焊接机适当对准时自动夹紧管道的方法。该方法包括以下步骤：将来自光源的光发射到管通道中，用检测器监测来自管通道的光，基于检测到的光的强度接收指示管的位置的信号，并根据来自检测器的信号自动关闭一个夹具。

6. 发明申请

WO2012173845A3 APPARATUS AND METHOD FOR COMBINATORIAL PLASMA DISTRIBUTION THROUGH A MULTI-ZONED SHOWERHEAD 审中-公开
标题翻译：通过多区淋浴器组合等离子体分布的装置和方法
公开(公告)号：WO2012173845A3
公开(公告)日：2013-03-21
申请号：PCT/US2012041151
申请日：2012-06-06
申请人： INTERMOLECULAR INC , ENDO RICHARD , CHILD KENT RILEY
发明人： ENDO RICHARD , CHILD KENT RILEY
IPC分类号： H01L21/205
CPC分类号： C23C16/04 , B01J2219/0043 , B01J2219/00443 , B01J2219/00527 , B01J2219/00585 , B01J2219/00596 , B01J2219/00603 , B01J2219/00659 , C23C16/45519 , C23C16/45565 , C23C16/45574 , C23C16/5096 , C23C16/52 , H01J37/3244 , H01J37/32449
摘要： A multi-zone, combinatorial, single wafer showerhead is used to concurrently develop hardware, materials, unit processes, and unit process sequences. The multi-zone, combinatorial, single wafer showerhead utilizes showerhead pucks to perform process sequences on isolated regions of a single substrate. The showerhead pucks are designed so that they are easily interchangeable to allow the characterization of the interaction between hardware characteristics, process parameters, and their influence on the result of the process sequence.
摘要翻译：多区域，组合单晶片喷头用于同时开发硬件，材料，单元工艺和单元工艺顺序。多区域，组合单晶片喷头利用喷头冰球在单个基板的隔离区域上执行处理序列。喷头冰球设计成使得它们可以容易地互换，以便表征硬件特性，过程参数及其对过程顺序结果的影响之间的相互作用。

7. 发明申请

WO2013012637A1 SPUTTER GUN 审中-公开
标题翻译：飞溅枪
公开(公告)号：WO2013012637A1
公开(公告)日：2013-01-24
申请号：PCT/US2012/046280
申请日：2012-07-11
申请人： INTERMOLECULAR, INC. , YANG, Hong, Sheng , CHILD, Kent, Riley
发明人： YANG, Hong, Sheng , CHILD, Kent, Riley
IPC分类号： C23C14/35 , H01J37/34
CPC分类号： C23C14/3407 , H01J37/3405 , H01J37/3435 , H01J37/3452 , H01J37/3455 , H01J37/3479 , H01J37/3497
摘要： A sputter gun is provided in the embodiments contained herein. The sputter gun includes an impeller disposed within a backside portion of an opening within a housing of the sputter gun, the housing including an inlet directing fluid to rotate the impeller around an axis. A plate is disposed next to the impeller, the plate has openings extending therethrough, the openings enabling the fluid access to a backside portion of the opening within the housing. A plurality of magnets is disposed within the front side of the plate and extending from a surface of the plate such that as the impeller rotates with the plurality of magnets. A thermally conductive membrane extends across a front surface of the front portion of the opening, wherein the fluid contacts the thermally conductive membrane prior to exiting the opening within the housing. A method of performing a deposition process is also included.
摘要翻译：在本文包含的实施例中提供溅射枪。溅射枪包括设置在溅射枪的壳体内的开口的后侧部分内的叶轮，壳体包括引导流体以围绕轴线旋转叶轮的入口。板靠近叶轮设置，板具有穿过其中的开口，所述开口使得流体能够进入壳体内的开口的后侧部分。多个磁体设置在板的前侧内并且从板的表面延伸，使得随着叶轮与多个磁体一起旋转。导热膜延伸穿过开口的前部的前表面，其中流体在离开壳体内的开口之前接触导热膜。还包括执行沉积工艺的方法。

8. 发明申请

WO2008021460A2 CATCH-CUP TO DIVERTER ALIGNMENT LEVELING JIG 审中-公开
标题翻译：抓住杯子对分配器调整水平夹具
公开(公告)号：WO2008021460A2
公开(公告)日：2008-02-21
申请号：PCT/US2007/018195
申请日：2007-08-15
申请人： APPLIED MATERIALS, INC. , CHILD, Kent, Riley , EGAMI, Glen , KO, Alexander, Sou-kang
发明人： CHILD, Kent, Riley , EGAMI, Glen , KO, Alexander, Sou-kang
IPC分类号： C23C16/00
CPC分类号： H01L21/67023
摘要： An apparatus for leveling and centering a catch-cup chamber to a diverter chamber of a semiconductor processing chamber is described, hi one embodiment, the apparatus has a frame with branches. A coupler is mounted to the end of each branch. A measuring device is mounted to each branch. The apparatus is placed in the diverter. The measuring device measures a distance from a branch to a top surface of the catch-cup chamber.
摘要翻译：描述了一种用于使捕获杯室平整并使半导体处理室的分流室对中的设备。在一个实施例中，该设备具有带分支的框架。耦合器安装在每个分支的末端。测量装置安装在每个分支上。该设备被放置在分流器中。测量装置测量从分支到接收杯室顶表面的距离。

9. 发明申请

WO2005110668A1 SYSTEM AND METHOD FOR ALIGNING TUBES IN AN ORBITAL WELDER 审中-公开
标题翻译：用于在一个ORBITAL焊接机中对管进行校准的系统和方法
公开(公告)号：WO2005110668A1
公开(公告)日：2005-11-24
申请号：PCT/US2005/016296
申请日：2005-05-10
申请人： THERMA CORPORATION, INC. , CHILD, Kent, Riley
发明人： CHILD, Kent, Riley
IPC分类号： B23K31/02
CPC分类号： B23K9/1274 , B23K37/0533 , B23K2201/06
摘要： A novel orbital welder includes a body defining a tube passage, a weld tip, a rotor, a light source disposed to emit light toward the tube passage such that the emitted light will impinge upon one or more tubes placed in the tube passage, and a detector to detect the light emitted by the light source from the tube passage. The intensity of the detected light depends on the position of the tube. The detector can either be disposed to detect light reflected by the tube(s) or light transmitted past the tube(s). A method is also disclosed for aligning tubes in an orbital welder including the steps of emitting light from the light source into the tube passage, monitoring the light from the tube passage with the detector, and providing a signal indicative of the position of the tube(s) based on the intensity of the detected light.
摘要翻译：一种新型的轨道焊机包括限定管通道的主体，焊接尖端，转子，设置成朝向管通道发光的光源，使得发射的光将撞击放置在管通道中的一个或多个管，以及检测器，以检测来自管道的光源发射的光。检测到的光的强度取决于管的位置。检测器可以被设置为检测由管反射的光或透过管的光。还公开了一种用于在轨道焊机中对准管的方法，包括以下步骤：将来自光源的光发射到管通道中，用检测器监测来自管通道的光，并提供指示管位置的信号（ s）基于检测到的光的强度。

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