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1. 发明申请

WO2009114193A3 BARE RETICLE STORAGE CHAMBER AND STOCKER 审中-公开
标题翻译： BARE RETICLE STORAGE CHAMBER和STOCKER
公开(公告)号：WO2009114193A3
公开(公告)日：2009-12-30
申请号：PCT/US2009001630
申请日：2009-03-13
申请人： FORTREND ENGINEERING CORP , WU KUNG CHRIS , MORGAN RICHARD , HUANG YUAN-YU , LIU SHIH-CHI , CHANG WEI-SHIANG , KO HUNG-KUN
发明人： WU KUNG CHRIS , MORGAN RICHARD , HUANG YUAN-YU , LIU SHIH-CHI , CHANG WEI-SHIANG , KO HUNG-KUN
IPC分类号： G03F7/20
CPC分类号： H01L21/6732 , H01L21/67173 , H01L21/67742 , H01L21/67769 , H01L21/67775 , H01L21/68707
摘要： A bare reticle storage chamber and stocker (30) includes a reticle input /output -port pod opener (36) for: 1. accessing a reticle (68) carried within a pod; while 2. maintaining a clean environment around the reticle (68). A reticle transfer area (42) that abuts the pod opener (30) and houses a reticle handling robot (44) that includes an end-effector (162) adapted for receiving and retaining at least one reticle (68). A bare reticle storage chamber (52) also abuts the reticle transfer area (42). The reticle storage chamber (52) houses: 1. a reticle cabinet (62) having reticle storage slots (64) that receive reticles (68); and 2. a plenum (102) that provides a flow of gas about and through the reticle cabinet (62). Abutting the reticle transfer area (42), the reticle storage chamber (52) has an openable and closeable robot access door (74) through which the end-effector (162) of the reticle handling robot (44) accesses the reticle storage slot that is then juxtaposed with the robot access door (74).
摘要翻译：裸露的掩模版储存室和储存器（30）包括掩模版输入/输出端口开启器（36），用于：1.访问在吊舱内携带的掩模版（68）同时2.保持掩模版（68）周围的清洁环境。一个与光阑开启器（30）相邻的光罩转移区（42），并容纳一个光罩处理机器人（44），该机器人包括一个适于接收和保持至少一个光罩（68）的末端执行器（162）。裸光罩储存室（52）也邻接光罩转印区域（42）。标线存储室（52）容纳：1.具有接收标线（68）的标线存储槽（64）的标线片柜（62）; 2.气室（102），其提供围绕并穿过所述光罩柜（62）的气流。邻接掩模版转移区域42，掩模版存储腔室52具有可打开和关闭的机器人检修门74，掩模版处理机器人44的末端执行器162通过该机器人检修门口访问掩模版存储槽，然后与机器人检修门（74）并置。

2. 发明申请

WO2009114193A2 BARE RETICLE STORAGE CHAMBER AND STOCKER 审中-公开
标题翻译： BARE RETICLE存储室和储物柜
公开(公告)号：WO2009114193A2
公开(公告)日：2009-09-17
申请号：PCT/US2009/001630
申请日：2009-03-13
申请人： FORTREND ENGINEERING CORPORATION , WU, Kung, Chris , MORGAN, Richard , HUANG, Yuan-Yu , LIU, Shih-Chi , CHANG, Wei-Shiang , KO, Hung-Kun
发明人： WU, Kung, Chris , MORGAN, Richard , HUANG, Yuan-Yu , LIU, Shih-Chi , CHANG, Wei-Shiang , KO, Hung-Kun
IPC分类号： B65B55/20
CPC分类号： H01L21/6732 , H01L21/67173 , H01L21/67742 , H01L21/67769 , H01L21/67775 , H01L21/68707
摘要： A bare reticle storage chamber and stocker (30) includes a reticle input /output -port pod opener (36) for: 1. accessing a reticle (68) carried within a pod; while 2. maintaining a clean environment around the reticle (68). A reticle transfer area (42) that abuts the pod opener (30) and houses a reticle handling robot (44) that includes an end-effector (162) adapted for receiving and retaining at least one reticle (68). A bare reticle storage chamber (52) also abuts the reticle transfer area (42). The reticle storage chamber (52) houses: 1. a reticle cabinet (62) having reticle storage slots (64) that receive reticles (68); and 2. a plenum (102) that provides a flow of gas about and through the reticle cabinet (62). Abutting the reticle transfer area (42), the reticle storage chamber (52) has an openable and closeable robot access door (74) through which the end-effector (162) of the reticle handling robot (44) accesses the reticle storage slot that is then juxtaposed with the robot access door (74).
摘要翻译：裸露的掩模版存储室和储料器（30）包括掩模版输入/输出端口开启器（36），用于：1.访问在荚内承载的掩模版（68）; 同时2.保持围绕光罩（68）的清洁环境。一个贴片开孔器（30）的掩模版传送区域（42）并且容纳一个掩模版处理机器人（44），该掩模版处理机器人（44）包括适于容纳和保持至少一个掩模版（68）的端部执行器（162）。裸露的掩模版存储室（52）也邻接标线转印区域（42）。所述掩模版存储室（52）容纳：1.具有接收标线（68）的光罩存储槽（64）的光罩柜（62）; 以及2.一个气室（102），其提供围绕并通过所述标线箱（62）的气体流。所述掩模版存放室（52）与所述掩模版传送区域（42）相对，具有可开闭的机器人检修门（74），所述掩模版处理机器人（44）的末端执行器（162）通过所述机械手入口门进入所述掩模版存储槽，然后与机器人检修门（74）并置。

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