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    • 6. 发明授权
    • Apparatus for evacuating a process chamber
    • 用于排空处理室的装置
    • US06174376B1
    • 2001-01-16
    • US09323365
    • 1999-06-01
    • Heng-Yi TsengChang-Ray ChenMaw-Sheng JuangKuei-Chang Ho
    • Heng-Yi TsengChang-Ray ChenMaw-Sheng JuangKuei-Chang Ho
    • C23C1600
    • B01J3/006C23C16/4412Y10T137/8696
    • An apparatus and a method for evacuating a process chamber by a dry pump and then shutting down the pump without back steam and high pressure safety problems are disclosed. In the apparatus, a conduit is provided for connecting in fluid communication between a process chamber and a dry pump, two gate valves are provided in the conduit with one mounted adjacent to the process chamber and the other adjacent to the dry pump. A pressure relief valve is provided and mounted to bridge over an inlet and an outlet of the second gate valve such that any pressure build-up in the conduit upstream of the second gate valve can be avoided for preventing injury to a machine operator. The back steam problem can be effectively prevented when the dry pump is shut down simultaneously with the closing of the first and the second gate valves. The pressure relief valve may be pre-set to operate automatically when a differential pressure larger than 0.33 psi is detected. The apparatus is further provided with a manual venting valve installed in the section of the conduit between the two gate valves such that the conduit may be manually vented to the atmosphere when the pressure relief valve malfunctions and fails to automatically vent.
    • 公开了一种用于通过干式泵抽空处理室,然后关闭泵而无背蒸汽和高压安全问题的装置和方法。 在该设备中,设置有用于连接处理室和干式泵之间的流体连通的管道,在管道中设置两个闸阀,一个邻近处理室安装,另一个邻近干式泵。 提供压力释放阀并安装成跨过第二闸阀的入口和出口,以便可以避免在第二闸阀上游的导管中的任何压力积聚,以防止对机器操作者的伤害。 当干泵在关闭第一和第二闸阀的同时关闭时,可以有效地防止背蒸汽问题。 当检测到大于0.33psi的压差时,压力释放阀可以被预先设定为自动运行。 该设备还设置有安装在两个闸阀之间的管道部分中的手动排放阀,使得当压力释放阀故障并且不能自动排气时,导管可手动排放到大气中。