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1. 发明申请

WO2012006019A2 CUSTOMIZABLE DISPENSE SYSTEM WITH SMART CONTROLLER 审中-公开
标题翻译：具有智能控制器的可定制开发系统
公开(公告)号：WO2012006019A2
公开(公告)日：2012-01-12
申请号：PCT/US2011/042018
申请日：2011-06-27
申请人： ENTEGRIS, INC. , CEDRONE, James , GASHGAEE, Iraj , MAGOON, Paul, J. , BRAGGIN, Jennifer, M. , GONNELLA, George, L. , VAIL, Johnathan, Owen
发明人： CEDRONE, James , GASHGAEE, Iraj , MAGOON, Paul, J. , BRAGGIN, Jennifer, M. , GONNELLA, George, L. , VAIL, Johnathan, Owen
IPC分类号： H01L21/205 , H01L21/302
CPC分类号： B65D83/00 , F04B43/06 , F04B49/007 , F04B49/02 , H01L21/67017
摘要： Embodiments disclosed provide a customizable dispense system implementing modular architecture, the customizable dispense system comprising a smart controller configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. The smart controller is configured to, upon switching from communicating with a first pump to a second pump, automatically recognize the second pump and apply a control scheme to control the second pump, which may be a motor pump or a pneumatic pump. The s witching may be due to physical disconnection of the first pump and physical connection of the second pump or it can be entirely done via software. The smart controller may be connected to track and a variety of devices, including smart filters.
摘要翻译：所公开的实施例提供了实现模块化架构的可定制的分配系统，该可定制的分配系统包括智能控制器，该智能控制器被配置为在对印刷图案的缺陷敏感的各种半导体制造过程中操作各种气动泵和电动泵。智能控制器被配置为在从与第一泵通信到第二泵的转换时自动识别第二泵并应用控制方案来控制第二泵，其可以是电动泵或气动泵。这是由于第一个泵的物理断开和第二个泵的物理连接造成的，或者它可以通过软件完全完成。智能控制器可以连接到轨道和各种设备，包括智能过滤器。

2. 发明申请

WO2007067359A3 SYSTEM AND METHOD FOR CORRECTING FOR PRESSURE VARIATIONS USING A MOTOR 审中-公开
标题翻译：使用电机校正压力变化的系统和方法
公开(公告)号：WO2007067359A3
公开(公告)日：2009-04-23
申请号：PCT/US2006045176
申请日：2006-11-20
申请人： ENTEGRIS INC , GONNELLA GEORGE , CEDRONE JAMES , ZAGERS RAYMOND A , MCLOUGHLIN ROBERT F
发明人： GONNELLA GEORGE , CEDRONE JAMES , ZAGERS RAYMOND A , MCLOUGHLIN ROBERT F
IPC分类号： F04B49/06 , F04B49/00
CPC分类号： F04B13/00
摘要： Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber.
摘要翻译：公开了用于补偿可能在泵送装置的各种封闭空间中发生的压力增加的系统和方法。本发明的实施例可以通过移动泵送装置的泵送装置来调节泵室的容积来补偿泵送装置的腔室中的压力增加，以补偿腔室中的压力增加。更具体地，在一个实施例中，为了解决分配室中的流体的不希望的压力增加，分配马达可以反向以返回活塞以补偿分配室中的任何压力增加。

3. 发明申请

WO2008066589A3 SYSTEM AND METHOD FOR OPERATION OF A PUMP 审中-公开
标题翻译：用于泵的操作的系统和方法
公开(公告)号：WO2008066589A3
公开(公告)日：2008-09-04
申请号：PCT/US2007017017
申请日：2007-07-30
申请人： ENTEGRIS INC , GONNELLA GEORGE , CEDRONE JAMES , MAGOON PAUL
发明人： GONNELLA GEORGE , CEDRONE JAMES , MAGOON PAUL
IPC分类号： F04B49/06 , F04B51/00 , G01M99/00
CPC分类号： F04B13/00 , F04B49/02 , F04B49/065
摘要： Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. A value for a goodness of fit measure comparing the operating profile and baseline profile can be established. If the goodness of fit measure is insufficient, an alarm may be sent or another action taken, for example the pumping system may shut down, etc. An example goodness of fit measure is an R-squared measure.
摘要翻译：公开了用于监测泵的操作的系统和方法，包括验证泵的操作或动作。可以建立泵的一个或多个参数的基线分布。然后可以通过在泵的后续操作期间记录相同组参数的一个或多个值来创建操作简档。可以建立比较操作概况和基线概况的拟合优度值。如果配合度测量不足，可能会发出警报或采取其他措施，例如泵送系统可能会关闭等。配合度量的一个示例是R平方测量。

4. 发明申请

WO2006057957A3 SYSTEM AND METHOD FOR A VARIABLE HOME POSITION DISPENSE SYSTEM 审中-公开
标题翻译：用于可变的家庭位置调节系统的系统和方法
公开(公告)号：WO2006057957A3
公开(公告)日：2007-11-15
申请号：PCT/US2005042127
申请日：2005-11-21
申请人： ENTEGRIS INC , LAVERDIERE MARC , CEDRONE JAMES , GONNELLA GEORGE , GASHGAEE IRAJ , MAGOON PAUL , KING TIMOTHY J
发明人： LAVERDIERE MARC , CEDRONE JAMES , GONNELLA GEORGE , GASHGAEE IRAJ , MAGOON PAUL , KING TIMOTHY J
IPC分类号： F04B49/00 , B67D7/30 , F04B49/06
CPC分类号： F04B43/02 , F04B13/00 , F04B49/065 , F04B2201/0201 , F04B2205/09
摘要： Embodiments of the present, invention provide a system and method for reducing the hold-up volume of a pump. More particularly, embodiments of the present invention provide a system and method for determining a home position to reduce hold-up volume at a dispense pump and/or a feed pump. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.
摘要翻译：本发明的实施例提供了一种用于减小泵的保持容积的系统和方法。更具体地，本发明的实施例提供了一种用于确定原始位置以减少分配泵和/或进料泵的滞留体积的系统和方法。可以选择膜片的原始位置，使得在分配泵和/或进料泵处的室的体积包含足够的流体，以在最小化保持体积的同时执行分配循环的各个步骤。另外，可以选择隔膜的原始位置来优化正位移的有效范围。

5. 发明申请

WO2007067344A3 SYSTEM AND METHOD FOR OPERATION OF A PUMP 审中-公开
标题翻译：泵的操作系统和方法
公开(公告)号：WO2007067344A3
公开(公告)日：2009-04-23
申请号：PCT/US2006044985
申请日：2006-11-20
申请人： ENTEGRIS INC , GONNELLA GEORGE , CEDRONE JAMES
发明人： GONNELLA GEORGE , CEDRONE JAMES
IPC分类号： F04B41/06 , F04B49/06
CPC分类号： F04B13/00 , F04B1/08 , F04B23/04 , F04B23/06 , F04B41/06 , F04B43/088 , F04B49/06 , F04B49/065 , F04B49/08 , F04B49/103 , F04B51/00 , F04B2203/0209 , F04B2205/01 , F04B2205/03 , F04B2205/04
摘要： Systems and methods for operating a pump are disclosed. Pressure readings in a pump can be compared to a set point or profile to adjust motor speed to control pressure during various stages of operation. According to other embodiments, a baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points.
摘要翻译：公开了一种用于操作泵的系统和方法。可以将泵中的压力读数与设定点或轮廓进行比较，以调整电机速度，以在各种操作阶段控制压力。根据其他实施例，可以建立泵的一个或多个参数的基线曲线。然后可以通过在泵的后续操作期间记录用于相同参数集合的一个或多个值来创建操作简档。然后可以在一个或多个点或一组点处比较基线轮廓和操作轮廓的值。

6. 发明申请

WO2008066589A2 SYSTEM AND METHOD FOR OPERATION OF A PUMP 审中-公开
标题翻译：泵的操作系统和方法
公开(公告)号：WO2008066589A2
公开(公告)日：2008-06-05
申请号：PCT/US2007/017017
申请日：2007-07-30
申请人： ENTEGRIS, INC. , GONNELLA, George , CEDRONE, James , MAGOON, Paul
发明人： GONNELLA, George , CEDRONE, James , MAGOON, Paul
IPC分类号： F04B49/00
CPC分类号： F04B13/00 , F04B49/02 , F04B49/065
摘要： Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. A value for a goodness of fit measure comparing the operating profile and baseline profile can be established. If the goodness of fit measure is insufficient, an alarm may be sent or another action taken, for example the pumping system may shut down, etc. An example goodness of fit measure is an R-squared measure.
摘要翻译：公开了用于监视泵的操作的系统和方法，包括验证泵的操作或动作。可以建立泵的一个或多个参数的基线曲线。然后可以通过在泵的后续操作期间记录用于相同参数集合的一个或多个值来创建操作简档。可以确定比较操作简档和基线曲线的适合度测量值。如果适合度测量不够，则可能发出报警或采取其他措施，例如泵送系统可能会关闭等。适合度测量的一个优点是R平方度量。

7. 发明申请

WO2007067358A2 SYSTEM AND METHOD FOR PRESSURE COMPENSATION IN A PUMP 审中-公开
标题翻译：用于泵中的压力补偿的系统和方法
公开(公告)号：WO2007067358A2
公开(公告)日：2007-06-14
申请号：PCT/US2006/045175
申请日：2006-11-20
申请人： ENTEGRIS, INC. , GONNELLA, George , CEDRONE, James
发明人： GONNELLA, George , CEDRONE, James
IPC分类号： B67D5/30
CPC分类号： F04B49/08 , F04B13/00 , F04B49/065 , F04B51/00 , F04B2205/03
摘要： Systems and methods for maintaining substantially a baseline pressure in a chamber of a pumping apparatus are disclosed. Embodiments of the present invention may serve to control a motor to compensate or account for a pressure drift which may occur in a chamber of the pumping apparatus. More specifically, a dispense motor may be controlled to substantially maintain a baseline pressure in the dispense chamber before a dispense based on a pressure sensed in the dispense chamber. In one embodiment, before a dispense is initiated a control loop may be utilized such that it is repeatedly determined if the pressure in the dispense chamber is above a desired pressure and, if so, the movement of the pumping means regulated to maintain substantially the desired pressure in the dispense chamber until a dispense of fluid is initiated.
摘要翻译：公开了用于基本维持泵送设备的腔室中的基线压力的系统和方法。本发明的实施例可用于控制电机以补偿或解决泵送设备的腔室中可能发生的压力漂移。更具体地，分配电机可以被控制以基于在分配室中感测到的压力在分配之前基本保持分配室中的基线压力。在一个实施例中，在分配开始之前，可以利用控制回路，使得重复确定分配室中的压力是否高于期望的压力，并且如果是，调节泵送装置的移动以基本上保持期望的分配室中的压力直到开始分配流体。

8. 发明申请

WO2007067342A2 SYSTEM AND METHOD FOR VALVE SEQUENCING IN A PUMP 审中-公开
标题翻译：用于阀中的阀门排序的系统和方法
公开(公告)号：WO2007067342A2
公开(公告)日：2007-06-14
申请号：PCT/US2006044980
申请日：2006-11-20
申请人： ENTEGRIS INC , GONNELLA GEORGE , CEDRONE JAMES , GASHGAEE IRAJ , MAGOON PAUL
发明人： GONNELLA GEORGE , CEDRONE JAMES , GASHGAEE IRAJ , MAGOON PAUL
IPC分类号： B67B7/00
CPC分类号： F04B13/00 , F04B7/0076 , Y10T137/87885
摘要： Systems and methods for minimizing pressure fluctuations within a pumping apparatus are disclosed. Embodiments of the present invention may serve to reduce pressure variations within a fluid path of a pumping apparatus by avoiding closing a valve to create a closed or entrapped space in the fluid path and similarly, avoiding opening a valve between two entrapped spaces. More specifically, embodiments of the present invention may serve to operate a system of valves of the pumping apparatus according to a valve sequence configured to substantially minimize the time the fluid flow path through the pumping apparatus is closed (e.g. to an area external to the pumping apparatus).
摘要翻译：公开了用于最小化泵送装置内的压力波动的系统和方法。本发明的实施例可用于通过避免关闭阀以在流体路径中产生封闭或截留空间并且类似地避免在两个截留空间之间打开阀来减少泵送装置的流体路径内的压力变化。更具体地说，本发明的实施例可以用于根据阀门序列来操作泵送设备的阀门系统，该阀门序列被配置为基本上最小化通过泵送设备的流体流动路径关闭的时间（例如泵送到泵送外部的区域仪器）。

9. 发明申请

WO2007061957A2 SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP 审中-公开
标题翻译：泵的机械活塞位置控制的系统和方法
公开(公告)号：WO2007061957A2
公开(公告)日：2007-05-31
申请号：PCT/US2006/044907
申请日：2006-11-20
申请人： ENTEGRIS, INC. , GONNELLA, George , CEDRONE, James , GASHGAEE, Iraj
发明人： GONNELLA, George , CEDRONE, James , GASHGAEE, Iraj
IPC分类号： F04B49/06
CPC分类号： F04B49/065 , F04B13/00 , F04B17/03 , F04B43/0081 , F04B43/02 , F04B2201/0201 , F04B2201/1208
摘要： Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a singie-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
摘要翻译：本文公开的系统和方法的实施例利用无刷直流电动机（BLDCM）来驱动泵送系统中的单级或多级泵，以便实时，平稳地运动，以及对流体运动进行非常精确和可重复的位置控制，分配量，用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。本发明的实施例可以通过根据底层功能的关键性，通过自定义控制方案增加和减少BLDCM的工作频率，而不会不期望地损害分配泵的精确位置控制而不发生损害。该控制方案可以以非常低的速度运行BLDCM，同时保持恒定的速度，这使得泵送系统能够以较小的变化，大幅度增加的分配性能和操作能力在宽范围的速度下运行。

10. 发明申请

WO2007061957A3 SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP 审中-公开
公开(公告)号：WO2007061957A3
公开(公告)日：2007-10-04
申请号：PCT/US2006044907
申请日：2006-11-20
申请人： ENTEGRIS INC , GONNELLA GEORGE , CEDRONE JAMES , GASHGAEE IRAJ
发明人： GONNELLA GEORGE , CEDRONE JAMES , GASHGAEE IRAJ
IPC分类号： F04B49/06
CPC分类号： F04B49/065 , F04B13/00 , F04B17/03 , F04B43/0081 , F04B43/02 , F04B2201/0201 , F04B2201/1208
摘要： Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a singie-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.

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