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1. 发明授权

US09222867B2 Resonant micromachined biochemical sensor 有权
标题翻译：共振微加工生化传感器
公开(公告)号：US09222867B2
公开(公告)日：2015-12-29
申请号：US13476989
申请日：2012-05-21
申请人： Brian L. Norling , John C. G. Dunfield
发明人： Brian L. Norling , John C. G. Dunfield
IPC分类号： G01R33/00 , G01R33/34 , G01N5/02 , G01R33/028 , G01N1/40 , G01R33/12 , G01N1/22
CPC分类号： G01N5/02 , G01N1/405 , G01N2001/2223 , G01R33/0286 , G01R33/1261
摘要： A sensor system is formed from a micro machined resonant structure with multiple resonant elements, a tracking resonator control electronics, and signal processing algorithms. The moving elements of the resonator are coated with chemically active materials that change mass when exposed to the target chemical resulting in a change in frequency or period of oscillation. The changes in frequency or period are processed by multi-sensor chemical detection algorithms to identify chemical types and concentrations. In essence, the resonator and drive electronics form a closed loop oscillator operating at the resonator's natural frequency. The resonators are formed from silicon using photolithographic processes. The resonator design includes in-plane resonant motion combined with dynamic balance to operate with a high Q even in the presence of atmospheric pressure.
摘要翻译：传感器系统由具有多个谐振元件的微加工谐振结构，跟踪谐振器控制电子器件和信号处理算法形成。谐振器的移动元件涂覆有化学活性材料，其在暴露于目标化学物质时改变质量，导致振荡频率或振荡周期的变化。频率或周期的变化由多传感器化学检测算法处理，以识别化学类型和浓度。实质上，谐振器和驱动电子器件形成以谐振器的固有频率工作的闭环振荡器。谐振器由使用光刻工艺的硅形成。谐振器设计包括平面内谐振运动与动平衡结合，即使在大气压力存在的情况下也能以高Q运行。

2. 发明授权

US5377545A Servo accelerometer with tunnel current sensor and complementary electrostatic drive 失效
标题翻译：带隧道电流传感器和互补静电驱动的伺服加速度计
公开(公告)号：US5377545A
公开(公告)日：1995-01-03
申请号：US986958
申请日：1992-12-08
申请人： Brian L. Norling , James R. Woodruff
发明人： Brian L. Norling , James R. Woodruff
IPC分类号： G01P15/08 , G01P15/13
CPC分类号： G01P15/131 , G01P15/0894
摘要： A servo accelerometer uses a tunnel current sensor having a first sensing electrode coupled in fixed alignment with a frame and a second sensing electrode coupled to a proof mass. A position sensing circuit develops a sensing signal indicative of displacement of the proof mass. A feedback circuit provides an output signal and provides a feedback signal to electrostatic drive electrodes for applying an electrostatic repositioning force to the proof mass. The proof mass and frame are connected by a highly compliant suspension structure.
摘要翻译：伺服加速度计使用隧道电流传感器，该隧道电流传感器具有与框架固定对准的第一感测电极和耦合到检测质量块的第二感测电极。位置检测电路产生指示检验质量块位移的感测信号。反馈电路提供输出信号，并向静电驱动电极提供反馈信号，以将静电重新定位力施加到检测质量块。检测质量和框架通过高度兼容的悬挂结构连接。

3. 再颁专利

USRE34631E Stress compensated transducer 失效
标题翻译：应力补偿传感器
公开(公告)号：USRE34631E
公开(公告)日：1994-06-07
申请号：US898963
申请日：1992-06-12
申请人： Brian L. Norling
发明人： Brian L. Norling
IPC分类号： G01P15/125 , G01P1/00 , G01P15/13
CPC分类号： G01P1/006 , G01P15/132 , G01P2015/0828
摘要： A transducer having compensation for a deflection due to an applied stress. The transducer includes a support ring (32) having a proof mass (34) cantilevered on a pair of flexures (38) between the magnets (26,28) of a stator in which the transducer is mounted. Deflection of the support ring due to an imbalanced applied force is compensated by either moving the pads (30) used to mount the support ring, moving the centroid of capacitance (42) of the proof mass, or by modifying the support ring to provide a pair of moment arms (152), each approach insuring that an axis of deflection (102,130) of the support ring is coaligned with the centroid of capacitance, thereby minimizing a bias error in the transducer output.
摘要翻译：具有由于施加的应力引起的偏转补偿的换能器。换能器包括支撑环（32），该支撑环具有悬挂在定子的磁体（26,28）之间的一对挠曲件（38）上的检测质量块（34），其中安装有换能器。通过移动用于安装支撑环的垫（30），移动检体的电容（42）的质心，或通过修改支撑环来提供由于不平衡施加力而引起的支撑环的偏转，一对力臂（152），每个方法确保支撑环的偏转轴线（102,130）与电容的重心相结合，从而最小化换能器输出中的偏置误差。

4. 发明授权

US5005413A Accelerometer with coplanar push-pull force transducers 失效
标题翻译：具有共面推挽力传感器的加速度计
公开(公告)号：US5005413A
公开(公告)日：1991-04-09
申请号：US316399
申请日：1989-02-27
申请人： Mitchell J. Novack , Brian L. Norling , James R. Woodruff
发明人： Mitchell J. Novack , Brian L. Norling , James R. Woodruff
IPC分类号： G01P15/097 , G01P15/10 , G01P15/12
CPC分类号： G01P15/097 , G01P2015/0828
摘要： A push-pull accelerometer in which both force transducers lie in a common plane. Thus, when implemented in silicon micromachined device, both transducers can be fabricated from a single crystal layer, thereby producing transducers with closely matched common mode responses.
摘要翻译：推力加速度计，其中两个力传感器位于公共平面中。因此，当在硅微加工器件中实现时，两个换能器可以由单晶层制造，从而产生具有紧密匹配的共模响应的换能器。

5. 发明授权

US4901586A Electrostatically driven dual vibrating beam force transducer 失效
标题翻译：静电驱动双振动梁力传感器
公开(公告)号：US4901586A
公开(公告)日：1990-02-20
申请号：US316899
申请日：1989-02-27
申请人： Graeme A. Blake , Brian L. Norling
发明人： Graeme A. Blake , Brian L. Norling
IPC分类号： G01L1/10 , G01L1/18 , G01P15/097 , G01P15/10
CPC分类号： G01P15/097 , G01L1/10 , G01L1/183 , Y10S73/01
摘要： A dual vibrating beam force transducer having an electrostatic drive system. The transducer comprises a body having first and second generally parallel beams, coupled together at their ends. First and second electrodes are positioned adjacent to but not in contact with the respective beams. A drive circuit causes an oscillating voltage to be applied to the electrodes. The beams are thus subjected to electrostatic forces that cause the beams to oscillate in a vibration plane containing both beams. The mechanical resonance of the beams controls the oscillation frequency, such that the frequency is a function of a force exerted along the beams. An embodiment is also described in which the drive means is coupled directly to one of the beams.
摘要翻译：具有静电驱动系统的双振动束力传感器。换能器包括具有第一和第二大致平行的梁的主体，它们的端部联接在一起。第一和第二电极定位成与各个光束相邻而不与其接触。驱动电路使振荡电压施加到电极。因此，光束受到静电力的作用，使得光束在包含两个光束的振动平面中振荡。光束的机械谐振控制振荡频率，使得频率是沿着光束施加的力的函数。还描述了一种实施例，其中驱动装置直接连接到一个梁。

6. 发明授权

US4872342A Translational accelerometer and accelerometer assembly method 失效
标题翻译：平移加速度计和加速度计组装方法
公开(公告)号：US4872342A
公开(公告)日：1989-10-10
申请号：US222680
申请日：1988-07-21
申请人： Richard A. Hanson , Rex B. Peters , Brian L. Norling , Edward A. Urbach
发明人： Richard A. Hanson , Rex B. Peters , Brian L. Norling , Edward A. Urbach
IPC分类号： G01P15/08 , G01P15/097 , G01P15/10
CPC分类号： G01P15/097 , G01P15/0888 , G01P2015/0828 , Y10T29/49007
摘要： An accelerometer comprising a body (10, 16, 12), a proof mass (18, 30, 32), a mounting strucutre comprising flexures (20, 22) for mounting the proof mass to the body, and force sensing elements (34, 38). The flexures permit translational motion of the proof mass with respect to the body along a sensitive axis SA and rotation of the proof mass with respect to the body about a hinge axis HA that is perpendicular to the sensitive axis. Acceleration of the accelerometer along the sensitive axis results in translational motion of the proof mass along the sensitive axis. The force sensing elements reacts to such translational motion by producing a signal indicative of acceleration along the sensitive axis. In a preferred embodiment, the mounting structure comprises a pair of fused quartz flexures that are oppositely directed with respect to one another, and the force sensing elements comprise a pair of vibrating beam force transducers that are connected to the proof mass on opposite sides of the hinge axis from one another. The described assembly method for accelerometers comprises forming bridges between the proof mass and body, the bridges being removed after attachment of the force sensing elements.
摘要翻译： 1.一种加速度计，包括主体（10,16,12），检验质量块（18,30,32），安装结构，其包括用于将所述证明物质安装到所述主体的挠曲件（20,22），以及力传感元件（34， 38）。挠曲件允许检测质量体沿着敏感轴线SA相对于身体的平移运动，并且证明物质相对于身体围绕垂直于敏感轴线的铰链轴线HA旋转。加速度传感器沿着敏感轴的加速导致检测质量沿着敏感轴的平移运动。力感测元件通过产生指示沿着敏感轴的加速度的信号来对这种平移运动做出反应。在优选实施例中，安装结构包括相对于彼此相对地指向的一对熔融石英弯曲部，并且力感测元件包括一对振动梁力传感器，其连接到在铰链轴彼此。所描述的用于加速度计的装配方法包括在检验质量块和本体之间形成桥，桥接件在附接力感测元件之后被移除。

7. 发明授权

US5367217A Four bar resonating force transducer 失效
标题翻译：四杆谐振力传感器
公开(公告)号：US5367217A
公开(公告)日：1994-11-22
申请号：US978264
申请日：1992-11-18
申请人： Brian L. Norling
发明人： Brian L. Norling
IPC分类号： G01L9/00 , H03H9/215 , H01L41/08
CPC分类号： G01L9/0019 , G01L9/0022 , H03H9/215
摘要： A force sensing element is formed with four vibrating beams having substantially the same width and length. The four beams are spaced apart and disposed parallel to one another and are connected at opposite ends by end portions. With such a configuration, the outer beams move in phase with each other but 180.degree. out of phase with the inner beams. As such, the linear and angular reaction forces at the end portions are effectively cancelled. One advantage of such a configuration is its relative insensitivity to manufacturing process variations. By utilizing four beams which are nearly identical in width, variation in fabrication tolerance has virtually an equal effect on beam mass such that the dynamic balance of the force sensing element is maintained to a high degree of accuracy. Various drive methodologies for the force sensing element are disclosed as well as force sensing elements with integrally-formed isolator systems.
摘要翻译：力感测元件由具有基本上相同的宽度和长度的四个振动梁形成。四个梁彼此间隔开并且彼此平行地设置，并且在相对端通过端部连接。通过这样的结构，外侧梁与内侧梁同相移动180°，与相位不同。因此，端部处的线性和角度反作用力被有效地消除。这种配置的一个优点是其对制造工艺变化的相对不敏感。通过利用宽度几乎相同的四个光束，制造公差的变化对光束质量实际上具有相同的影响，使得力感测元件的动态平衡保持在高精度。公开了用于力感测元件的各种驱动方法以及具有整体形成的隔离器系统的力感测元件。

8. 发明授权

US5212984A Mounting system for an accelerometer 失效
标题翻译：用于加速度计的安装系统
公开(公告)号：US5212984A
公开(公告)日：1993-05-25
申请号：US930473
申请日：1992-08-13
申请人： Brian L. Norling , Jeffrey F. Tonn
发明人： Brian L. Norling , Jeffrey F. Tonn
IPC分类号： G01D11/30 , G01P1/02
CPC分类号： G01D11/30 , G01P1/023
摘要： The mounting system of the present invention is adapted to support a precision transducer (14) in spaced alignment with a supporting case (12). The mounting system comprises a plurality of mounting elements (30), each mounting element having one end (34), an opposite end (32) and a resilient intermediate portion (36). One end is adapted to be connected to the transducer, and the opposite end is adapted to be connected to the case. Adjacent mounting elements are joined to one another by bridge sections (38) to form a continuous mounting ring (16) and to define a plurality of gaps (56). At least the end connected to the transducer and bridge sections is composed of a substance that has a coefficient of thermal expansion approximately equal to the coefficient of thermal expansion of the transducer. Each intermediate portion is configured to provide a low resistance to relative movement between the transducer and case in a radial direction, and a high resistance to relative movement in other directions.
摘要翻译：本发明的安装系统适于支撑与支撑壳体（12）间隔对准的精密换能器（14）。安装系统包括多个安装元件（30），每个安装元件具有一端（34），相对端（32）和弹性中间部分（36）。一端适于连接到换能器，并且相对端适于连接到壳体。相邻的安装元件通过桥接部分（38）彼此连接以形成连续的安装环（16）并且限定多个间隙（56）。至少连接到换能器和桥接部分的端部由具有大约等于换能器的热膨胀系数的热膨胀系数的物质组成。每个中间部分构造成对径向方向上的换能器和壳体之间的相对运动提供低阻力，并且对其它方向的相对运动具有高阻力。

9. 发明授权

US5165279A Monolithic accelerometer with flexurally mounted force transducer 失效
标题翻译：具有弯曲安装力传感器的单片加速度计
公开(公告)号：US5165279A
公开(公告)日：1992-11-24
申请号：US544221
申请日：1989-07-06
申请人： Brian L. Norling , Rex B. Peters
发明人： Brian L. Norling , Rex B. Peters
IPC分类号： G01P1/00 , G01P15/08 , G01P15/097 , G01P15/10
CPC分类号： G01P15/097 , G01P1/003 , G01P15/0802 , G01P2015/0828 , Y10S73/01
摘要： An accelerometer comprising a monolithic crystalline substrate, the substrate comprising a support, a proof mass, and a force transducer. The proof mass is connected to the support by one or more proof mass flexures that permit the proof mass to rotate with respect to the support about a hinge axis. One end of the force transducer is connected to the support, and the other end is connected to the proof mass by a transducer flexure. The transducer flexure has a thickness substantially less than the thickness of the transducer, such that when the proof mass rotates, the transducer rotates with respect to the proof mass about a transducer axis that passes through the transducer flexure. Preferably, the transducer axis is offset from the hinge axis in a manner so as to cancel nonlinearities in the force transducer, and the length of the proof mass along the pendulous axis is less than half the length of the transducer. Damping plates are positioned above and below the proof mass, and provide shock stops and damping.
摘要翻译：一种包括单片晶体衬底的加速度计，所述衬底包括支撑体，校验块和力传感器。证明物质通过一个或多个证明物质弯曲物连接到支撑体，其允许证明物质相对于支撑件围绕铰链轴线旋转。力传感器的一端连接到支撑件，另一端通过传感器弯曲连接到检验质量块。换能器挠曲具有基本上小于换能器厚度的厚度，使得当证明质量块旋转时，换能器围绕围绕换能器弯曲的换能器轴线相对于检验质量块旋转。优选地，换能器轴线以一种方式偏离铰链轴线，以抵消力换能器中的非线性，并且沿着下摆轴线的校验质量块的长度小于换能器长度的一半。阻尼板位于检测质量块的上方和下方，并提供冲击停止和阻尼。

10. 发明授权

US5024089A Stress compensated transducer 失效
标题翻译：应力补偿传感器
公开(公告)号：US5024089A
公开(公告)日：1991-06-18
申请号：US521836
申请日：1990-05-08
申请人： Brian L. Norling
发明人： Brian L. Norling
IPC分类号： G01P1/00 , G01P15/13
CPC分类号： G01P1/006 , G01P15/132
摘要： A transducer having compensation for a deflection due to an applied stress. The transducer a support ring (32) having a proof mass (34) cantilevered on a pair of flexures (38) between the magnets (26, 28) of a stator in which the transducer is mounted. Deflection of the support ring due to an imbalanced applied force is compensated by either moving the pads (30) used to mount the support ring, moving the centroid of capacitance (128) of the proof mass, or by modifying the support ring to provide a pair of moment arms (156), each approach insuring that an axis of deflection (102, 130) of the support ring is coaligned with the centroid of capacitance, thereby minimizing a bias error in the transducer output.
摘要翻译：具有由于施加的应力引起的偏转补偿的换能器。所述换能器具有支撑环（32），所述支撑环（32）具有悬臂安装在所述换能器的定子的所述磁体（26,28）之间的一对挠曲件（38）上的检测质量块（34）。通过移动用于安装支撑环的垫（30），移动证明块的电容（128）的质心，或通过修改支撑环来提供支撑环来补偿由于不平衡施加的力而导致的支撑环的偏转，一对力臂（156），每个方法确保支撑环的偏转轴（102,130）与电容的重心共同对准，从而最小化换能器输出中的偏置误差。

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