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    • 3. 发明授权
    • High efficiency, enhanced detecting in-lens light guide scintillator detector for SEM
    • 高效率,增强检测用于扫描电子显微镜的透镜式导光闪烁体检测器
    • US06545277B1
    • 2003-04-08
    • US09638505
    • 2000-08-15
    • Dror KellaBetsalel Rechav
    • Dror KellaBetsalel Rechav
    • H01J37244
    • H01J37/244H01J2237/2443
    • A high efficiency enhanced detecting light guide scintillator detector for charged particle beam apparatus, wherein primary beam passes through the light guide scintillator detector. Light guide scintillator detector is formed as a fork-like part having an open area covering effectively the same area in which the shadow of the primary beam shielding causes low efficiency detection of impinging charged particles. There is further provided a conductive grid or mesh-sheet fitted in the open area between the prongs of the fork-like part biased at various electric potentials inducing one out of many desired possible interactions with detected charged particles such as e.g. deflection and generation of SE's.
    • 一种用于带电粒子束装置的高效率增强检测光导闪烁体检测器,其中主光束通过光导闪烁体检测器。 导光闪烁体检测器形成为具有敞开区域的叉形部分,该开口区域有效地覆盖相同的区域,其中主光束屏蔽的阴影导致撞击带电粒子的低效率检测。 还提供了一种导电栅格或网状片,该导电栅格或网状片被安装在叉形部分的叉状部分之间的开口区域中,该叉状部分被偏置在各种电位处,从而诱导与检测到的带电粒子之类的许多期望的可能相互作用。 SE的偏转和产生。