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1. 发明授权

US07630135B2 Two-dimensional blazed MEMS granting 有权
标题翻译：二维闪耀的MEMS授权
公开(公告)号：US07630135B2
公开(公告)日：2009-12-08
申请号：US11224336
申请日：2005-09-12
申请人： Benjamin L. Lee , Claude E. Tew , Walter M. Duncan
发明人： Benjamin L. Lee , Claude E. Tew , Walter M. Duncan
IPC分类号： G02B5/18 , H04J14/02
CPC分类号： G02B5/1828 , G02B26/0841
摘要： A method for assuring a blazed condition in a DMD device used in telecommunications applications. By meeting certain conditions in the fabrication and operation of the DMD, the device can achieve a blazed condition and be very effective in switching near monochromatic spatially coherent light, thereby opening up a whole new application field for such devices. This method determines the optimal pixel pitch and mirror tilt angle for a given incident angle and wavelength of near monochromatic spatially coherent light to assure blazed operating conditions. The Fraunhofer envelope is determined by convolving the Fourier transforms of the mirror aperture and the delta function at the center of each mirror and then aligning the center of this envelope with a diffraction order to provide a blazed condition. The method of the present invention presents a formula for precisely determining the mirror pitch and tilt angle to assure that a blazed condition exists for a given incident angle and wavelength of near monochromatic spatially coherent light. Considerations for the special case, know as Littrow conditions, where the incident and the reflected light transverse the same path, are also given. This case is particularly attractive for fiber optic/telecommunication applications since the same optics can be used for incoming and outgoing (reflected) light.
摘要翻译：一种用于确保在电信应用中使用的DMD设备中的闪耀状态的方法。通过满足DMD的制造和操作的某些条件，该装置可以实现闪耀状态，并且在切换近似单色空间相干光时非常有效，从而为这种装置开辟了全新的应用领域。该方法确定给定入射角和接近单色空间相干光的波长的最佳像素间距和镜面倾斜角，以确保闪耀的操作条件。 Fraunhofer包络是通过将镜面孔径的傅里叶变换和Δ函数卷积在每个反射镜的中心，然后将该信封的中心与衍射级对齐以提供闪耀状态来确定的。本发明的方法提出了用于精确地确定镜间距和倾斜角的公式，以确保对于给定的入射角和接近单色空间相干光的波长存在闪耀状态。特殊情况的注意事项，也被称为Littrow条件，事件和反射光横向相同的路径。这种情况对于光纤/电信应用是特别有吸引力的，因为相同的光学器件可以用于输入和输出（反射）的光。

2. 发明授权

US06943950B2 Two-dimensional blazed MEMS grating 有权
标题翻译：二维闪耀的MEMS光栅
公开(公告)号：US06943950B2
公开(公告)日：2005-09-13
申请号：US09923911
申请日：2001-08-07
申请人： Benjamin L. Lee , Claude E. Tew , Walter M. Duncan
发明人： Benjamin L. Lee , Claude E. Tew , Walter M. Duncan
IPC分类号： G02B5/18 , G02B26/08
CPC分类号： G02B5/1828 , G02B26/0841
摘要： A method for assuring a blazed condition in a DMD device used in telecommunications applications. By meeting certain conditions in the fabrication and operation of the DMD, the device can achieve a blazed condition and be very effective in switching near monochromatic spatially coherent light, thereby opening up a whole new application field for such devices. This method determines the optimal pixel pitch and mirror tilt angle for a given incident angle and wavelength of near monochromatic spatially coherent light to assure blazed operating conditions. The Fraunhofer envelope is determined by convolving the Fourier transforms of the mirror aperture and the delta function at the center of each mirror and then aligning the center of this envelope with a diffraction order to provide a blazed condition. The method of the present invention presents a formula for precisely determining the mirror pitch and tilt angle to assure that a blazed condition exists for a given incident angle and wavelength of near monochromatic spatially coherent light. Considerations for the special case, know as Littrow conditions, where the incident and the reflected light transverse the same path, are also given. This case is particularly attractive for fiber optic/telecommunication applications since the same optics can be used for incoming and outgoing (reflected) light.
摘要翻译：一种用于确保在电信应用中使用的DMD设备中的闪耀状态的方法。通过满足DMD的制造和操作的某些条件，该装置可以实现闪耀状态，并且在切换近似单色空间相干光时非常有效，从而为这种装置开辟了全新的应用领域。该方法确定给定入射角和接近单色空间相干光的波长的最佳像素间距和镜面倾斜角，以确保闪耀的操作条件。 Fraunhofer包络是通过将镜面孔径的傅里叶变换和Δ函数卷积在每个反射镜的中心，然后将该信封的中心与衍射级对齐以提供闪耀状态来确定的。本发明的方法提出了用于精确地确定镜间距和倾斜角的公式，以确保对于给定的入射角和接近单色空间相干光的波长存在闪耀状态。特殊情况的注意事项，也被称为Littrow条件，事件和反射光横向相同的路径。这种情况对于光纤/电信应用是特别有吸引力的，因为相同的光学器件可以用于输入和输出（反射）的光。

3. 发明授权

US06831750B2 Method and apparatus for using spatial patterns for measuring mirror tilt angles in digital mirror devices 有权
标题翻译：用于在数字镜装置中测量镜面倾斜角的空间图案的方法和装置
公开(公告)号：US06831750B2
公开(公告)日：2004-12-14
申请号：US10160377
申请日：2002-05-31
申请人： David J. Mehrl , Kun Pan , Benjamin L. Lee
发明人： David J. Mehrl , Kun Pan , Benjamin L. Lee
IPC分类号： G01B1114
CPC分类号： G01B11/26
摘要： A method and system for indirectly measuring the tilt angle of micromirrors in a micromirror array. The method and system aims a coherent light beam through an aperture in a screen so that it reflects off of the surface of the micromirror array and creates a pattern of reflected light on the screen. The micromirror array is loaded with a pattern that has a uniform power spectral density (such as a random, aperiodic pattern or a frequency chirped sinusoidal spatial pattern) whereby certain micromirrors will be placed in the “on” position and the other micromirrors will be placed in the “off” position. By loading the micromirror array with a pattern having a uniform power spectral density distribution, the discrete nature of the resulting diffraction pattern is reduced and a pair of [sin(x)/x]2 patterns will be generated on the screen. These [sin(x)/x]2 patterns can be used to measure a variety of characteristics of the micromirrors, such as tilt angle, “roll”, and deformation of the mirrors as they are tilted.
摘要翻译：一种用于间接测量微镜阵列中微镜的倾斜角的方法和系统。该方法和系统旨在使相干光束通过屏幕中的孔径，使得其反射离开微镜阵列的表面，并在屏幕上产生反射光的图案。微镜阵列装载有具有均匀功率谱密度（例如随机，非周期性模式或频率啁啾正弦空间模式）的图案，由此某些微镜将被放置在“开”位置，而其他微镜将被放置在“关”位置。通过加载具有均匀功率谱密度分布的图案的微镜阵列，所得到的衍射图案的离散特性减小，并且在屏幕上将产生一对[sin（x）/ x] 2'图案。这些[sin（x）/ x] 2模式可用于测量微镜的各种特性，例如倾斜角度，“倾斜”以及反射镜倾斜时的变形。

4. 发明授权

US07171068B2 Method to improve an extinction ratio of an optical device 有权
标题翻译：提高光学元件消光比的方法
公开(公告)号：US07171068B2
公开(公告)日：2007-01-30
申请号：US10326231
申请日：2002-12-20
申请人： Terry Bartlett , Benjamin L. Lee , Bryce D. Sawyers
发明人： Terry Bartlett , Benjamin L. Lee , Bryce D. Sawyers
IPC分类号： G02B6/26 , G02B26/00
CPC分类号： G02B6/2931 , G02B6/29313 , G02B6/32 , G02B6/3516 , G02B6/356 , G02B26/02
摘要： A method to improve an extinction ratio of an optical device, the method includes positioning at least a majority of a plurality of micro-mirrors in an off-state position. A mirror assembly includes the plurality of micro-mirrors. The method also includes selectively positioning at least one of the plurality of micro-mirrors in an on-state position. In one particular embodiment, the at least one of the plurality of micro-mirrors positioned in the on-state position operates to improve an extinction ratio of an optical device.
摘要翻译：一种提高光学装置的消光比的方法，所述方法包括将多个微反射镜的至少大部分定位在关闭状态。镜组件包括多个微镜。该方法还包括将多个微反射镜中的至少一个选择性地定位在导通状态位置。在一个特定实施例中，位于导通状态位置的多个微反射镜中的至少一个操作以改善光学器件的消光比。

5. 发明授权

US06958841B2 Generation of digital patterns for spatial light modulation 有权
标题翻译：生成用于空间光调制的数字图案
公开(公告)号：US06958841B2
公开(公告)日：2005-10-25
申请号：US10154257
申请日：2002-05-23
申请人： Paul L. Rancuret , Terry A. Barlett , Benjamin L. Lee , Elisabeth Marley Koontz
发明人： Paul L. Rancuret , Terry A. Barlett , Benjamin L. Lee , Elisabeth Marley Koontz
IPC分类号： H04N5/74 , G02B26/00 , G02F1/01
CPC分类号： H04N5/7458
摘要： Disclosed is a method for generating patterns to be used in a spatial light modulator having a plurality of pixels. The method includes generating an optical pattern to be placed upon the pixels of the spatial light modulator, applying the optical pattern to the pixels of the spatial light modulator, measuring the optical performance of the plurality of pixels having the optical pattern applied to it, comparing the measured optical performance to a target optical performance, and adjusting the optical pattern applied to the plurality of pixels to form another optical pattern that more closely achieves the target optical performance.
摘要翻译：公开了一种用于产生要在具有多个像素的空间光调制器中使用的图案的方法。该方法包括生成要放置在空间光调制器的像素上的光学图案，将光学图案应用于空间光调制器的像素，测量具有施加到其上的光学图案的多个像素的光学性能，比较测量到目标光学性能的光学性能，并且调整应用于多个像素的光学图案以形成更接近实现目标光学性能的另一种光学图案。

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