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热词
    • 4. 发明授权
    • Integrated micro-optical elements
    • 集成微光元件
    • US06751376B2
    • 2004-06-15
    • US10354607
    • 2003-01-30
    • Benjamin Hammond
    • Benjamin Hammond
    • G02B642
    • G02B6/4236G02B6/2817G02B6/32G02B6/362G02B6/3652G02B6/3692G02B6/4204
    • The integration of micro-optical elements on a semiconductor substrate, particularly elements, such as glass-material optical components, such as lenses, beam splitters, mirrors and polarizing elements. A micro-optical device comprising a silicon substrate, and at least one glass-material micro-optical element mounted on the substrate. The device also includes a glass-material stand, for example, a grass frit, interposed between the micro-optical element and substrate. The stand is fuse-bonded to both the substrate and the micro-optical element. The substrate has, within a groove, a recess bounded by one or more walls, and the stand is dimensioned to fit within the recess and be positioned by one or more walls of the recess.
    • 微型光学元件在半导体衬底上的集成,特别是诸如透镜,分束器,反射镜和偏振元件之类的玻璃材料光学元件的元件。 一种微光学器件,包括硅衬底和安装在衬底上的至少一个玻璃材料微光学元件。 该装置还包括介于微光学元件和基板之间的玻璃材料支架,例如草料玻璃。 支架与基板和微型光学元件熔合结合。 衬底在凹槽内具有由一个或多个壁限定的凹部,并且支架的尺寸被设计成装配在凹部内并且由凹部的一个或多个壁定位。