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1. 发明申请

WO2008094352A8 THREE DIMENSIONAL MULTILAYER BARRIER AND METHOD OF MAKING 审中-公开
标题翻译：三维多层屏障及其制作方法
公开(公告)号：WO2008094352A8
公开(公告)日：2014-12-04
申请号：PCT/US2007086591
申请日：2007-12-06
申请人： VITEX SYSTEMS INC , VISSER ROBERT JAN , MORO LORENZA , BURROWS PAUL E , MAST ERIC S , MARTIN PETER M , GRAFF GORDON L , GROSS MARK E , BONHAM CHARLES C , BENNETT WENDY D , HALL MICHAEL G
发明人： VISSER ROBERT JAN , MORO LORENZA , BURROWS PAUL E , MAST ERIC S , MARTIN PETER M , GRAFF GORDON L , GROSS MARK E , BONHAM CHARLES C , BENNETT WENDY D , HALL MICHAEL G
IPC分类号： B32B3/14 , G02F1/1333 , H01L23/00 , H01L51/52 , H01M2/08
CPC分类号： H01M2/08 , G02F2001/133337 , H01L23/562 , H01L51/5256 , H01L2924/0002 , H01L2924/12044 , Y10T428/12347 , Y10T428/24 , H01L2924/00
摘要： A three dimensional multilayer barrier (150). The barrier (150) includes a first barrier continuous layer (155) adjacent to a substrate; a first discontinuous decoupling layer (160) adjacent to the first continuous barrier layer (155), the first discontinuous decoupling layer (160) having at least two sections (165); and a second continuous barrier layer (155) adjacent to the first discontinuous decoupling layer (160), the second barrier forming a wall (170) separating the sections of the first discontinuous decoupling layer (160). A method of making the three dimensional multilayer barrier (150) is also described.
摘要翻译：三维多层屏障（150）。阻挡层（150）包括与基底相邻的第一阻挡连续层（155）与所述第一连续阻挡层（155）相邻的第一不连续去耦层（160），所述第一不连续去耦层（160）具有至少两个部分（165）; 和邻近所述第一不连续去耦层（160）的第二连续阻挡层（155），所述第二阻挡层形成分隔所述第一不连续去耦层（160）的所述部分的壁（170）。还描述了制造三维多层屏障（150）的方法。

2. 发明申请

WO2011031631A1 METHOD AND SYSTEM FOR DEPOSITION OF PATTERNED ORGANIC THIN FILMS 审中-公开
标题翻译：用于沉积有形薄膜的方法和系统
公开(公告)号：WO2011031631A1
公开(公告)日：2011-03-17
申请号：PCT/US2010/047780
申请日：2010-09-03
申请人： UNIVERSAL DISPLAY CORPORATION , BURROWS, Paul E. , SILVERNAIL, Jeffrey , BROWN, Julie J.
发明人： BURROWS, Paul E. , SILVERNAIL, Jeffrey , BROWN, Julie J.
IPC分类号： C23C14/12 , C23C14/56
CPC分类号： C23C14/12 , C23C14/228 , C23C14/56 , C23C14/564 , Y10T137/85954 , Y10T137/87249 , Y10T137/877
摘要： High-throughput OVJP systems and methods are provided that may use multiple flow paths having different conductances to enable deposition with relatively short lag times. A high-throughput OVJP system may include a flow tube having a cross-sectional area much larger than the diameter of one or more apertures through which source material may be expelled during deposition. Use of such a configuration may allow for deposition with reduced lag times.
摘要翻译：提供了高吞吐量OVJP系统和方法，其可以使用具有不同电导的多个流动路径以实现具有相对短的滞后时间的沉积。高通量OVJP系统可以包括流管，该流管的横截面积远大于在沉积期间可以排出源材料的一个或多个孔的直径。使用这种配置可以允许具有减小的滞后时间的沉积。

3. 发明申请

WO2005040450A3 METHOD AND APPARATUS FOR MAKING AN ORGANIC THIN FILM 审中-公开
公开(公告)号：WO2005040450A3
公开(公告)日：2005-05-06
申请号：PCT/US2004/032861
申请日：2004-10-05
申请人： BATTELLE MEMORIAL INSTITUTE , BURROWS, Paul, E. , GRAFF, Gordon, A. , SAPOCHAK, Linda, S. , HALL, Michael, G.
发明人： BURROWS, Paul, E. , GRAFF, Gordon, A. , SAPOCHAK, Linda, S. , HALL, Michael, G.
IPC分类号： C23C14/22
摘要： A method for coating a thin film of a non-polymeric compound on a substrate by providing a mixture of the non-polymeric compound and a fluid carrier. This mixture (1) is then pumped into the interior of a heated evaporation box (7) having an internal temperature sufficient to convert substantially all of the non-polymeric compound and fluid carrier to a gaseous form. The non-polymeric compound and fluid carrier are then removed from the evaporation box via exit slit in the evaporation box. Adjacent to the exit slit (8), and maintained in a vacuum, is a substrate upon which the non-polymeric compound condenses. The substrate (10) is in motion, for example on a web roller, thereby allowing a continuous coating of the non-polymeric compound to be applied to the substrate.

4. 发明申请

WO2005040450A2 METHOD AND APPARATUS FOR COATING AN ORGANIC THIN FILM ON A SUBSTRATE FROM A FLUID SOURCE WITH CONTINUOUS FEED CAPABILITY 审中-公开
标题翻译：在具有连续进料能力的流体源上涂覆有机薄膜的方法和装置
公开(公告)号：WO2005040450A2
公开(公告)日：2005-05-06
申请号：PCT/US2004032861
申请日：2004-10-05
申请人： BATTELLE MEMORIAL INSTITUTE , BURROWS PAUL E , GRAFF GORDON A , SAPOCHAK LINDA S , HALL MICHAEL G
发明人： BURROWS PAUL E , GRAFF GORDON A , SAPOCHAK LINDA S , HALL MICHAEL G
IPC分类号： C23C14/12 , C23C14/22
CPC分类号： C23C14/228 , C23C14/12 , C23C14/22
摘要： A method for coating a thin film of a non-polymeric compound on a substrate by providing a mixture of the non-polymeric compound and a fluid carrier. This mixture is then pumped into the interior of a heated evaporation box having an internal temperature sufficient to convert substantially all of the non-polymeric compound and fluid carrier to a gaseous form. The non-polymeric compound and fluid carrier are then removed from the evaporation box via exit slit in the evaporation box. Adjacent to the exit slit, and maintained in a vacuum, is a substrate upon which the non-polymeric compound condenses. The substrate is in motion, for example on a web roller, thereby allowing a continuous coating of the non-polymeric compound to be applied to the substrate.
摘要翻译：通过提供非聚合化合物和流体载体的混合物在基材上涂覆非聚合化合物的薄膜的方法。然后将该混合物泵入具有足以将基本上所有非聚合化合物和流体载体转化为气态的内部温度的加热蒸发箱的内部。然后通过蒸发箱中的出口狭缝将非聚合物和流体载体从蒸发箱中取出。邻近出口狭缝并保持在真空中，是非聚合化合物冷凝的基底。衬底运动，例如在卷材辊上，从而允许将非聚合化合物连续涂覆到衬底上。

5. 发明申请

WO2012170145A1 PROCESS FOR FABRICATING OLED LIGHTING PANELS 审中-公开
标题翻译：制造OLED照明面板的工艺
公开(公告)号：WO2012170145A1
公开(公告)日：2012-12-13
申请号：PCT/US2012/037378
申请日：2012-05-10
申请人： UNIVERSAL DISPLAY CORPORATION , PANG, Huiqing , KRALL, Emory , RAJAN, Kamala , BURROWS, Paul E. , MA, Ruiqing , LEVERMORE, Peter
发明人： PANG, Huiqing , KRALL, Emory , RAJAN, Kamala , BURROWS, Paul E. , MA, Ruiqing , LEVERMORE, Peter
IPC分类号： C23C14/04 , C23C14/22 , C23C16/04 , H01L51/50 , H01L51/52 , H01L51/56 , H05B33/10 , H05B33/12 , H05B33/26
CPC分类号： H01L51/5203 , C23C14/042 , C23C14/24 , H01L27/3202 , H01L27/3204 , H01L27/3279 , H01L27/329 , H01L51/0023 , H01L51/0097 , H01L51/50 , H01L51/5016 , H01L51/5212 , H01L51/5228 , H01L51/56 , H01L2251/5338 , H01L2251/5361 , H01L2251/5392 , H05B33/10
摘要： Systems and methods for the design and fabrication of OLEDs (100,200), including high-performance large-area OLEDs (300), are provided. Variously described fabrication processes may be used to deposit and pattern bus lines (320,510,800A,800B,800C,2410) and/or insulators (2420) using vapor deposition such as vacuum thermal evaporation (VTE) through a shadow mask (810), and may avoid multiple photolithography steps. Bus lines (320,510,800A,800B,800C, 2410) and/or insulators (2420) may be formed with a smooth profile and a gradual sidewall transition. Such smooth profiles may, for example, reduce the probability of electrical shorting at the bus lines (320,510,800A,800B, 800C,2410). Other vapor deposition systems and methods may include, among other, sputter deposition, e-beam evaporation and chemical vapor deposition (CVD). A final profile of the bus line (320,510,800A,800B,800C,2410) and/or insulator (2420) may substantially correspond to the profile as deposited. A single OLED device (100,200,300) may also be formed with relatively large dimension, e.g. a shortest dimension in plan view of greater than approximately 2 cm, or an active area (2430) greater than approximately 10 cm 2 plan view.
摘要翻译：提供了用于设计和制造OLED（100,200）的系统和方法，包括高性能大面积OLED（300）。可以使用各种描述的制造工艺来通过阴影掩模（810）使用诸如真空热蒸发（VTE）的气相沉积沉积和模拟总线（320,510,800A，800B，800C，2410）和/或绝缘体（2420），以及可以避免多次光刻步骤。总线（320,510,800A，800B，800C，2410）和/或绝缘体（2420）可以形成有平滑轮廓和逐渐的侧壁转变。这样的平滑轮廓可以例如降低在总线（320,510,800A，800B，800C，2410）处的电短路的可能性。其他蒸镀系统和方法可以包括溅射沉积，电子束蒸发和化学气相沉积（CVD）。总线（320,510,800A，800B，800C，2410）和/或绝缘体（2420）的最终轮廓可以基本上对应于所沉积的轮廓。单个OLED器件（100,200,300）也可以形成为具有相对较大的尺寸，例如。大于约2cm的平面图中的最短尺寸或大于约10cm 2的平面图的有效面积（2430）。

6. 发明申请

WO2012151221A1 ILLUMINATION SOURCE USING LEDS AND OLEDS 审中-公开
标题翻译： LED和OLEDs的照明源
公开(公告)号：WO2012151221A1
公开(公告)日：2012-11-08
申请号：PCT/US2012/036023
申请日：2012-05-01
申请人： UNIVERSAL DISPLAY CORPORATION , BURROWS, Paul E. , HACK, Michael , BROWN, Julia J.
发明人： BURROWS, Paul E. , HACK, Michael , BROWN, Julia J.
IPC分类号： H01L27/32 , H01L33/00
CPC分类号： H01L27/3225 , F21K9/00 , F21Y2113/20 , F21Y2115/10 , F21Y2115/15 , H01L27/3211 , H01L51/5271 , H01L51/529 , H01L2251/5361 , Y02B20/36 , Y10S362/80
摘要： A first device is provided, wherein the first device is an illumination source comprising OLEDs (402; 403) and inorganic LEDs (401). The first device includes a first light source that has one or more first light emitting devices. Each of the first light emitting devices includes an inorganic light emitting diode (LED) that emits light that has a peak wavelength in the visible spectrum between 400 and 500 nm. The device also includes a second light source that has one or more second light emitting devices. Each of the second light emitting devices comprises an organic light emitting diode (OLED) that emits light that has peak wavelength in the visible spectrum between 500 and 800 nm. The device also includes a driving component. The first light source and the second light source are disposed such that their emissions combine.
摘要翻译：提供了第一装置，其中第一装置是包括OLED（402; 403）和无机LED（401）的照明源。第一装置包括具有一个或多个第一发光装置的第一光源。每个第一发光器件包括发射具有在400和500nm之间的可见光谱中的峰值波长的光的无机发光二极管（LED）。该装置还包括具有一个或多个第二发光装置的第二光源。每个第二发光器件包括发射具有在500和800nm之间的可见光谱中的峰值波长的光的有机发光二极管（OLED）。该装置还包括驱动部件。第一光源和第二光源被布置成使得它们的排放相结合。

7. 发明申请

WO2012011913A1 ORGANIC VAPOR JET PRINTING 审中-公开
标题翻译：有机蒸汽喷射机
公开(公告)号：WO2012011913A1
公开(公告)日：2012-01-26
申请号：PCT/US2010/042923
申请日：2010-07-22
申请人： UNIVERSAL DISPLAY CORPORATION , BURROWS, Paul E. , MOHAN, Siddharth Harikrishna
发明人： BURROWS, Paul E. , MOHAN, Siddharth Harikrishna
IPC分类号： C23C14/04 , C23C14/12
CPC分类号： C23C14/04 , C23C14/12 , C23C14/228
摘要： A method of depositing organic material is provided. A chamber is provided having a substrate disposed therein. An organic material is deposited over the substrate by ejecting from a nozzle (422, 462) directed at the substrate: a first gas; and a vapor of the organic material carried by the first gas. During the depositing an organic material, a second gas is provided in the chamber. The flow rate of the second gas is at least 5 % of the sum of the flow rates of all gases flowing into the vacuum chamber. The second gas has a molecular weight at least 20 % greater than the molecular weight of the first gas. The second gas is provided in the chamber via an aperture (424, 464) remote from the nozzle.
摘要翻译：提供了沉积有机材料的方法。设置有设置在其中的基板的室。有机材料通过从指向基板的喷嘴（422,462）喷射而沉积在基板上：第一气体; 和由第一气体携带的有机材料的蒸气。在沉积有机材料期间，在室中提供第二气体。第二气体的流量为流入真空室的所有气体的流量之和的至少5％。第二气体的分子量比第一气体的分子量大至少20％。第二气体经由远离喷嘴的孔（424,464）设置在腔室中。

8. 发明申请

WO2010077544A1 METHOD FOR EDGE SEALING BARRIER FILMS 审中-公开
标题翻译：边缘密封膜片的方法
公开(公告)号：WO2010077544A1
公开(公告)日：2010-07-08
申请号：PCT/US2009/066518
申请日：2009-12-03
申请人： VITEX SYSTEMS, INC. , CHU, Xi , BURROWS, Paul, E. , MAST, Eric, S. , MARTIN, Peter, M. , GRAFF, Gordon, L. , GROSS, Mark, E. , BONHAM, Charles, C. , BENNETT, Wendy, D. , ROSENBLUM, Martin, Philip
发明人： CHU, Xi , BURROWS, Paul, E. , MAST, Eric, S. , MARTIN, Peter, M. , GRAFF, Gordon, L. , GROSS, Mark, E. , BONHAM, Charles, C. , BENNETT, Wendy, D. , ROSENBLUM, Martin, Philip
IPC分类号： B32B27/00
CPC分类号： H01L23/564 , H01L51/5256 , H01L2251/566 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： Methods of making an edge-sealed, encapsulated environmentally sensitive device. One method includes providing an environmentally sensitive device with a contact on a substrate; depositing a decoupling layer adjacent to the environmentally sensitive device, the decoupling layer having a discrete area and covering the environmentally sensitive device and not covering the contact, the decoupling layer deposited using a printing process; depositing a first barrier layer adjacent to the decoupling layer, the first barrier layer having a first area greater than the discrete area of the decoupling layer, and the first barrier layer having a second area covering the decoupling layer and the contact, the decoupling layer being sealed between the edges of the first barrier layer and the substrate or an optional second barrier layer; and removing the second area of the first barrier layer from the contact.
摘要翻译：制造边缘密封，密封环境敏感设备的方法。一种方法包括在基板上提供具有接触的环境敏感装置; 沉积与环境敏感设备相邻的去耦层，所述去耦层具有离散区域并覆盖环境敏感设备而不覆盖接触，使用印刷工艺沉积的去耦层; 沉积与所述去耦层相邻的第一势垒层，所述第一势垒层具有大于所述去耦层的离散区域的第一区域，并且所述第一势垒层具有覆盖所述解耦层和所述接触的第二区域，所述去耦层为密封在第一阻挡层的边缘与基底或任选的第二阻挡层之间; 以及从所述接触件移除所述第一阻挡层的所述第二区域。

9. 发明申请

WO2011028867A1 ORGANIC VAPOR JET PRINTING DEVICE WITH A CHILLER PLATE 审中-公开
标题翻译：有机蒸汽喷射装置与冷却板
公开(公告)号：WO2011028867A1
公开(公告)日：2011-03-10
申请号：PCT/US2010/047625
申请日：2010-09-02
申请人： UNIVERSAL DISPLAY CORPORATION , BURROWS, Paul E. , MOHAN, Siddharth Harikrishna
发明人： BURROWS, Paul E. , MOHAN, Siddharth Harikrishna
IPC分类号： C23C14/12 , C23C14/56
CPC分类号： C23C14/12 , C23C14/228 , C23C14/564
摘要： A device is provided. The device includes a nozzle (310), a source of carrier gas and a source of organic molecules in fluid communication with the nozzle. The device also includes an active cooling system (322) disposed adjacent to the nozzle. Preferably, the device also includes a chamber, wherein the nozzle, and the active cooling system are disposed within the chamber. A substrate holder may also be disposed within the chamber, adapted to support a substrate beneath the nozzle, movable relative to the nozzle. Preferably, a substrate is held by the substrate holder, the substrate disposed at a distance of 0.1 to 10 mm from the active cooling system. Preferably, the device also includes a heating system (350) attached to the nozzle. The points at which the heating system are attached to the nozzle preferably includes at least one point that is zero to 5 mm from the tip of the nozzle.
摘要翻译：提供了一种设备。该装置包括喷嘴（310），载气源和与喷嘴流体连通的有机分子源。该装置还包括邻近喷嘴设置的主动冷却系统（322）。优选地，该装置还包括腔室，其中喷嘴和主动冷却系统设置在腔室内。衬底保持器还可以设置在腔室内，适于支撑喷嘴下方的衬底，其可相对于喷嘴移动。优选地，基板被基板保持器保持，基板设置在距主动冷却系统0.1至10mm的距离处。优选地，该装置还包括附接到喷嘴的加热系统（350）。加热系统附接到喷嘴的点优选地包括距喷嘴的尖端为零至5mm的至少一个点。

10. 发明申请

WO2007139643A1 METHOD OF MAKING AN ENCAPSULATED PLASMA SENSITIVE DEVICE 审中-公开
标题翻译：制造等离子体敏感器件的方法
公开(公告)号：WO2007139643A1
公开(公告)日：2007-12-06
申请号：PCT/US2007/010068
申请日：2007-04-24
申请人： VITEX SYSTEMS, INC. , MORO, Lorenza , CHU, Xi , ROSENBLUM, Martin, Philip , NELSON, Kenneth, Jeffrey , BURROWS, Paul, E. , GROSS, Mark, E. , ZUMHOFF, Mac, R. , MARTIN, Peter, M. , BONHAM, Charles, C. , GRAFF, Gordon, L.
发明人： MORO, Lorenza , CHU, Xi , ROSENBLUM, Martin, Philip , NELSON, Kenneth, Jeffrey , BURROWS, Paul, E. , GROSS, Mark, E. , ZUMHOFF, Mac, R. , MARTIN, Peter, M. , BONHAM, Charles, C. , GRAFF, Gordon, L.
IPC分类号： H01L51/52 , H01L51/56
CPC分类号： C23C14/0694 , H01L51/5256 , H01L51/56
摘要： A method of making an encapsulated plasma sensitive device. The method comprises: providing a plasma sensitive device adjacent to a substrate; depositing a plasma protective layer on the plasma sensitive device using a process selected from non-plasma based processes, or modified sputtering processes; and depositing at least one barrier stack adjacent to the plasma protective layer, the at least one barrier stack comprising at least one decoupling layer and at least one barrier layer, the plasma sensitive device being encapsulated between the substrate and the at least one barrier stack, wherein the decoupling layer, the barrier layer, or both are deposited using a plasma process, the encapsulated plasma sensitive device having a reduced amount of damage caused by the plasma compared to an encapsulated plasma sensitive device made without the plasma protective layer. An encapsulated plasma sensitive device is also described.
摘要翻译：一种制造封装等离子体敏感装置的方法。该方法包括：提供与衬底相邻的等离子体敏感器件; 使用选自非等离子体工艺或改进的溅射工艺的工艺在等离子体敏感器件上沉积等离子体保护层; 以及沉积与所述等离子体保护层相邻的至少一个势垒堆叠，所述至少一个势垒堆叠包括至少一个去耦层和至少一个势垒层，所述等离子体敏感器件封装在所述衬底和所述至少一个阻挡层之间，其中使用等离子体工艺沉积去耦层，阻挡层或两者，所述封装等离子体敏感器件与不具有等离子体保护层的封装的等离子体敏感器件相比，具有由等离子体引起的损伤量减少。还描述了封装的等离子体敏感器件。

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