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    • 2. 发明申请
    • Double HBT base metal micro-bridge
    • 双HBT贱金属微桥
    • US20050184312A1
    • 2005-08-25
    • US11116745
    • 2005-04-28
    • Donald SawdaiGregory LeslieAugusto Gutierrez-Aitken
    • Donald SawdaiGregory LeslieAugusto Gutierrez-Aitken
    • H01L29/417H01L21/331H01L29/423H01L29/737H01L29/739
    • H01L29/66318H01L29/42304H01L29/7371
    • A heterojunction bipolar transistor (HBT) device structure is provided which facilitates the reduction of the base-collector capacitance and a method for making the same. The base-collector capacitance is decreased by fabricating a base micro-bridge connecting a base contact to a base mesa on the HBT. The base micro-bridge is oriented along about one of 001, 010, 00{overscore (1)}, and 0{overscore (1)}0 direction to a major flat of the wafer. The HBT device employs a phosphorous based collector material. During removal of the phosphorous based collector material, the base layer is undercut forming the micro-bridge, successfully removing the collector and sub-collector material below the bridge due to the orientation of the micro-bridge. The removal of collector and sub-collector material reduces the base-collector junction area, and therefore reduce the base-collector junction capacitance.
    • 提供了一种有助于降低基极 - 集电极电容的异质结双极晶体管(HBT)器件结构及其制造方法。 通过制造将基极接触件连接到HBT上的基底台面的基极微型桥接器来降低基极集电极电容。 基极微桥沿着001,1010,00(超晶核(1和0)(超晶圆(10个方向)到晶片的主平面)中的一个取向,HBT器件采用基于磷的收集器材料。 磷基集电体材料,基层底切成形微桥,由于微桥的取向,成功地除去桥下的集电体和次集电体材料,集电体和次集电体材料的去除减少了基极 - 集电极结面积,因此降低了基极 - 集电极结电容。
    • 3. 发明授权
    • Low dark current photodiode
    • 低暗电流光电二极管
    • US06566724B1
    • 2003-05-20
    • US09742917
    • 2000-12-19
    • Augusto Gutierrez-AitkenEdward A. Rezek
    • Augusto Gutierrez-AitkenEdward A. Rezek
    • H01L3300
    • H01L31/03046H01L31/101Y02B10/10Y02E10/544
    • A low dark current photodiode and a method for reducing dark current in a photodiode. A preferred embodiment of the present invention provides a photodiode comprising a barrier layer. The barrier layer comprises a barrier layer material having a wider band-gap than the band-gap of the absorption layer material of the photodiode. The barrier layer comprises sublayers, which are doped to position the high-electric field region at the pn junction of the photodiode in the barrier layer. The method for reducing dark current in a photodiode comprises building a barrier layer into the structure of a photodiode. Building the barrier layer comprises building a layer of semiconductor material with wider band-gap than the i-layer material. Building the barrier layer preferably further comprises doping the barrier layer material to position the high-energy region at the pn junction of the photodiode in the barrier layer, thus reducing dark current.
    • 低暗电流光电二极管和减少光电二极管中的暗电流的方法。 本发明的优选实施例提供一种包括阻挡层的光电二极管。 阻挡层包括具有比光电二极管的吸收层材料的带隙更宽的带隙的阻挡层材料。 阻挡层包括子层,其被掺杂以将阻挡层中的光电二极管的pn结处的高电场区域定位。 用于减少光电二极管中的暗电流的方法包括将阻挡层构建到光电二极管的结构中。 构建阻挡层包括构建具有比i层材料更宽的带隙的半导体材料层。 构建阻挡层优选还包括掺杂阻挡层材料以将阻挡层中的光电二极管的pn结处的高能区域定位,从而降低暗电流。
    • 6. 发明申请
    • Semiconductor Device with OHMIC Contact and Method of Making the Same
    • 具有OHMIC触点的半导体器件及其制造方法
    • US20090065811A1
    • 2009-03-12
    • US11851968
    • 2007-09-07
    • Ping-Chih ChangXiaobing MeiAugusto Gutierrez-Aitken
    • Ping-Chih ChangXiaobing MeiAugusto Gutierrez-Aitken
    • H01L29/737H01L21/3205
    • H01L29/7371H01L29/205H01L29/452
    • A semiconductor device with ohmic contact is provided with a method of making the same. In one embodiment, a method is provided for fabricating a semiconductor device. The method comprises providing a semiconductor structure with a N-type doped semiconductor contact layer, forming a platinum contact portion over the N-type doped semiconductor contact layer, forming an adhesive contact portion over the platinum contact portion, forming a barrier contact portion over the adhesive contact portion, and forming a gold contact portion over the barrier contact portion. The method further comprises annealing the semiconductor structure to alloy the platinum contact portion with the N-type doped semiconductor contact layer to form a platinum/semiconductor alloyed diffusion contact barrier substantially disposed within the N-type doped semiconductor contact layer.
    • 具有欧姆接触的半导体器件具有制造其的方法。 在一个实施例中,提供了一种用于制造半导体器件的方法。 该方法包括提供具有N型掺杂半导体接触层的半导体结构,在N型掺杂半导体接触层上形成铂接触部分,在铂接触部分上方形成粘合剂接触部分, 粘合剂接触部分,并且在阻挡接触部分上形成金接触部分。 该方法还包括退火半导体结构以将铂接触部分与N型掺杂半导体接触层合金,以形成基本上设置在N型掺杂半导体接触层内的铂/半导体合金扩散接触屏障。