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1. 发明授权

US06831962B2 Automatic adjusting method for a goniometer and associated device 失效
标题翻译：测角仪和相关设备的自动调节方法
公开(公告)号：US06831962B2
公开(公告)日：2004-12-14
申请号：US10264773
申请日：2002-10-04
申请人： Arno Lentfer
发明人： Arno Lentfer
IPC分类号： G01N2320
CPC分类号： G01N23/20016
摘要： In order to create a method for the automatic relative adjusting of the position coordinates (xp, yp, zp) of at least one sample with respect to the center coordinates (xm, ym, zm) of a goniometer (200) determined by the intersection point of the tilting axles (&ohgr;, &khgr;, &phgr;) as well as an associated device (100) through which the construction of goniometric systems is considerably simplified and moreover the costs for multiple circle systems are considerably reduced, it is proposed that, during a variation of the sample orientation or tilting, the trajectory of the sample which is taking place, in particular the precession trajectory of the sample, can be dynamically compensated about the center coordinates (xm, ym, zm) and the sample can be dynamically held at the measuring point, while [a] the trajectory of the sample about the center coordinates (xm, ym, zm) is recorded and exploited by digital image processing, [b] correction coordinates (xm−xp, ym−yp, zm−zp) are calculated from the exploited and recorded trajectory in order to dynamically compensate the trajectory and [c] the sample is moved according to the calculated correction coordinates (xm−xp, ym−yp, zm−zp) into at least one of the directions of translation (x, y, z) so that this translational shifting is dynamically coupled to the moving of the tilting axles (&ohgr;, &khgr;, &phgr;) of the goniometer (200) determined by the variation of the sample orientation or tilting.
摘要翻译：为了创建用于相对于由交点确定的测角器（200）的中心坐标（xm，ym，zm）自动相对调整至少一个样本的位置坐标（xp，yp，zp）的方法，倾斜轴（omega，chi，phi）的点以及相关联的装置（100），通过该装置（100），测量系统的构造被大大简化，而且多圆系统的成本大大降低，建议在样本取向或倾斜的变化，正在发生的样本的轨迹，特别是样本的进动轨迹，可以对中心坐标（xm，ym，zm）进行动态补偿，并且样本可以动态地保持在测量点，而[a]样本关于中心坐标（xm，ym，zm）的轨迹由数字图像处理记录和利用，[b]校正坐标（xm-xp，ym-yp，zm-zp）是从...中计算出来的利用和记录的轨迹，以便动态地补偿轨迹，并且[c]根据计算的校正坐标（xm-xp，ym-yp，zm-zp）将样本移动到至少一个翻译方向（x， y，z），使得该平移移动与通过样本取向或倾斜的变化确定的测角器（200）的倾斜轴（ω，chi，phi）的动态动态耦合。

2. 发明授权

US5144135A Image plate scanner 失效
标题翻译：图像平板扫描仪
公开(公告)号：US5144135A
公开(公告)日：1992-09-01
申请号：US689268
申请日：1991-05-24
申请人： Jules Hendrix , Arno Lentfer
发明人： Jules Hendrix , Arno Lentfer
IPC分类号： H04N1/00 , H04N1/029 , H04N1/04 , H04N1/053 , H04N1/10
CPC分类号： H04N1/053 , H04N1/029 , H04N1/10 , H04N2201/0424 , H04N2201/0471 , H04N2201/04756
摘要： An improved image plate scanner (10) for scanning a circular videodisk (12) exposed by X-rays, with image elements (40) spaced a distance (radius R) away from the image plate central point. The image plate is scanned with laser beams. A videodisk carrier (13) on which the image plate is detachably mounted, is drivable with the aid of an electromotor (11), with adjustable rotation speeds. An image element scanning unit (15;115) is radially displaceable across the image plate by means of a drive assembly (14,18) with presettable speed of advance. A laser light supply (42) and an optical image element scanning facility (30a) are parts of an optoelectronic measured value transmission unit, as are a photomultiplier (36) and a signal conditioner. During the light scanning for recording the image stored on the image plate maximum light yield is obtained for the emitted light. The image plate scanner is constructed in a compact manner so as to facilitate operation. The image element scanning unit (15;115) can be guided across the image plate while scanning each image element ( 40) at the same tangential speed, provision being preferably made for the laser light supply (42) to include a collector lens (44), two laser light sources (43a,43b), and an optical filter (46) by means of which the laser light is focussed. The drive shaft (18) of the electromotor (11) is connected by a gear drive to a power spindle (26). The image element scanning unit (15) is translatorily displaceable radially over the image plate (12).
摘要翻译： PCT No.PCT / EP90 / 01612 Sec。 371日期1991年5月24日 102（e）日期1991年5月24日PCT提交1990年9月22日PCT公布。出版物WO91 / 04629 日本1991年4月4日。一种用于扫描由X射线曝光的圆形视盘（12）的改进的图像平板扫描器（10），与图像中心点间隔开距离（半径R）的图像元素（40）。用激光束扫描图像板。可拆卸地安装有图像板的视盘载体（13）可借助电动机（11）以可调节的转速驱动。图像元素扫描单元（15; 115）可通过具有可预先设定的提前速度的驱动组件（14,18）在图像板上径向移动。激光供应源（42）和光学图像元素扫描设备（30a）是光电测量值传输单元的一部分，光电倍增器（36）和信号调节器也是。在用于记录的光扫描期间，存储在图像板上的图像对于发射的光获得最大光收率。图像平板扫描器以紧凑的方式构造，以便于操作。图像元素扫描单元（15; 115）可以被引导穿过图像板，同时以相同的切向速度扫描每个图像元素（40），优选地为激光供应（42）提供包括收集透镜（44）），两个激光源（43a，43b）和滤光器（46），通过该滤光器激光被聚焦。电动机（11）的驱动轴（18）通过齿轮传动连接到动力主轴（26）。图像元素扫描单元（15）可在图像板（12）的上方径向移位。

3. 发明授权

US4701391A Mask with magnesium diaphragm for X-ray lithography 失效
标题翻译：具有镁膜的面膜用于X射线光刻
公开(公告)号：US4701391A
公开(公告)日：1987-10-20
申请号：US824294
申请日：1986-01-24
申请人： Arno Lentfer , Holger Luthje
发明人： Arno Lentfer , Holger Luthje
IPC分类号： G03F1/22 , G03F7/20 , H01L21/027 , G21K5/00 , G03F1/00
CPC分类号： G03F1/22 , Y10S430/168
摘要： A mask for X-ray lithography is formed of a multilayer diaphragm with a patterned absorber layer on the diaphragm. The diaphragm includes a layer of magnesium and at least one intermediate layer.
摘要翻译：用于X射线光刻的掩模由在隔膜上具有图案化吸收层的多层隔膜形成。隔膜包括一层镁和至少一层中间层。

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