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1. 发明授权

US07422031B2 Rotary unions, fluid delivery systems, and related methods 有权
标题翻译：旋转工会，流体输送系统和相关方法
公开(公告)号：US07422031B2
公开(公告)日：2008-09-09
申请号：US10799250
申请日：2004-03-12
申请人： Arne C. Benson , Edward D. Hanzlik
发明人： Arne C. Benson , Edward D. Hanzlik
IPC分类号： F16L27/08
CPC分类号： F16L27/0828 , Y10T137/86268
摘要： A rotary union having a housing, a rotor, and a post such that a fluid can be conveyed through the rotary union. The rotor is rotatably coupled to the housing, preferably by at least one bearing interposed between a portion of the rotor exterior and a portion of the housing interior. The post is positioned in the rotary union in a manner effective to help fluidly couple the rotor to the housing and such that an annular gap surrounds at least a portion of the post such that the annular gap constitutes at least a portion of a drain fluid pathway. The present invention also includes fluid delivery systems including such rotary unions and methods of making and/or using such rotary unions.
摘要翻译：具有壳体，转子和柱的旋转接头，使得流体可以通过旋转接头传送。优选地，转子可旋转地联接到壳体，该至少一个轴承置于转子外部的一部分与壳体内部的一部分之间。该柱以有效帮助流体地将转子连接到壳体的方式定位在旋转接头中，并且使得环形间隙围绕柱的至少一部分，使得环形间隙构成排水流体通路的至少一部分。本发明还包括包括这种旋转接头的流体输送系统以及制造和/或使用这种旋转接头的方法。

2. 发明授权

US07556697B2 System and method for carrying out liquid and subsequent drying treatments on one or more wafers 有权
标题翻译：用于在一个或多个晶片上进行液体和随后的干燥处理的系统和方法
公开(公告)号：US07556697B2
公开(公告)日：2009-07-07
申请号：US10866916
申请日：2004-06-14
申请人： Arne C. Benson , Erik D. Olson , Douglas S. Spaeth
发明人： Arne C. Benson , Erik D. Olson , Douglas S. Spaeth
IPC分类号： B08B7/00 , B08B5/04 , C25F3/30
CPC分类号： H01L21/02052 , B08B3/02 , H01L21/67028 , H01L21/67051 , Y10S134/902
摘要： Systems for processing microelectronic substrates in a process chamber that incorporate improved technology for transitioning from a wet process to a dry process (especially transitioning from rinsing to drying). At least a portion of residual liquid remaining in fluid supply lines after a wet treatment is removed via a pathway that avoids purging directly onto the substrates. Related methods are also included in the present invention.
摘要翻译：用于在处理室中处理微电子衬底的系统，其包含用于从湿法转变为干法（特别是从漂洗到干燥的过渡）的改进技术。在湿处理之后残留在流体供应管线中的剩余液体的至少一部分通过避免直接吹扫到基底上的通道去除。相关方法也包括在本发明中。

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