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    • 2. 发明授权
    • Apparatus and method for loading and unloading wafers
    • 装载和卸载晶圆的装置和方法
    • US4775281A
    • 1988-10-04
    • US936825
    • 1986-12-02
    • Antonios E. Prentakis
    • Antonios E. Prentakis
    • B65H1/28B23Q7/04B65G1/00B65G1/07B65G49/07H01L21/673H01L21/677
    • H01L21/67766B23Q7/048H01L21/67781Y10S414/136Y10S414/137Y10S414/139
    • Apparatus for loading and unloading wafers including a support structure having associated with it a predetermined wafer engagement position at which wafers can be engaged by the processing machine, a temporary storage device mounted on the support structure for storing a wafer in position for pick up, the flat surfaces of the wafer being parallel to an X-axis and perpendicular to a Z-axis, a first wafer engagement member for carrying the wafer on the first engagement member between the temporary storage device and the engagement position, a first X-direction mover mounted on the support structure and operable to move the first engagement member parallel to the X-axis, a second wafer engagement member for carrying the wafer on the second engagement member between the temporary storage device and the engagement position, a second X-direction mover mounted on the support structure and operable to move the second engagement member parallel to the X-axis independent of the first engagement member, a Z-direction mover mounted on the support structure and operable to move the first and second engagement members in the Z-direction, and a controller to cause the first X-direction mover to move the first engagement member parallel to the X-axis toward the engagement position at the same time as or shortly after the second engagement member moves parallel to said X-axis away from the engagement position.
    • 用于装载和卸载晶片的装置,其包括具有与其相关联的预定晶片接合位置的支撑结构,晶片可以由处理机接合;安装在支撑结构上的临时存储装置,用于将晶片存储在适当位置用于拾取, 所述晶片的平坦表面平行于X轴并垂直于Z轴;第一晶片接合构件,用于将所述晶片承载在所述临时存储装置与所述接合位置之间的所述第一接合构件上;第一X方向移动器 安装在所述支撑结构上并且可操作以使所述第一接合构件平行于所述X轴移动;第二晶片接合构件,用于将所述晶片承载在所述临时存储装置和所述接合位置之间的所述第二接合构件上;第二X方向移动器 安装在支撑结构上并且可操作以独立于第一接合而使第二接合构件平行于X轴移动 构件,安装在所述支撑结构上并可操作以沿Z方向移动所述第一和第二接合构件的Z方向移动器,以及控制器,以使所述第一X方向移动器将所述第一接合构件平行于所述X方向移动, 在第二接合构件平行于所述X轴移动离开接合位置的同时或不久之后朝向接合位置。