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    • 4. 发明授权
    • Metrological apparatus
    • 计量仪器
    • US5572798A
    • 1996-11-12
    • US256324
    • 1995-07-08
    • Anthony B. Barnaby
    • Anthony B. Barnaby
    • G01B5/20G01B5/00G01B5/008G01B5/207G01B21/20
    • G01B5/0009
    • A metrological apparatus has a movable arm 15 which moves up and down between two bearing members 13, both of which define datum positions for the arm 15. The arm 15 has air bearings on the bearing members 13, so that it adopts a position equidistant between the bearing members 13. In this way, the position of the arm 15 contains the average of the errors in the two datum positions defined by the bearing members 13. Where the bearing members 13 have symmetric errors, these will be cancelled. Since the path of maximum straightness of movement of the arm 15 is spaced from the bearing members 13, it is possible to put a workpiece 3 in this path and a turntable 5 for supporting the workpiece 3 is arranged to have its rotational axis in line with the path of maximum straightness. The vertical position of each end of the arm 15 is measured using a respective grating 25 and the average of the measurements is taken to provide an accurate measurement of the height of the centre point of the arm 15 over the workpiece 3, substantially free of Abbe errors.
    • PCT No.PCT / GB93 / 00037 Sec。 371日期:1994年7月8日 102(e)日期1994年7月8日PCT提交1993年1月8日PCT公布。 出版物WO93 / 14367 日期1993年7月22日计量装置具有可移动臂15,该可动臂15在两个轴承构件13之间上下移动,两个轴承构件均限定了臂15的基准位置。臂15在轴承构件13上具有空气轴承, 在轴承构件13之间采用等距离的位置。这样,臂15的位置包含由轴承构件13限定的两个基准位置中的误差的平均值。当轴承构件13具有对称误差时,这些将是 取消。 由于臂15的最大平直度的运动路径与轴承构件13间隔开,因此可以将工件3放置在该路径中,并且用于支撑工件3的转台5被布置成使其旋转轴线与 最大直线的路径。 使用相应的光栅25测量臂15的每个端部的垂直位置,并且采用测量的平均值来提供臂15在工件3上的中心点的高度的精确测量,基本上不含Abb + E,acu e + EE错误。