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    • 8. 发明授权
    • Test device for determining charge damage to a transistor
    • 用于确定对晶体管的电荷损坏的测试装置
    • US07804317B1
    • 2010-09-28
    • US11583758
    • 2006-10-19
    • Biju ParameshwaranSriram MadhavanAndrew E. Carlson
    • Biju ParameshwaranSriram MadhavanAndrew E. Carlson
    • G01R31/26
    • G01R31/2884H01L22/34
    • According to one exemplary embodiment, a test device includes a transistor situated on a substrate. The test device further includes a protection device coupled by a fuse to a gate of the transistor in an interconnect metal layer, where the interconnect metal layer is formed over the substrate. The fuse allows the protection device to be decoupled from the gate of the transistor prior to testing the transistor. The test device further includes first and second contact pads formed over the substrate and coupled to respective terminals of the fuse to provide access to the fuse. A current can be applied between the first and second contacts pads to cause the fuse to open to decouple the protection device from the gate of the transistor. The test device further includes an antenna coupled to the gate of the transistor with interconnect metal segments for accumulating electrical charge during wafer processing.
    • 根据一个示例性实施例,测试装置包括位于基板上的晶体管。 测试装置还包括保护装置,其通过熔丝耦合到互连金属层中的晶体管的栅极,其中互连金属层形成在衬底上。 熔丝允许保护器件在测试晶体管之前与晶体管的栅极分离。 测试装置还包括形成在衬底上的第一和第二接触焊盘,并且耦合到熔丝的相应端子以提供对熔丝的接触。 可以在第一和第二接触焊盘之间施加电流以使保险丝断开以将保护装置与晶体管的栅极分离。 测试装置还包括天线,其耦合到具有用于在晶片处理期间累积电荷的互连金属段的晶体管的栅极。