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1. 发明授权

US08831170B2 Mirror with a mirror carrier and projection exposure apparatus 有权
标题翻译：镜子与镜子载体和投影曝光设备
公开(公告)号：US08831170B2
公开(公告)日：2014-09-09
申请号：US11934509
申请日：2007-11-02
申请人： Rutger Wevers , Andreas Seifert , Joachim Hartjes , Guenther Dengel
发明人： Rutger Wevers , Andreas Seifert , Joachim Hartjes , Guenther Dengel
IPC分类号： G02B5/08 , G02B7/195 , G02B17/06 , G03F7/20
CPC分类号： G02B17/0657 , G02B7/195 , G03F7/70891
摘要： A mirror with a mirror carrier, as well as related apparatuses, systems and methods are disclosed. The mirror carrier can be embodied as cooling device with at least one cooling channel. Tube connections can be provided to connecting the at least one cooling channel to an inlet and an outlet of coolant. Sealing elements for a gas-tight and liquid-tight seals can be arranged between the tube connections and the mirror carrier. The field of application of the mirror can be, for example, an illumination device of a projection exposure apparatus.
摘要翻译：公开了具有镜载体的反射镜以及相关装置，系统和方法。镜载体可以具有至少一个冷却通道的冷却装置。可以提供管连接以将至少一个冷却通道连接到冷却剂的入口和出口。用于气密和液密密封的密封元件可以布置在管连接件和镜架之间。反射镜的应用领域可以是例如投影曝光装置的照明装置。

2. 发明申请

US20120073683A1 METHOD FOR PRODUCING A MOLDED PART, AND A MOLDED PART THUS PRODUCED 审中-公开
标题翻译：生产模制件的方法，以及生产的模制件
公开(公告)号：US20120073683A1
公开(公告)日：2012-03-29
申请号：US13376602
申请日：2010-06-14
申请人： Dragan Griebel , Volker Böhm , Alexander Oelschlegel , Nobert Honheiser , Karlheinz Winter , Andreas Seifert
发明人： Dragan Griebel , Volker Böhm , Alexander Oelschlegel , Nobert Honheiser , Karlheinz Winter , Andreas Seifert
IPC分类号： F15D1/00 , B29C70/30 , B29C35/08 , B29C49/00
CPC分类号： B29C71/04 , B29C49/00 , B29C49/04 , B29C53/58 , B29C63/24 , B29C2035/0827 , B29C2035/085 , B29C2035/0877 , B29K2023/06 , B29K2277/10 , B29K2305/00 , B29K2995/0063 , B29L2023/00 , F16L9/121 , Y10T137/8593
摘要： The invention relates to a molded part for accommodating, conducting, or storing a fluid, having a hollow body delimited by a wall lining, and at least one device for feeding fluids to the hollow body, and/or discharging fluids therefrom. The molded part is characterized in that the wall lining contains cross-linked polyethylene.
摘要翻译：本发明涉及一种用于容纳，导电或储存流体的模制件，该流体具有由壁衬里限定的中空体，以及至少一个用于将流体输送到中空体的装置和/或从其排出流体的装置。成型部件的特征在于，壁衬里含有交联聚乙烯。

3. 发明申请

US20070206301A1 FACETED MIRROR APPARATUS 审中-公开
标题翻译：镜面装置
公开(公告)号：US20070206301A1
公开(公告)日：2007-09-06
申请号：US11695626
申请日：2007-04-03
申请人： Andreas Seifert , Markus Weiss , Andreas Heisler , Stefan Dornheim
发明人： Andreas Seifert , Markus Weiss , Andreas Heisler , Stefan Dornheim
IPC分类号： G02B5/08
CPC分类号： B82Y10/00 , G02B7/1824 , G03F7/70166 , G03F7/702 , G03F7/70825
摘要： In a method for the production of a facetted mirror 24 having a plurality of mirror facets 12 and 12′, which have mirror surfaces 15 and are fitted into reception bores 22, 22′ of a support plate 16, the mirror facets 12, 12′ are made in a first method step. At least one of the mirror facets is fitted into the associated reception bore of the support plate in a second method step, after which the ACTUAL position of the optical axis of at least one mirror surface of an associated mirror facet 12, 12′ fitted into the support plate is respectively determined in a third step and compared with a SET position of a predetermined optical axis. Knowing the measured values determined for the at least one mirror facet 12, 12′ in the third method step, reprocessing of the mirror facet and/or of the reception bore is subsequently carried out in a further method step if there is an angular deviation between the ACTUAL position and the SET position.
摘要翻译：在制造具有多个镜面12和12'的分面镜24的方法中，其具有镜面15并被装配到支撑板16的接收孔22,22'中，镜面12,12' 在第一方法步骤中制成。在第二方法步骤中，至少一个镜面被安装到支撑板的相关联的接收孔中，之后将相关镜面12,12'的至少一个镜面的光轴的ACTUAL位置嵌入分别在第三步骤中确定支撑板并与预定光轴的SET位置进行比较。了解在第三方法步骤中对于至少一个镜面12,12'确定的测量值，随后在另外的方法步骤中进行镜面和/或接收孔的再处理，如果在第二方法步骤之间存在角度偏差 ACTUAL位置和SET位置。

4. 发明申请

US20070030487A1 Gas detection method and gas detection device 有权
标题翻译：气体检测方法和气体检测装置
公开(公告)号：US20070030487A1
公开(公告)日：2007-02-08
申请号：US11227477
申请日：2005-09-15
申请人： Bert Willing , Markus Kohli , Andreas Seifert
发明人： Bert Willing , Markus Kohli , Andreas Seifert
IPC分类号： G01N21/00
CPC分类号： G01N21/39 , G01J3/433 , G01N21/3504 , G01N2201/0691
摘要： The gas detector device comprises at least a VCSEL source and at least a light sensor for detecting a light beam having passed through a sample chamber containing a given gas to be detected. The detection signal of the sensor directly provided to or is time derivated by an electronic derivator and then provided to respective lock-in amplifiers in order to generate a two different 2f-detection, f being the frequency of a wavelength modulation of the source, and thus to provide two corresponding measuring signals the division of which gives a precise value of the gas concentration. The invention uses at least a first modulation reference signal at twice and a second modulation reference signal at twice of the modulation frequency of the laser source. Providing at least a first 2f modulation reference signal has advantages over the prior art, because by using such a reference modulation signal it is possible measure the absolute intensity and therefore to receive the same result at different temperatures or at mode hopping of the laser. A further advantage is that the measurement accuracy is independent from the gas concentration.
摘要翻译：气体检测器装置至少包括VCSEL源和至少一个光传感器，用于检测通过含有待检测的给定气体的样品室的光束。传感器的检测信号直接提供给电子推导器或由时间导出，然后提供给相应的锁定放大器，以产生两个不同的2f检测，f是源的波长调制频率，以及从而提供两个对应的测量信号，其分配给出了气体浓度的精确值。本发明在激光源的调制频率的两倍的两倍和第二调制参考信号下至少使用第一调制参考信号。提供至少第一2f调制参考信号具有优于现有技术的优点，因为通过使用这样的参考调制信号，可以测量绝对强度并因此在激光器的不同温度或模式跳变时接收相同的结果。另外的优点是测量精度与气体浓度无关。

5. 发明授权

US07090362B2 Facet mirror having a number of mirror facets 有权
标题翻译：面镜具有多个镜面
公开(公告)号：US07090362B2
公开(公告)日：2006-08-15
申请号：US10841846
申请日：2004-05-07
申请人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
发明人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
IPC分类号： G02B26/08 , G02B7/18
CPC分类号： G03F7/70258 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B26/0816 , G03F7/70075 , G03F7/70141 , G03F7/702 , G03F7/70275
摘要： In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.
摘要翻译：在具有多个镜面的小平面镜中，其中镜面设置有反射面，镜面通过轴承装置联合地安装在基体内。镜面包括通过表面，线或点接触在外周与轴承装置接触的镜体。小平面镜的优选使用领域是用于制造半导体元件的微光刻中的投影曝光机的投影物镜。

6. 发明授权

US08330107B2 Gas sensor and process for measuring moisture and carbon dioxide concentration 有权
标题翻译：气体传感器和测量水分和二氧化碳浓度的过程
公开(公告)号：US08330107B2
公开(公告)日：2012-12-11
申请号：US12861942
申请日：2010-08-24
申请人： Bert Willing , Markus Kohli , Andreas Seifert
发明人： Bert Willing , Markus Kohli , Andreas Seifert
IPC分类号： G01J1/00
CPC分类号： G01N21/39 , G01N21/0332 , G01N33/004 , G01N33/006 , G01N2021/158 , G01N2021/3129 , G01N2021/3144 , G01N2021/354 , G01N2021/399 , G01N2201/024 , Y02A50/244
摘要： An TDLS gas sensor with a measuring pick-up to be arranged outside of the interior chamber of an incubator or a climate chamber of similar design, and with an absorption pick-up to be arranged inside the interior chamber, and also with a window separating the measuring area and absorption area for the atmospheric separation of the laser diode from the interior chamber of the incubator, with the window being arranged at an angle to the axis of the laser beam emitted by a laser diode, and with the optronic components being arranged in a block of material in the measuring pick-up, said block being made of thermally well-conducting material and serving as heat sink, and with a heating system for the window in the measuring pick-up. In addition, a process for measuring the moisture and the carbon dioxide concentration.
摘要翻译：具有测量拾取器的TDLS气体传感器将布置在孵化器或类似设计的气候室的内部室外部，并且吸收拾取器布置在内部室内，并且还具有分隔开的窗口所述测量区域和所述激光二极管与所述培养箱的内部室大气分离的吸收区域，其中所述窗口以与激光二极管发射的激光束的轴线成一定角度布置，并且所述光电子部件被布置在测量拾取器中的一块材料中，所述块由导热材料制成并用作散热器，并且具有用于测量拾取器中的窗口的加热系统。另外，测定水分和二氧化碳浓度的方法。

7. 发明授权

US07871171B2 Focusing-device for the radiation from a light source 有权
标题翻译：用于来自光源的辐射的聚焦装置
公开(公告)号：US07871171B2
公开(公告)日：2011-01-18
申请号：US12218400
申请日：2008-07-15
申请人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
发明人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
IPC分类号： G02B5/08
CPC分类号： G03F7/70058 , G02B5/10 , G02B17/02 , G02B27/0025 , G02B27/30
摘要： A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1′) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1′) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.
摘要翻译：用于来自光源（2）的辐射的聚焦装置设置有集中器反射镜（1,1'），其被布置在安装件（24）中，并以虚拟或实际的方式从光源收集光（2）在第二焦点（200）。收集镜（1,1'）经由轴承可移动地连接到支座（24），使得即使在温度变化的情况下，它的光学特性保持至少近似相同。

8. 发明申请

US20090027677A1 METHOD AND GAS SENSOR FOR PERFORMING QUARTZ-ENHANCED PHOTOACOUSTIC SPECTROSCOPY 有权
标题翻译：方法和气体传感器，用于执行增强型光电倍增管
公开(公告)号：US20090027677A1
公开(公告)日：2009-01-29
申请号：US11970570
申请日：2008-01-08
申请人： Bert WILLING , Markus KOHLI , Andreas SEIFERT
发明人： Bert WILLING , Markus KOHLI , Andreas SEIFERT
IPC分类号： G01N21/00
CPC分类号： G01N21/1702 , G01N21/274
摘要： A method for performing quartz-enhanced photoacoustic spectroscopy of a gas, includes providing a light source configured to introduce a laser beam having at least one wavelength into the gas such said at least one molecule within in the gas is stimulated generating an acoustic signal, accumulating the acoustic signal in a resonant acoustic detector, generating a resonant absorption signal (SA) relative to the gas concentration by at least one tuning fork serving as resonant acoustic detector, generating additionally a resonant intensity signal (SI) proportional to the intensity of the laser beam travelling through the gas, and providing an output signal (SGC) from said absorption signal (SA) and said intensity signal (SI) being independent of the intensity of the light relative to the presence or concentration of the gas.
摘要翻译：一种用于执行气体的石英增强光声光谱的方法，包括提供被配置为将具有至少一个波长的激光束引入到气体中的光源，所述气体中的所述至少一个分子被激发以产生声信号，谐振声检测器中的声信号，通过用作谐振声检测器的至少一个音叉产生相对于气体浓度的谐振吸收信号（SA），产生与激光强度成比例的谐振强度信号（SI）并且提供来自所述吸收信号（SA）的输出信号（SGC）和所述强度信号（SI）的光束相对于气体的存在或浓度独立于光的强度。

9. 发明授权

US07410265B2 Focusing-device for the radiation from a light source 有权
标题翻译：用于来自光源的辐射的聚焦装置
公开(公告)号：US07410265B2
公开(公告)日：2008-08-12
申请号：US10675471
申请日：2003-09-30
申请人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer , Wilhelm Egle , Bernhard Gellrich , Bernhard Geuppert
发明人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer , Wilhelm Egle , Bernhard Gellrich , Bernhard Geuppert
IPC分类号： G02B5/08
CPC分类号： G03F7/70825 , B82Y10/00 , G02B5/10 , G02B17/02 , G02B27/0025 , G02B27/30 , G03F7/70058 , G03F7/70166 , G03F7/70175
摘要： A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1′) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1′) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.
摘要翻译：用于来自光源（2）的辐射的聚焦装置设置有集中器反射镜（1,1'），其被布置在安装件（24）中，并以虚拟或实际的方式从光源收集光（2）在第二焦点（200）。收集镜（1,1'）经由轴承可移动地连接到支座（24），使得即使在温度变化的情况下，它的光学特性保持至少近似相同。

10. 发明授权

US07183553B1 Gas detection method and gas detection device 有权
公开(公告)号：US07183553B1
公开(公告)日：2007-02-27
申请号：US11227477
申请日：2005-09-15
申请人： Bert Willing , Markus Kohli , Andreas Seifert
发明人： Bert Willing , Markus Kohli , Andreas Seifert
IPC分类号： G01J5/02
CPC分类号： G01N21/39 , G01J3/433 , G01N21/3504 , G01N2201/0691
摘要： The gas detector device comprises at least a VCSEL source and at least a light sensor for detecting a light beam having passed through a sample chamber containing a given gas to be detected. The detection signal of the sensor directly provided to or is time derivated by an electronic derivator and then provided to respective lock-in amplifiers in order to generate a two different 2f-detection, f being the frequency of a wavelength modulation of the source, and thus to provide two corresponding measuring signals the division of which gives a precise value of the gas concentration. The invention uses at least a first modulation reference signal at twice and a second modulation reference signal at twice of the modulation frequency of the laser source. Providing at least a first 2f modulation reference signal has advantages over the prior art, because by using such a reference modulation signal it is possible measure the absolute intensity and therefore to receive the same result at different temperatures or at mode hopping of the laser. A further advantage is that the measurement accuracy is independent from the gas concentration.

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