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    • 2. 发明授权
    • Practical pseudo-asynchronous filter architecture
    • 实际的伪异步过滤器架构
    • US06925478B2
    • 2005-08-02
    • US09739331
    • 2000-12-19
    • Alireza JabbariDavid P StumboMichael Sogard
    • Alireza JabbariDavid P StumboMichael Sogard
    • G01D3/028H03H17/02H03H17/06G06F17/10
    • H03H17/0294
    • A system and methods for generating a variable rate filtered output using synchronous filters having the same filter sampling time, that avoids complexities of asynchronous filters. A system employs multiple filters that are staggered in time and set so that the output of one of the multiple filters is available whenever a secondary process requires state information. In another embodiment, the synchronous filters are programmable so as to change the filter sampling time. This configuration is possible when it is known that the prescribed time interval of the secondary process is longer than the filter sampling time and the prescribed time interval is an integer multiple of the filter sampling time. By using programmable filters, the number of filters required to accommodate a certain prescribed time interval can be minimized. Whether a system employs multiple non-programmable filters staggered in time or programmable filters, the invention achieves producing a variable rate filtered output while using synchronous filters. Thus, computationally intensive and complicated variable rate filters can be avoided while minimizing processor requirements. In another aspect of the invention, the inventive method of generating a variable rate filtered output is employed in a lithography system to control the movements of various components therein. In one embodiment, the filtered outputs are used to estimate the relative positions of the reticle and the wafer. With the variable rate feature, the lithography system can dynamically accommodate for the noise arising from component movements and other sources in the wafer exposure process.
    • 使用具有相同滤波器采样时间的同步滤波器来生成可变速率滤波输出的系统和方法,避免异步滤波器的复杂性。 系统采用多个过滤器,这些过滤器在时间上交错设置,使得当辅助过程需要状态信息时,多个过滤器之一的输出可用。 在另一个实施例中,同步滤波器是可编程的,以便改变滤波器采样时间。 当已知二次处理的规定时间间隔长于滤波器采样时间并且规定的时间间隔是滤波器采样时间的整数倍时,这种配置是可能的。 通过使用可编程滤波器,可以最小化容纳特定规定时间间隔所需的滤波器数量。 无论系统采用多个在时间上交错的非可编程滤波器或可编程滤波器,本发明实现了在使用同步滤波器时产生可变速率滤波输出。 因此,可以避免计算密集型和复杂的可变速率滤波器,同时最小化处理器要求。 在本发明的另一方面,在光刻系统中采用产生可变速率滤波输出的本发明方法来控制其中各种部件的移动。 在一个实施例中,滤波的输出用于估计标线片和晶片的相对位置。 利用可变速率特征,光刻系统可以动态地适应晶片曝光过程中由元件移动引起的噪声和其他来源。
    • 3. 发明授权
    • Magnetic suspension transducer
    • 磁悬浮传感器
    • US08942409B2
    • 2015-01-27
    • US11628395
    • 2005-06-03
    • Kenneth L. KantorIoannis KanellakopoulosAlireza Jabbari
    • Kenneth L. KantorIoannis KanellakopoulosAlireza Jabbari
    • H04R25/00H04R9/02
    • H04R1/00H04R9/025H04R9/06H04R9/066H04R11/02H04R25/00H04R2209/041
    • An improved electrodynamic acoustic transducer eliminates or reduces the need for flexible or elastic materials to suspend an internal magnetic element by using both static and dynamic signal-dependent magnetic fields to control its movement. In one implementation, the transducer has a magnet that moves within a surrounding tube. This tube in turn supports one or more electromagnetic coils that generate a dynamic signal-dependent magnetic field that causes the internal magnetic element to vibrate. The surrounding tube also supports one or more magnets whose location on the tube is fixed and whose magnetic fields provide appropriate restoring forces acting on the internal magnetic element. These fixed magnets may be replaced or supplemented by ferromagnetic materials. This transducer may provide sound and infrasonic vibration by coupling the internal magnetic element to other radiating elements or by being placed in close proximity to or in actual contact with the pinna or meatus of the human ear when used in headphones or earphones, for example, and it also may provide sound through the direct vibration of the air in contact with the surface of the internal magnetic element. When direct atmospheric coupling is not required, the transducer may be assembled in a sealed enclosure.
    • 改进的电动声学换能器通过使用静态和动态信号相关磁场来控制其运动来消除或减少对柔性或弹性材料悬挂内部磁性元件的需要。 在一个实施方案中,换能器具有在周围管内移动的磁体。 该管又支持一个或多个电磁线圈,其产生导致内部磁性元件振动的动态信号相关磁场。 周围管还支撑一个或多个磁体,其位于管上的位置是固定的,并且其磁场提供作用在内部磁性元件上的合适的恢复力。 这些固定磁体可以被铁磁材料代替或补充。 该传感器可以通过将内部磁性元件耦合到其它辐射元件或者当用于耳机或耳机时被放置在与人耳的耳廓或耳道紧密接触或实际接触的位置时,提供声音和次声振动,例如, 也可以通过与内部磁性元件的表面接触的空气的直接振动来提供声音。 当不需要直接大气耦合时,传感器可以组装在密封的外壳中。
    • 5. 发明申请
    • Magnetic Suspension Transducer
    • 磁悬浮传感器
    • US20080075319A1
    • 2008-03-27
    • US11628395
    • 2005-06-03
    • Kenneth KantorIoannis KanellakopoulosAlireza Jabbari
    • Kenneth KantorIoannis KanellakopoulosAlireza Jabbari
    • H04R9/06H04R11/02H04R1/00
    • H04R1/00H04R9/025H04R9/06H04R9/066H04R11/02H04R25/00H04R2209/041
    • An improved electrodynamic acoustic transducer eliminates or reduces the need for flexible or elastic materials to suspend an internal magnetic element by using both static and dynamic signal-dependent magnetic fields to control its movement. In one implementation, the transducer has a magnet that moves within a surrounding tube. This tube in turn supports one or more electromagnetic coils that generate a dynamic signal-dependent magnetic field that causes the internal magnetic element to vibrate. The surrounding tube also supports one or more magnets whose location on the tube is fixed and whose magnetic fields provide appropriate restoring forces acting on the internal magnetic element. These fixed magnets may be replaced or supplemented by ferromagnetic materials. This transducer may provide sound and infrasonic vibration by coupling the internal magnetic element to other radiating elements or by being placed in close proximity to or in actual contact with the pinna or meatus of the human ear when used in headphones or earphones, for example, and it also may provide sound through the direct vibration of the air in contact with the surface of the internal magnetic element. When direct atmospheric coupling is not required, the transducer may be assembled in a sealed enclosure.
    • 改进的电动声学换能器通过使用静态和动态信号相关磁场来控制其运动来消除或减少对柔性或弹性材料悬挂内部磁性元件的需要。 在一个实施方案中,换能器具有在周围管内移动的磁体。 该管又支持一个或多个电磁线圈,其产生导致内部磁性元件振动的动态信号相关磁场。 周围管还支撑一个或多个磁体,其位于管上的位置是固定的,并且其磁场提供作用在内部磁性元件上的合适的恢复力。 这些固定磁体可以被铁磁材料代替或补充。 该传感器可以通过将内部磁性元件耦合到其它辐射元件或者当用于耳机或耳机时被放置在与人耳的耳廓或耳道紧密接触或实际接触的位置时,提供声音和次声振动,例如, 也可以通过与内部磁性元件的表面接触的空气的直接振动来提供声音。 当不需要直接大气耦合时,传感器可以组装在密封的外壳中。