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1. 发明授权

US06429783B1 Apparatus for indicating operational status of semiconductor fabrication equipment 失效
标题翻译：用于指示半导体制造设备的操作状态的装置
公开(公告)号：US06429783B1
公开(公告)日：2002-08-06
申请号：US09362637
申请日：1999-07-26
申请人： Jose Carlos Reyes , Michael McCarthy , Joanna Ramirez , Alfredo Garcia, Jr. , Kelvinoge Morrissette , Donald K. Friede
发明人： Jose Carlos Reyes , Michael McCarthy , Joanna Ramirez , Alfredo Garcia, Jr. , Kelvinoge Morrissette , Donald K. Friede
IPC分类号： G08B500
CPC分类号： G08B5/36
摘要： An apparatus and method for indicating the operational status of equipment (“tools”) used in semiconductor fabrication is provided. In one embodiment, the operational status of a tool is indicated by a mechanical sign attached to the tool. The sign contains indications of multiple operational statuses of the tool. The current operational status is indicated by covering the other possible operational statuses. The sign is constructed of materials that are compatible with the semiconductor fabrication environment. In a second embodiment, the operational status of a tool is indicated by illuminating a light. Lights for indicating possible operational statuses of the tool are attached to the tool. The lights may by illuminated by depressing a switch. Alternatively, the illumination of the lights may be controlled by a computer that also controls the operation of the tool. The computer may also cause an indication of the tool's operational status to be indicated on a monitor attached to the tool. An indication of a scheduled change in the tool's operational status may be indicated by flashing an appropriate light on and off at some predetermined time before the change occurs.
摘要翻译：提供了一种用于指示在半导体制造中使用的设备（“工具”）的操作状态的装置和方法。在一个实施例中，工具的操作状态由附接到工具的机械标记表示。该符号包含该工具的多种操作状态的指示。当前的运行状态通过覆盖其他可能的运行状态来指示。符号由与半导体制造环境兼容的材料构成。在第二实施例中，通过照亮光来指示工具的操作状态。用于指示工具可能的操作状态的指示灯附在工具上。可以通过按下开关来点亮灯。或者，灯的照明可以由也控制工具的操作的计算机来控制。计算机还可能会在连接到工具的显示器上指示工具的操作状态。可以通过在变化发生之前的某个预定时间闪烁适当的光来指示工具的操作状态的预定更改的指示。

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