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    • 1. 发明授权
    • Accelerometer without proof mass
    • 加速度计无质量
    • US06182509B2
    • 2001-02-06
    • US09177439
    • 1998-10-21
    • Albert M. Leung
    • Albert M. Leung
    • G01P1500
    • G01F1/6845G01P15/00G01P15/008G01P15/0802G01P15/12G01P15/18G01P21/00
    • An accelerometer having a substrate with a cavity therein, a heater extending over the cavity, a pair of temperature sensitive elements extending over the cavity equidistant from the heater, and an electrical conductor couplable to an external power source and operative to pass electrical current through the heater so as to develop a symmetrical temperature gradient in the fluid extending outwardly from the heater to the two temperature sensors. The fluid may be a liquid or a gas surrounding the heater and temperature sensors. Applied acceleration disturbs this symmetry and produces a differential temperature between the two temperature sensors proportional to the acceleration.
    • 一种加速度计,其具有其中具有空腔的基底,在空腔上延伸的加热器,在与加热器等距的空腔上延伸的一对温度敏感元件,以及可连接到外部电源并用于使电流通过 以便在从加热器向外延伸到两个温度传感器的流体中产生对称的温度梯度。 流体可以是围绕加热器和温度传感器的液体或气体。 施加的加速度会扰乱该对称性,并在两个温度传感器之间产生与加速度成比例的差分温度。
    • 6. 发明授权
    • Pressure telemetry implant
    • 压力遥测植入
    • US4519401A
    • 1985-05-28
    • US534094
    • 1983-09-20
    • Wen H. KoAlbert M. Leung
    • Wen H. KoAlbert M. Leung
    • A61B5/00A61B5/03G01L9/00G01L9/06
    • G01L19/148A61B5/031G01L19/147G01L9/065A61B5/0031Y10S128/903
    • An implantable intracranial pressure (ICP) telemetry transmitter. Data transmission is accomplished by means of a radio frequency (RF) link coupled to a silicon piezoresistive pressure transducer. Electrostatic bonding of this transducer onto a tubular glass support provides long-term stability, stress isolation and a hermetic package. Because of the large temperature coefficient of the electrostatically bonded pressure transducer (-6 to -9 mm Hg/.degree.C.), a temperature sensor is added to allow temperature compensation to be carried out. Pulse code modulation is employed to assure accurate data transmission. Use of low duty cycle pulse powering techniques lowers the power consumption of the telemeter. The complexity of the electronics is reduced by the use of a custom integrated circuit. Two lithium batteries can provide more than one month of continuous operation and an RF command receiver provides ON/Off control of the telemeter to extend the lifetime of the telemeter.
    • 可植入颅内压(ICP)遥测发射器。 通过耦合到硅压阻式压力传感器的射频(RF)链路实现数据传输。 该传感器与管状玻璃支架的静电粘合提供长期的稳定性,应力隔离和气密封装。 由于静电压力传感器(-6〜-9 mm Hg /℃)的温度系数较大,因此加入温度传感器可进行温度补偿。 采用脉码调制来保证数据传输的准确性。 使用低占空比脉冲供电技术降低了遥测仪的功耗。 通过使用定制的集成电路来减少电子设备的复杂性。 两个锂电池可以提供一个多月的连续操作,并且RF指令接收器提供遥测仪的ON / OFF控制,以延长遥测仪的使用寿命。
    • 7. 发明申请
    • ROTATION SENSING APPARATUS AND METHODS
    • 旋转感应装置及方法
    • US20110011181A1
    • 2011-01-20
    • US12837229
    • 2010-07-15
    • Albert M. Leung
    • Albert M. Leung
    • G01P9/00
    • G01P9/00G01P15/008
    • Angular rate sensors cause a stream of fluid to flow by heating the fluid. A trajectory of the stream of fluid is deflected by Coriolis forces. Apparatus according to some embodiments provides two heaters spaced apart along a channel. A stream of gas can be made to flow along the channel by operating one of the heaters. The flow can be periodically reversed by alternating operation of the heaters. Temperature sensors may be applied to detect deflection of the flowing gas. Angular rate sensors may be fabricated inexpensively by micromachining techniques.
    • 角速率传感器通过加热流体导致流体流动。 流体流的轨迹被科里奥利力所偏转。 根据一些实施例的装置提供沿着通道间隔开的两个加热器。 可以通过操作其中一个加热器,使气流沿通道流动。 可以通过加热器的交替操作来定期地逆流。 可以应用温度传感器来检测流动气体的偏转。 角速率传感器可以通过微加工技术廉价地制造。
    • 8. 发明授权
    • Gas pressure sensor based on short-distance heat conduction and method for fabricating same
    • 基于短距离热传导的气体压力传感器及其制造方法
    • US06860153B2
    • 2005-03-01
    • US09788437
    • 2001-02-21
    • Albert M. Leung
    • Albert M. Leung
    • G01L11/00G01L21/10G01L19/04
    • G01L21/10G01L11/002
    • A thermal pressure sensor monitors pressure by measuring effects caused by variations of thermal conductivity between a member and a substrate to which the member is adhered by stiction. The interface between the member and the substrate behaves as an extremely narrow gap. In a preferred embodiment the member is a bridge extending between a pair of cantilever arms. Two pressure sensors may be combined in a Wheatstone bridge configuration. A method for fabricating a pressure sensor according to the invention comprises forming a layer of oxide on a substrate, depositing a layer of material on the oxide layer, forming the member from the layer of material, removing the oxide layer and then bringing the member into contact with the substrate. The portion of the substrate under the member may be patterned with plateaus and valleys.
    • 热压传感器通过测量由构件与粘结构件所附着的基板之间的导热性变化而产生的影响来监测压力。 构件和衬底之间的界面表现为极窄的间隙。 在优选实施例中,构件是在一对悬臂之间延伸的桥。 两个压力传感器可以组合在惠斯通电桥配置中。 根据本发明的制造压力传感器的方法包括在衬底上形成氧化物层,在氧化物层上沉积材料层,从材料层形成构件,除去氧化物层,然后使构件进入 与基板接触。 该部件下面的基底部分可以形成平坦的和谷底。