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    • 6. 发明授权
    • Method for fabricating semiconductor device
    • 制造半导体器件的方法
    • US08034693B2
    • 2011-10-11
    • US12493673
    • 2009-06-29
    • Junichi ShibataTakeshi HaradaAkira Ueki
    • Junichi ShibataTakeshi HaradaAkira Ueki
    • H01L21/678
    • H01L21/76816H01L21/7682H01L23/5222H01L2924/0002H01L2924/00
    • A method for fabricating a semiconductor device includes the steps of forming an insulating film on a semiconductor substrate, forming a plurality of wiring trenches in the insulating film, forming a plurality of wirings in the plurality of wiring trenches, forming a resist mask having an opening for selectively exposing one of regions between the plurality of wirings, on the insulating film and the plurality of wirings, forming an air gap trench by removing the insulating film from the selectively exposed one of the regions between the plurality of wirings by etching using the resist mask, and forming an air gap in the air gap trench by depositing an inter-layer insulating film over the plurality of wirings after removal of the resist mask.
    • 一种制造半导体器件的方法包括以下步骤:在半导体衬底上形成绝缘膜,在绝缘膜中形成多个布线沟槽,在多个布线沟槽中形成多个布线,形成具有开口的抗蚀剂掩模 用于选择性地暴露多个布线中的一个区域,在绝缘膜和多个布线之间,通过使用抗蚀剂通过蚀刻从多个布线中的选择性暴露的一个区域中去除绝缘膜而形成气隙沟槽 掩模,并且在除去抗蚀剂掩模之后,在多个布线之间沉积层间绝缘膜,在气隙沟槽中形成气隙。
    • 7. 发明申请
    • METHOD OF MANUFACTURING A VIBRATION ISOLATOR
    • 制造振动隔离器的方法
    • US20110192030A1
    • 2011-08-11
    • US13123379
    • 2009-10-28
    • Akira Ueki
    • Akira Ueki
    • B23P15/00
    • F16F13/103F16F2230/06Y10T29/49615
    • The present invention relates to a method of manufacturing a vibration isolator (10), wherein in a sealing step in which a liquid mixture is sealed inside the interior of a first mounting component (11) in a vibration isolator main body (21), after the internal pressure inside the first mounting component (11) has been changed to a negative pressure which is equal to or greater than the vapor pressure of a first liquid (L1) which has the lower vapor pressure from among the first liquid (L1) and a second liquid (L2), the first liquid (L1) is injected into the interior of the first mounting component (11) so as to raise the internal pressure thereof, and, thereafter, the second liquid (L2) is injected into the interior of the first mounting component (11). According to the present invention, when a liquid mixture which contains a plurality of types of liquid which each have mutually different vapor pressures is sealed inside the first mounting component, it is possible to accurately and with superior reproducibility seal desired quantities of each of the plurality of types of liquid and at the same time prevent air from being retained inside the first mounting component (11).
    • 本发明涉及一种制造隔振器(10)的方法,其中在密封步骤中,在隔离器主体(21)中的第一安装部件(11)的内部密封有液体混合物,之后 第一安装部件(11)内部的内部压力已经变为等于或大于第一液体(L1)和第二液体(L1)中具有较低蒸气压的第一液体(L1)的蒸气压的负压 第二液体(L2),将第一液体(L1)注入到第一安装部件(11)的内部,以提高其内部压力,然后将第二液体(L2)注入内部 的第一安装部件(11)。 根据本发明,当在第一安装部件内密封含有各种具有相互不同蒸气压的多种液体的液体混合物时,可以精确地且以优异的再现性密封多个的每一个的所需量 的液体,同时防止空气保持在第一安装部件(11)内。
    • 10. 发明申请
    • Vibration isolator
    • 隔振器
    • US20090008195A1
    • 2009-01-08
    • US11991476
    • 2006-09-06
    • Akira Ueki
    • Akira Ueki
    • F16F13/10
    • F16F13/105B60K5/1208
    • There is provided a vibration isolator in which a restriction passage for causing a main fluid chamber and a sub-fluid chamber to communicate with each other is changed over to one of a first restriction passage and a second restriction passage according to a change in the frequency of vibrations in a short period of time, and the size of the isolator is made small efficiently. A plunger member 78 closes an orifice opening 74 when being moved to a closing position against the urging force of a coil spring 90 by the fluid pressure in a pressurization space 130, and opens the orifice opening 74 when being returned to an opening position by the urging force of the coil spring 90. For the orifice opening 74, the opening ratio R between the transverse opening width along the axial direction and the longitudinal opening width along the circumferential direction is set in the range of 2≦R≦25, further preferably 5≦R≦20. Thereby, the longitudinal opening width can be made sufficiently small while an opening area necessary for the orifice opening 74 is secured. Therefore, the distance between the opening position and the closing position of the plunger member 78 can be shortened according to the longitudinal opening width.
    • 提供了一种隔振器,其中使主流体室和副流体室彼此连通的限制通道根据频率的变化而转换为第一限制通道和第二限制通道中的一个 在短时间内产生振动,并且隔离器的尺寸被有效地降低。 当通过加压空间130中的流体压力克服螺旋弹簧90的作用力移动到关闭位置时,柱塞构件78闭合孔口74,并且当通过所述孔口74返回至打开位置时打开孔口74 对于孔口74,沿着轴向的横向开口宽度和沿圆周方向的纵向开口宽度之间的开口率R设定在2≤R≤25的范围内, 进一步优选5≤R≤20。 由此,能够确保纵向开口宽度足够小,同时确保孔口74所需的开口面积。 因此,可以根据纵向开口宽度缩短柱塞构件78的打开位置和关闭位置之间的距离。