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1. 发明授权

US4209702A Multiple electron lens 失效
标题翻译：多电子透镜
公开(公告)号：US4209702A
公开(公告)日：1980-06-24
申请号：US924249
申请日：1978-07-13
申请人： Shogo Shirai , Akira Onoguchi
发明人： Shogo Shirai , Akira Onoguchi
IPC分类号： H01J3/22 , H01J37/141 , H01J37/317 , H01L21/027 , G21K1/08
CPC分类号： B82Y10/00 , B82Y40/00 , H01J3/22 , H01J37/141 , H01J37/3177
摘要： A multiple electron lens having two axially spaced polepieces defining a space therebetween. The polepieces each have a plurality of axial through openings aligned coaxially defining electron beam paths. A sole anode plate is disposed axially spaced from the polepieces and has openings aligned with the openings defining the beam paths and equal in number thereto. Each beam path has an auxiliary exciting coil and a corresponding stigmator coaxially arranged with the related beam path within the space defined between the polepieces.
摘要翻译：具有两个轴向间隔开的极片的多电子透镜在其间限定空间。每个极杆都具有同轴地限定电子束路径的多个轴向通孔。单独的阳极板与杆头轴向间隔设置并且具有与限定射束路径并且数量相等的开口对齐的开口。每个光束路径具有辅助激励线圈和相应的标示器，其中相关的光束路径同轴地布置在限定在极点之间的空间内。

2. 发明授权

US4460827A Scanning electron microscope or similar equipment with tiltable microscope column 失效
标题翻译：扫描电子显微镜或类似设备可倾斜显微镜柱
公开(公告)号：US4460827A
公开(公告)日：1984-07-17
申请号：US337101
申请日：1982-01-05
申请人： Akira Onoguchi , Shigetomo Yamazaki
发明人： Akira Onoguchi , Shigetomo Yamazaki
IPC分类号： H01J37/16 , H01J37/28 , H01J37/00
CPC分类号： H01J37/28 , H01J2237/0245
摘要： The specification describes a scanning electron microscope or similar equipment having a tiltable microscope column so as to observe a specimen at different angles without inclining the specimen. In order to make the microscope column tiltable relative to its specimen chamber, an opening is formed through a wall portion of the specimen chamber. The opening is covered up by a movable cover. A lower portion of the microscope column extends through the cover into the specimen chamber. A sealing member is provided so as to surround the opening between the wall portion and cover to ensure the hermetic sealing therebetween. Since the microscope is tilted instead of inclining the specimen stage to obtain images of the specimen seen at different angles, the specimen stage can be simplified in both structure and mechanism. The specimen stage is thus kept stationary, resulting in a complete solution to vibrations caused by conventional specimen stages and in a substantial improvement to the resolution of scanning electron microscope and similar equipment.
摘要翻译：本说明书描述了具有可倾斜显微镜柱的扫描电子显微镜或类似设备，以便在不倾斜样品的情况下以不同的角度观察样品。为了使显微镜柱相对于其试样室倾斜，通过试样室的壁部形成开口。开口由可动盖覆盖。显微镜柱的下部延伸穿过盖进入样品室。密封构件设置成围绕壁部和盖之间的开口，以确保其间的密封。由于显微镜倾斜而不是倾斜试样台，以获得不同角度看到的试样的图像，因此可以在结构和机理两者中简化样品台。因此，样品台保持静止，导致对常规样品台引起的振动的完全解决，并且对扫描电子显微镜和类似设备的分辨率有显着改善。

3. 发明申请

US20130009070A1 ELECTROSTATIC LENS FOR CHARGED PARTICLE RADIATION 有权
标题翻译：用于充电颗粒辐射的静电镜
公开(公告)号：US20130009070A1
公开(公告)日：2013-01-10
申请号：US12934966
申请日：2009-03-23
申请人： Akira Onoguchi , Kyoko Onoguchi , Kenichi Obori , Koichi Matsumoto , Shogo Awata , Satoshi Ohashi
发明人： Akira Onoguchi , Kyoko Onoguchi , Kenichi Obori , Koichi Matsumoto , Shogo Awata , Satoshi Ohashi
IPC分类号： H01J3/18
CPC分类号： H01J37/12 , H01J2237/121 , H01J2237/28
摘要： Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.
摘要翻译：提供一种用于带电粒子辐射的静电透镜，其具有与磁性透镜相当的透镜性能。布置在带电粒子的入射侧的多个电极形成第一电场区域，其中带电粒子的轨道半径减小而不超过在入射时为轨道半径的初始轨道半径，第二电场区域，其中在与中心轴平行的方向上的力施加到已经通过第一电场区域的带电粒子。布置在投影侧的多个电极形成第三电场区域，其中带电粒子的轨道半径在途中不超过初始轨道半径，并且弯曲成与中心轴相交，角度大于所定义的轨道角度相对于带电粒子从第二电场区域突出时的中心轴线。

4. 发明授权

US6052431A X-ray converging mirror for an energy-dispersive fluorescent X-ray system 失效
标题翻译：用于能量色散荧光X射线系统的X射线会聚镜
公开(公告)号：US6052431A
公开(公告)日：2000-04-18
申请号：US92199
申请日：1998-06-05
申请人： Akira Onoguchi , Kozo Kashihara
发明人： Akira Onoguchi , Kozo Kashihara
IPC分类号： G21K1/06
CPC分类号： G21K1/06
摘要： An X-ray converging mirror that can be positioned adjacent an X-ray source for reflecting X-ray beams from the X-ray source includes an X-ray converging mirror having a reflecting surface of a cross-sectional profile expressed by a curve of the following equation:x=y tan .theta.[1-ln(y/b)]wherein x and y denote a coordinate system, .theta. is equal to or less than a Bragg critical angle of reflection for the X-ray beams, and b denotes a point on the y-axis when dx/dy is 0.
摘要翻译：可以与X射线源相邻的用于反射来自X射线源的X射线束的X射线会聚反射镜包括X射线会聚反射镜，该X射线会聚反射镜具有由以下等式：x = ytanθ[1-ln（y / b）]其中x和y表示坐标系，θ等于或小于针对X射线束的布拉格临界反射角，b 表示当dx / dy为0时y轴上的点。

5. 发明授权

US4420686A Scanning electron microscope or similar equipment capable of displaying simultaneously a plurality of images of specimen 失效
标题翻译：扫描电子显微镜或能够同时显示多个样本图像的类似设备
公开(公告)号：US4420686A
公开(公告)日：1983-12-13
申请号：US327163
申请日：1981-12-03
申请人： Akira Onoguchi , Mitsuhisa Miyazawa , Shigetomo Yamazaki , Masahiro Inoue
发明人： Akira Onoguchi , Mitsuhisa Miyazawa , Shigetomo Yamazaki , Masahiro Inoue
IPC分类号： H01J37/22 , H01J37/244 , H01J37/28 , G01N23/00 , G21K7/00
CPC分类号： H01J37/28
摘要： The specification describes a scanning electron microscope or similar equipment capable of irradiating a plurality of beams of charged particles onto a specimen and displaying simultaneously the plurality of images of the specimen. It comprises charged particle beam modulation means to modulate the intensities of the beams of charged particles through their deflection by different frequencies, a detector capable of detecting secondary electrons or the like given off from the specimen, demodulation selector means capable of demodulating signals from the detector and selecting each specimen image signal, and display means capable of displaying the plurality of images of the specimen. The plurality of beams may be irradiated in parallel onto different spots on the specimen or may be directed to one specific spot on the specimen. Thus, a plurality of specimen images can be displayed extremely efficiently and, also, simultaneously by simple means.
摘要翻译：该说明书描述了能够将多个带电粒子束照射到样本上并同时显示样本的多个图像的扫描电子显微镜或类似设备。它包括带电粒子束调制装置，用于通过不同频率的偏转来调制带电粒子束的强度，能够检测从试样发出的二次电子等的检测器;能够解调来自检测器的信号的解调选择装置并选择每个样本图像信号，以及能够显示样本的多个图像的显示装置。多个光束可以平行地照射在样本上的不同点上，或者可以被引导到样本上的一个特定点。因此，可以非常有效地显示多个标本图像，并且也可以通过简单的手段同时显示。

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