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    • 7. 发明申请
    • MAGNETIC SENSOR AND PRODUCTION METHOD THEREOF
    • 磁传感器及其生产方法
    • US20090015251A1
    • 2009-01-15
    • US12137902
    • 2008-06-12
    • Junichi AZUMIFutoyoshi KouAkihiro Fuse
    • Junichi AZUMIFutoyoshi KouAkihiro Fuse
    • G01R33/09G01R3/00
    • G01R33/093B82Y25/00Y10T29/49002
    • A magnetic sensor is disclosed that has plural axes at the same time, able to be fabricated in a small number of steps. The magnetic sensor includes a substrate; and plural sensor bridge circuits each including a pair of magnetic field detectors and a pair of fixed resistors on the substrate, the pair of the magnetic field detectors and the pair of the fixed resistors being connected to form a bridge circuit, each of the magnetic field detectors being formed of a magneto-resistance effect element, and magnetization directions of the magnetic field detectors intersect with each other in a three-dimensional manner. The substrate has plural inclined surfaces, normal directions of the inclined surfaces intersect with each other in a three-dimensional manner, and the pair of the magnetic field detectors in each of the sensor bridge circuits is arranged on the same inclined surface.
    • 公开了一种磁传感器,其同时具有多个轴,能够以少量的步骤制造。 磁传感器包括基板; 以及多个传感器桥接电路,每个包括一对磁场检测器和一对固定电阻器,所述一对磁场检测器和一对固定电阻器被连接以形成桥接电路,每个磁场 检测器由磁阻效应元件形成,并且磁场检测器的磁化方向以三维方式彼此相交。 基板具有多个倾斜面,倾斜面的法线方向以三维方式相交,并且每个传感器桥接电路中的一对磁场检测器配置在同一倾斜面上。