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1. 发明申请

WO2012126006A1 SYSTEMS AND METHODS FOR CHARGING SOLAR CELL LAYERS 审中-公开
标题翻译：用于充电太阳能电池层的系统和方法
公开(公告)号：WO2012126006A1
公开(公告)日：2012-09-20
申请号：PCT/US2012/029688
申请日：2012-03-19
申请人： AMTECH SYSTEMS, INC. , HWANG, James-Mo
发明人： HWANG, James-Mo
IPC分类号： H01L31/18 , H01L31/0216 , C23C16/509 , H01J37/32
CPC分类号： H01L31/18 , H01J37/32082 , H01J37/32174 , H01J37/32577 , H01L31/02167 , H01L31/02168 , H01L31/068 , H01L31/1868 , Y02E10/547 , Y02P70/521
摘要： Systems and methods of the present invention can be used to charge a charge-holding layer (such as a passivation layer and/or antireflective layer) of a solar cell with a positive or negative charge as desired. The charge-holding layer(s) of such a cell can include any suitable dielectric material capable of holding either a negative or a positive charge, and can be charged at any suitable point during manufacture of the cell, including during or after deposition of the passivation layer(s). A method according to one aspect of the invention includes disposing a solar cell in electrical communication with an electrode inside a chamber. The solar cell includes an emitter, a base, a first passivation layer adjacent the emitter, and a second passivation layer adjacent the base. Gas is injected into the chamber and a plasma (with photons having an energy level of at least about 3.1 eV) is generated using the gas. One or more of the first passivation layer and the second passivation layer is charged to a predetermined polarity, wherein the charging includes applying a direct current voltage pulse to the electrode for a predetermined period of time.
摘要翻译：本发明的系统和方法可用于根据需要对正电荷或负电荷对太阳能电池的电荷保持层（例如钝化层和/或抗反射层）进行充电。这种电池的电荷保持层可以包括能够保持负电荷或正电荷的任何合适的电介质材料，并且可以在电池的制造过程中的任何合适的点被充电，包括在沉积钝化层。根据本发明的一个方面的方法包括设置与室内的电极电连通的太阳能电池。太阳能电池包括发射极，基极，与发射极相邻的第一钝化层以及邻近基极的第二钝化层。将气体注入室中，并使用气体产生等离子体（具有至少约3.1eV的能级的光子）。第一钝化层和第二钝化层中的一个或多个被充电至预定极性，其中充电包括在电极上施加直流电压脉冲预定时间段。

2. 发明申请

WO2011156560A1 SOLAR CELL SILICON WAFER PROCESS 审中-公开
标题翻译：太阳能电池硅膜工艺
公开(公告)号：WO2011156560A1
公开(公告)日：2011-12-15
申请号：PCT/US2011/039734
申请日：2011-06-09
申请人： AMTECH SYSTEMS, INC. , RHIEU, Jihyo, M.
发明人： RHIEU, Jihyo, M.
IPC分类号： H01L21/306
CPC分类号： H01L31/186 , H01L31/068 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： In the production of silicon solar cells wherein the process includes a dopant diffusion to form a pn junction, a back surface field layer, or a front surface field layer, resulting in the formation of a doped glass surface, a HF vapor etch is utilized to remove the doped glass layer and expose the wafer surface. The exposed surface is subjected to an oxygen treatment for predetermined times and temperatures to alter the surface state. The HF vapor etch followed by the oxygen treatment, or chemical oxidation, results in significant improvement in solar cell electrical properties.
摘要翻译：在硅太阳能电池的生产中，其中该工艺包括掺杂剂扩散以形成pn结，背表面场层或前表面场层，导致形成掺杂的玻璃表面，利用HF蒸气蚀刻去除掺杂的玻璃层并暴露晶片表面。对暴露的表面进行预定时间和温度的氧处理以改变表面状态。 HF气相蚀刻后进行氧处理或化学氧化，导致太阳能电池电性能的显着改善。

3. 发明授权

US09520531B2 Systems and methods for depositing and charging solar cell layers 有权
标题翻译：太阳能电池层沉积和充电的系统和方法
公开(公告)号：US09520531B2
公开(公告)日：2016-12-13
申请号：US13954099
申请日：2013-07-30
申请人： Amtech Systems, Inc.
发明人： Jeong-Mo Hwang
IPC分类号： H01L31/18 , H01J37/32 , H01L31/0216 , H01L31/068
CPC分类号： H01L31/1868 , H01J37/32082 , H01J37/32146 , H01J37/32706 , H01L31/02167 , H01L31/02168 , H01L31/068 , Y02E10/547 , Y02P70/521
摘要： Systems and methods of the present invention may be used to charge a layer (such as a passivation layer and/or antireflective layer) of a solar cell (e.g., wafer) with a positive or negative charge. The layer may retain the charge to improve operation of the solar cell. The charged layer may include any suitable dielectric material capable of retaining either a negative or a positive charge. Systems and methods of the present invention permit in-situ charging of a layer. Charging of a layer may be accomplished during or after deposition of the layer including after completing the whole solar cell process, in other words, on a finished cell.
摘要翻译：本发明的系统和方法可以用于以正电荷或负电荷对太阳能电池（例如，晶片）的层（例如钝化层和/或抗反射层）进行充电。该层可以保持电荷以改善太阳能电池的运行。带电层可以包括能够保持负电荷或正电荷的任何合适的电介质材料。本发明的系统和方法允许层的原位充电。可以在层的沉积期间或之后完成层的充电，包括在完成整个太阳能电池处理之后，换句话说，在成品电池上。

4. 发明申请

US20140057386A1 Systems and Methods for Depositing and Charging Solar Cell Layers 有权
公开(公告)号：US20140057386A1
公开(公告)日：2014-02-27
申请号：US13954099
申请日：2013-07-30
申请人： Amtech Systems, Inc.
发明人： Jeong-Mo Hwang
IPC分类号： H01L31/18
CPC分类号： H01L31/1868 , H01J37/32082 , H01J37/32146 , H01J37/32706 , H01L31/02167 , H01L31/02168 , H01L31/068 , Y02E10/547 , Y02P70/521
摘要： Systems and methods of the present invention may be used to charge a layer (such as a passivation layer and/or antireflective layer) of a solar cell (e.g., wafer) with a positive or negative charge. The layer may retain the charge to improve operation of the solar cell. The charged layer may include any suitable dielectric material capable of retaining either a negative or a positive charge. Systems and methods of the present invention permit in-situ charging of a layer. Charging of a layer may be accomplished during or after deposition of the layer including after completing the whole solar cell process, in other words, on a finished cell.

5. 发明申请

US20020154970A1 Wafer boat elevator system and method 有权
标题翻译：晶圆船电梯系统及方法
公开(公告)号：US20020154970A1
公开(公告)日：2002-10-24
申请号：US09859567
申请日：2001-05-16
申请人： Amtech Systems, Inc.
发明人： John M. Martin , Arthur W. Harrison , Allen D. Edwards
IPC分类号： B65G049/07
CPC分类号： H01L21/67098 , H01L21/67766
摘要： An apparatus for assisting the loading of a plurality of wafer boats into a multi-level wafer boat loading system (1) includes a vertical elevator mechanism (10) attached to the wafer boat loading system (1). A vertically movable horizontal wafer boat platform (181B) is attached to a vertically movable carriage (31) included in the elevator mechanism and vertically movable along a linear track (30 therein. A control system (25) associated with the vertical elevator mechanism includes a processor for executing a stored program which stores information representing a plurality of elevation levels the plurality of cantilever paddles (5), respectively, and which responds to a selection signal corresponding to manual selection of one of the elevator levels to control a drive mechanism (22,27) which moves the wafer boat support platform (18B) from an initial position to the selected elevator level. Each of a plurality of heat shield devices (50) includes a heat reflector plate (51) that is movable in response to a controller (75) to advance the heat reflector plate (51) in front of a scavenger opening to prevent excessive heating in the boat loading region during wafer boat loading/unloading operations.
摘要翻译：用于辅助将多个晶片舟装载到多级晶片舟装载系统（1）中的装置包括附接到晶片舟装载系统（1）的垂直升降机构（10）。垂直移动的水平晶片舟形平台（181B）安装在电梯机构中的可垂直移动的托架（31）上，并可沿着线性轨道（30）垂直移动，与垂直升降机构相关的控制系统（25）处理器，用于执行分别存储表示多个悬臂桨叶（5）的多个高度水平的信息的存储程序，并且响应于对应于手动选择一个电梯级别的选择信号来控制驱动机构（22 ，27），其将所述晶片舟状支撑平台（18B）从初始位置移动到所选择的升降机水平，多个隔热装置（50）中的每一个包括热反射板（51），其可响应于控制器（75），以在散热器开口前方推进热反射板（51），以防止在晶片舟装载/卸载操作期间在船装载区域中的过度加热 ations

6. 发明申请

US20150021389A1 VEHICLE TOLLING SYSTEM WITH OCCUPANCY DETECTION 审中-公开
标题翻译：具有检测功能的车辆翻转系统
公开(公告)号：US20150021389A1
公开(公告)日：2015-01-22
申请号：US14336510
申请日：2014-07-21
申请人： Amtech Systems, Inc
发明人： Kelly Gravelle
IPC分类号： G06Q50/30 , G06Q20/10 , G06K17/00
CPC分类号： G06Q50/30 , G06Q2240/00 , G07B15/063
摘要： A system is disclosed for assessing roadway toll charges based on vehicle occupancy level based on occupants each having an electronic fob with a unique indentifier. The system includes: a vehicle-mounted RFID fob reader; a plurality of RFID fobs; an RFID toll tag associated with the vehicle; an RFID toll tag interrogator located at a tolling point; and a fob reader interrogator located at the tolling point. Each fob is associated with a vehicle occupant and the RFID fob reader interrogates the fobs to determine the number of fobs in the vehicle and thus determine vehicle occupancy. A method for assessing charges based on this system is also disclosed.
摘要翻译：公开了一种用于基于车辆占用水平来评估道路收费费用的系统，其基于每个具有独特的识别器的电子货架的乘客。该系统包括：车载RFID手写阅读器; 多个RFID Fobs; 与车辆相关联的RFID收费标签; 位于收费点的RFID收费标签询问器; 以及位于收费点的收音机阅读器询问器。每个FOB与车辆乘员相关联，并且RFID Fob阅读器询问货架以确定车辆中的货架数量，从而确定车辆占用。还公开了一种基于该系统评估费用的方法。

7. 发明申请

US20140150850A1 SOLAR CELL COATING 审中-公开
标题翻译：太阳能电池涂料
公开(公告)号：US20140150850A1
公开(公告)日：2014-06-05
申请号：US13690954
申请日：2012-11-30
申请人： AMTECH SYSTEMS, INC.
发明人： Jeong-Mo Hwang
IPC分类号： H01L31/048
CPC分类号： H01L31/048 , F24S25/20 , F24S80/52 , H02S40/10 , Y02E10/40 , Y02E10/50
摘要： Embodiments of the present invention help prevent Potential-Induced Degradation (PID) in solar cell modules. A solar cell module according to one embodiment of the present invention comprises a glass sheet, a frame covering at least a portion of the glass sheet, a plurality of solar cells at least partially covered by the glass sheet, and a hydrophobic coating covering at least a portion of the frame and at least a portion of the glass sheet.
摘要翻译：本发明的实施例有助于防止太阳能电池模块中的电位降低（PID）。根据本发明的一个实施例的太阳能电池模块包括玻璃板，覆盖玻璃板的至少一部分的框架，至少部分地被玻璃板覆盖的多个太阳能电池以及至少覆盖的疏水涂层框架的一部分和玻璃板的至少一部分。

8. 发明申请

US20140057388A1 Systems and Methods for Depositing and Charging Solar Cell Layers 审中-公开
标题翻译：太阳能电池层沉积和充电的系统和方法
公开(公告)号：US20140057388A1
公开(公告)日：2014-02-27
申请号：US13954183
申请日：2013-07-30
申请人： Amtech Systems, Inc.
发明人： Jeong-Mo Hwang
IPC分类号： H01L31/18
CPC分类号： H01L31/1868 , H01J37/32082 , H01J37/32422 , H01J37/32568 , H01L31/02167 , H01L31/02168 , H01L31/068 , Y02E10/547 , Y02P70/521
摘要： Systems and methods of the present invention may be used to charge a layer (such as a passivation layer and/or antireflective layer) of a solar cell (e.g., wafer) with a positive or negative charge. The layer may retain the charge to improve operation of the solar cell. The charged layer may include any suitable dielectric material capable of retaining either a negative or a positive charge. Systems and methods of the present invention permit in-situ charging of a layer. Charging of a layer may be accomplished during or after deposition of the layer including after completing the whole solar cell process, in other words, on a finished cell.
摘要翻译：本发明的系统和方法可以用于以正电荷或负电荷对太阳能电池（例如，晶片）的层（例如钝化层和/或抗反射层）进行充电。该层可以保持电荷以改善太阳能电池的运行。带电层可以包括能够保持负电荷或正电荷的任何合适的电介质材料。本发明的系统和方法允许层的原位充电。可以在层的沉积期间或之后完成层的充电，包括在完成整个太阳能电池处理之后，换句话说，在成品电池上。

9. 发明申请

US20130133578A1 SYSTEMS FOR CHARGING SOLAR CELL LAYERS 审中-公开
标题翻译：用于充电太阳能电池层的系统
公开(公告)号：US20130133578A1
公开(公告)日：2013-05-30
申请号：US13676923
申请日：2012-11-14
申请人： AMTECH SYSTEMS, INC.
发明人： Jeong-Mo Hwang
IPC分类号： H01L31/18
CPC分类号： H01L31/18 , H01J37/32082 , H01J37/32174 , H01J37/32577 , H01L31/02167 , H01L31/02168 , H01L31/068 , H01L31/1868 , Y02E10/547 , Y02P70/521
摘要： Systems and methods of the present invention can be used to charge a charge-holding layer (such as a passivation layer and/or antireflective layer) of a solar cell with a positive or negative charge as desired. The charge-holding layer(s) of such a cell can include any suitable dielectric material capable of holding either a negative or a positive charge, and can be charged at any suitable point during manufacture of the cell, including during or after deposition of the passivation layer(s).
摘要翻译：本发明的系统和方法可用于根据需要对正电荷或负电荷对太阳能电池的电荷保持层（例如钝化层和/或抗反射层）进行充电。这种电池的电荷保持层可以包括能够保持负电荷或正电荷的任何合适的介电材料，并且可以在电池的制造期间的任何合适的点进行充电，包括在沉积期间或之后钝化层。

10. 发明申请

US20140057387A1 Systems and Methods for Depositing and Charging Solar Cell Layers 审中-公开
公开(公告)号：US20140057387A1
公开(公告)日：2014-02-27
申请号：US13954149
申请日：2013-07-30
申请人： Amtech Systems, Inc.
发明人： Jeong-Mo Hwang
IPC分类号： H01L31/18
CPC分类号： H01L31/1868 , H01J37/32082 , H01J37/32422 , H01J37/32568 , H01L31/02167 , H01L31/02168 , H01L31/068 , Y02E10/547 , Y02P70/521
摘要： Systems and methods of the present invention may be used to charge a layer (such as a passivation layer and/or antireflective layer) of a solar cell (e.g., wafer) with a positive or negative charge. The layer may retain the charge to improve operation of the solar cell. The charged layer may include any suitable dielectric material capable of retaining either a negative or a positive charge. Systems and methods of the present invention permit in-situ charging of a layer. Charging of a layer may be accomplished during or after deposition of the layer including after completing the whole solar cell process, in other words, on a finished cell.

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