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    • 4. 发明申请
    • APPARATUS AND METHOD FOR DETECTING A ROTATION
    • 检测旋转的装置和方法
    • WO2008000310A1
    • 2008-01-03
    • PCT/EP2007/003908
    • 2007-05-03
    • INFINEON TECHNOLOGIES AGAIGNER, Robert
    • AIGNER, Robert
    • G01C19/56
    • G01C19/5698
    • A rotation sensor has a substrate (112) with a first surface (114) and a second surface (116). A shear-wave transparent mirror (106) is arranged on the first surface (114) of the substrate (112), and a shear-wave isolator (104) is arranged above the shear-wave transparent mirror (106), the shear-wave transparent mirror (106) and the shear-wave isolator (104) being arranged separated from each other to define a Coriolis zone (124) there between. A bulk-acoustic-wave resonator (102) is arranged above the shear-wave isolator (104), and a shear-wave detector (108) is arranged on the substrate (112) in a direction, in which a shear-wave (128) generated by the bulk-acoustic-wave resonator (102) upon rotation propagates.
    • 旋转传感器具有带有第一表面(114)和第二表面(116)的基底(112)。 剪切波透镜(106)布置在基板(112)的第一表面(114)上,并且剪切波隔离器(104)布置在剪切波透镜(106)的上方, 波长透明反射镜(106)和剪切波隔离器(104)被布置成彼此分离以在其间限定科里奥利(124)。 在剪切波隔离器(104)上方布置有体声波谐振器(102),并且在基板(112)上沿剪切波(...)方向布置剪切波检测器(108) 128)在旋转传播时由体声波谐振器(102)产生。