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    • 7. 发明专利
    • Ion implanter
    • 离子植入物
    • JP2003297280A
    • 2003-10-17
    • JP2002097648
    • 2002-03-29
    • Toshiba CorpToshiba Tungaloy Co Ltd東芝タンガロイ株式会社株式会社東芝
    • NODA ETSUOASANO SHIROSUGAWARA TORUSAITO TAKESHIWATANABE TOSHIYUKISEKI KATSUHIKO
    • C23C14/48H01J27/16H01J37/08H01J37/317
    • PROBLEM TO BE SOLVED: To make ion implantation possible even when a raw material of ions intended to be implanted into a substrate is a solid such as chromium, iron or carbon, and to achieve a sufficient effect by ion implantation. SOLUTION: For the ion implanter comprising a vacuum container 1, a holding stand 4 for holding a substrate 3 provided insulatingly from the vacuum container within the vacuum container 1 and a power source 6 of pulse high voltage for applying negative pulse voltage to the substrate 3, in which an ion is implanted into the surface of the substrate to make surface improvement or form a film, a vapor or plasma generating source 7 for generating vapor or plasma of a raw material to be implanted into the surface of the substrate is provided, and a discharge section 9 for accelerating ionization of the vapor or plasma is provided in the middle of a transport tube 8 through which the vapor or plasma generated by the vapor or plasma generating source 7 is guided to the substrate 3. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:即使当想要注入到基底中的离子的原料是诸如铬,铁或碳的固体,并且通过离子注入获得足够的效果时,也可以使离子注入成为可能。 解决方案:对于包括真空容器1的离子注入机,用于保持与真空容器1内的真空容器绝缘地设置的基板3的保持架4和用于施加负脉冲电压的脉冲高电压的电源6 衬底3,其中将离子注入到衬底的表面以进行表面改性或形成膜;蒸气或等离子体产生源7,用于产生待注入衬底表面的原料的蒸汽或等离子体 并且在运送管8的中间设置有用于加速蒸气或等离子体的离子化的放电部9,蒸汽或等离子体产生源7产生的蒸汽或等离子体通过该输送管8被引导到基板3上。

      版权所有(C)2004,JPO

    • 8. 发明专利
    • Setter for sintering hard sintered alloy
    • 烧结硬质合金的设定
    • JP2003082402A
    • 2003-03-19
    • JP2001275024
    • 2001-09-11
    • Toshiba Tungaloy Co Ltd東芝タンガロイ株式会社
    • KOBAYASHI MASAKIKOIKE HIROKI
    • C04B41/87B22F3/10
    • PROBLEM TO BE SOLVED: To provide a setter for sintering a hard sintered alloy which enables economical sintering of a product having stable quality by saving the handling time in the conventional powder coating method, and preventing initial deterioration in a coating film method.
      SOLUTION: When a coating film essentially consisting of lanthanum based rare earth metal oxide is formed on a carbonaceous material, fusion, deformation, fault in the material or the like are hard to occur compared with the conventional coating film of various compounds, so that the service life of the setter is remarkably elongated.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:提供一种用于烧结硬烧结合金的固定器,其通过节省常规粉末涂布方法中的处理时间并且防止涂膜方法的初始劣化,从而能够经济地烧结质量稳定的产品。 解决方案:当在碳质材料上形成基本上由镧基稀土金属氧化物组成的涂膜时,与各种化合物的常规涂膜相比,难以发生熔融,变形,材料等的故障,因此, 设备的使用寿命显着延长。