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    • 4. 发明专利
    • Method for manufacturing semiconductor crystal film and device using it
    • 制造半导体晶体膜的方法及其使用的装置
    • JP2007059706A
    • 2007-03-08
    • JP2005244480
    • 2005-08-25
    • Naoto MatsuoShuji MiyamotoTakayasu Mochizuki修治 宮本孝晏 望月直人 松尾
    • MATSUO NAOTOMOCHIZUKI TAKAYASUMIYAMOTO SHUJI
    • H01L21/20H01L21/268
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor crystal film such as a poly-Si thin film on an insulating or a flexible substrate such as a glass with the use of low temperature process of not more than the softening point (500°C) of a glass.
      SOLUTION: The semiconductor crystal film in a semi-molten state is obtained by locally exciting a phonon in a thermal nonequilibrium condition in an amorphous semiconductor layer on the insulating substrate such as a glass, a quartz, a plastic film, a stainless steel, a polymer series fiber, a paper or the like, or the flexible substrate to move the atom existing in an irregular position to a regular position. The method for locally exciting the phonon in the thermal nonequilibrium condition uses the step for irradiating a soft X-ray photon beam having a photon energy of 10 eV to 3 keV.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种在绝缘或柔性基板(例如玻璃)上制造诸如多晶硅薄膜的半导体晶体膜的方法,其中使用不超过软化的低温工艺 点(500°C)。 解决方案:半熔融状态的半导体晶体膜通过在诸如玻璃,石英,塑料膜,不锈钢的绝缘基板上的非晶半导体层中的热非平衡条件下局部激发声子而获得 钢,聚合物系列纤维,纸张等,或柔性基板,将存在于不规则位置的原子移动到规定位置。 用于在热非平衡条件下局部激发声子的方法使用用于照射具有10eV至3keV的光子能量的软X射线光子束的步骤。 版权所有(C)2007,JPO&INPIT
    • 5. 发明专利
    • Target material supply method for x-ray generation, and its device
    • 用于X射线发生的目标材料供应方法及其装置
    • JP2005251601A
    • 2005-09-15
    • JP2004061667
    • 2004-03-05
    • Takayasu Mochizuki孝晏 望月
    • MOCHIZUKI TAKAYASU
    • H05H1/24G03F7/20H01L21/027H05G2/00
    • PROBLEM TO BE SOLVED: To suppress evaporation of a target material for generation of a laser plasma X-ray, maintain a diameter of the target material needed up to a sufficiently separate laser condensing point, and enable continuous supply of the material at a high speed and with stability.
      SOLUTION: After a liquid jet flow 6 of the target material is formed by a nozzle part 5 by pressurizing, cooling and liquefying the target material, this is forcibly cooled under atmosphere of a cryogenic gas 10 at a solidifying cooling part 8, and cooled down to a temperature at which this is solidified in a short time. Owing to this, unnecessary evaporation of the target material is suppressed to a small amount, and without being influenced by fluid instability, the target material can be supplied continuously with stability to the laser condensing point 18 in an X-ray generating vacuum chamber 14 as a filamentous solid target current 12 having a necessary diameter.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题为了抑制用于产生激光等离子体X射线的目标材料的蒸发,将目标材料的直径维持在足够分离的激光凝聚点上,并且能够连续地供应材料 高速稳定。 解决方案:通过加压,冷却和液化目标材料,通过喷嘴部分5形成目标材料的液体喷射流6之后,在凝固冷却部分8的低温气体10的气氛下被强制冷却, 冷却至短时间内凝固的温度。 由此,目标材料的不必要的蒸发被抑制到少量,并且不受流体不稳定性的影响,可以在X射线产生真空室14中将激光聚光点18稳定地连续供给靶材,作为 具有必需直径的丝状固体靶电流12。 版权所有(C)2005,JPO&NCIPI
    • 7. 发明专利
    • Laser plasma generation method and its structure
    • 激光等离子体生成方法及其结构
    • JP2003303696A
    • 2003-10-24
    • JP2002109587
    • 2002-04-11
    • Takayasu Mochizuki孝晏 望月
    • MOCHIZUKI TAKAYASU
    • G21K5/02G21K5/08H01L21/027H05G2/00H05H1/22H05H1/24
    • H05G2/003G21B1/23H05G2/006H05G2/008
    • PROBLEM TO BE SOLVED: To reduce gas generating amount of a target which is although liquid/ solid, and also, to improve conversion efficiency or generation efficiency of X-ray generating from the target. SOLUTION: The laser plasma generating structure is equipped with a wedge- shaped core material 50 at a core axis of a target material spout 11 of a nozzle 10, and the laser plasma generating method is to make spouting a target material 20 at a cylinder having a hollow part from the target material spout 11 and to generate a hollow cylinder target 21 with a diameter ϕ and thickness τof a wall thickness part 22. Laser beams 30 hit the hollow cylinder target 21 so as to have approximately a diameter ϕ at a convergent irradiation point 40. The core material can help forming a hollow part 23 of the hollow cylinder target 21 by spouting gas by providing a gas spout at a tip part center. A surface of the wall thickness part 22 is irradiated uniformly at the convergent irradiation point 40 by providing a plurality of laser beams on a center axis of the hollow cylinder target 21 on a vertical surface with equal spaces and angles. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:为了减少虽然是液体/固体的目标物的气体产生量,并且还提高了从目标产生X射线的转换效率或生成效率。 解决方案:激光等离子体产生结构在喷嘴10的目标材料喷口11的芯轴处配备有楔形芯材50,并且激光等离子体产生方法是将目标材料20喷射到 具有来自目标材料喷口11的中空部分的圆筒,并且产生具有壁厚部分22的直径φ和厚度τ​​的中空筒体目标21。激光束30撞击中空圆柱体靶21以具有近似直径φ 在会聚照射点40处。芯材可以通过在尖端部分中心处设置气体喷口而喷射气体来帮助形成中空筒体21的中空部分23。 通过在垂直面上以等间隔和角度在中空圆筒靶21的中心轴上设置多个激光束,在会聚照射点40均匀地照射壁厚部22的表面。 版权所有(C)2004,JPO
    • 9. 发明专利
    • Method and apparatus for forming sheet metal
    • 用于形成片材的方法和装置
    • JP2005281846A
    • 2005-10-13
    • JP2004127400
    • 2004-03-27
    • Takayasu MochizukiToru Yamazaki徹 山崎孝晏 望月
    • YAMAZAKI TORUMOCHIZUKI TAKAYASU
    • C22F1/10C22F1/00
    • PROBLEM TO BE SOLVED: To provide a method and apparatus for three-dimensional precision bending and plastic forming of a sheet metal composed of an electrodeposition alloy having an amorphous or nanocrystal structure of high strength and hard-to-work property suitable for mass production at a low cost without impairment of the excellent mechanical properties of the sheet metal. SOLUTION: The three-dimensional precision bending and plastic forming are performed without the impairment of the excellent mechanical properties of the sheet metal composed of the electrodeposition alloy having the amorphous or nanocrystal structure by utilizing its thermoplasticity during volumetric shrinkage in forming while the ductility-brittleness transition temperature is suppressed and controlled to the lower limit of the service temperature or below by controlling the heating temperature and heating time and the alloy composition of the material according to the characteristics of the sheet metal. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种由具有高强度和难加工性的非晶或纳米晶体结构的电沉积合金构成的金属板的三维精密弯曲和塑性成形的方法和装置,其适用于 以低成本大量生产,而不损害钣金的优异机械性能。 解决方案:三维精密弯曲和塑性成形在不损害由具有无定形或纳米晶体结构的电沉积合金构成的金属薄板的优异机械性能的情况下,通过在形成时的体积收缩期间利用其热塑性而进行,而 通过根据金属板的特性控制加热温度和加热时间以及材料的合金组成,延展性 - 脆性转变温度被抑制并控制在使用温度的下限以下。 版权所有(C)2006,JPO&NCIPI
    • 10. 发明专利
    • Electrodeposition stacked alloy thin sheet, and its production method
    • 电沉积堆焊合金薄板及其生产方法
    • JP2005146405A
    • 2005-06-09
    • JP2003420129
    • 2003-11-14
    • Takayasu MochizukiToru Yamazaki徹 山崎孝晏 望月
    • YAMAZAKI TORUMOCHIZUKI TAKAYASU
    • C25D1/00B24D5/12B24D18/00C25D1/04C25D3/56C25D5/10
    • B24D5/12B24D18/0018C25D1/00Y10S428/935Y10T428/12458Y10T428/12632Y10T428/1291Y10T428/12944
    • PROBLEM TO BE SOLVED: To realize all of high mechanical strength, high toughness, high temperature stability, high chemical resistance and high conductivity required at the time when an electrodeposited alloy is used as the members for micromachines and microcomponents. SOLUTION: In a metallic thin sheet produced by using electrodeposition method, two or more metallic film layers having different compositions of a metallic film layer (former) having excellent mechanical properties or chemical resistance and a metallic film layer (latter), e.g., having electrical properties such as conductivity are tightly stuck on an atomic level so as to be integrally formed directly, or in such a manner that the compositions are tilted, or in such a manner that a sticking buffer layer such as a copper thin film is formed therebetween. For this purpose, the former is first electrodeposited on an electrode substrate, next, the latter is electrodeposited so as to be stacked thereon, and then, the former is again electrodeposited on the latter. They are successively electrodeposited on the electrode substrate so that the thickness of the former film layers sandwiching from both the faces of the latter is made equal at both the faces of the latter, and finally, the substrate is dissolved. Thus, the member for micromachines and microcomponents having excellent mechanical properties or chemical resistance and also having excellent electrical properties is provided. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了实现使用电沉积合金作为微机械和微型部件的部件时所需的所有高机械强度,高韧性,高温稳定性,高耐化学性和高导电性。 解决方案:在通过电沉积方法制造的金属薄片中,具有不同组成的金属膜层(前者)具有优异的机械性能或耐化学性和金属膜层(后者)的两个或多个金属膜层,例如 具有诸如导电性的电性能被紧密地粘附在原子水平上,以便直接整体形成,或以组合物倾斜的方式,或者使得诸如铜薄膜的粘附缓冲层为 。 为此,将前者首先电沉积在电极基板上,接着将其电沉积以便堆叠在其上,然后将前者再次电沉积在其上。 将它们依次电沉积在电极基底上,使得从后面的两个表面夹入的前一个薄膜层的厚度在后者的两个表面上相等,最后使基底溶解。 因此,提供了具有优异的机械性能或耐化学性并且还具有优异的电性能的微机械和微型部件的构件。 版权所有(C)2005,JPO&NCIPI