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2. 发明专利

JP2005252254A Method for compensating magnetic field in operating area 有权
标题翻译：操作区域磁场补偿方法
公开(公告)号：JP2005252254A
公开(公告)日：2005-09-15
申请号：JP2005052280
申请日：2005-02-28
申请人： Ims Nanofabrication Gmbh , アイエムエスナノファブリケイションゲエムベーハー
发明人： STENGL GERHARD , BUSCHBECK HERBERT
IPC分类号： H01J37/20 , G05F7/00 , H01H47/00 , H01L21/027
CPC分类号： G05F7/00
摘要： PROBLEM TO BE SOLVED: To compensate magnetic fields using magnetic field sensors set in an operating area (particle beam) where the magnetic fields must be compensated.
SOLUTION: Magnetic fields sensors S1, S2 in the operating area and a compensation coil Hh mechanism enclosing the operating area are used for the magnetic field compensation. The magnetic fields are in different positions, preferably in the positions opposite to each other with respect to the axis of symmetry of the operating area, and measured by at least two sensors S1, S2 generating respective sensor signals s1, s2. The sensor signals s1, s2 of the sensors S1, S2 are superposed to create feedback signals ms, fs, which are converted into a drive signal d1 by a control means. The drive signal is then used to control the direction of the magnetic field of at least one compensation coil (Hh).
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：使用设置在必须补偿磁场的操作区域（粒子束）中的磁场传感器来补偿磁场。
解决方案：操作区域中的磁场传感器S1，S2和围绕操作区域的补偿线圈Hh机构用于磁场补偿。磁场位于不同的位置，优选地在相对于操作区域的对称轴线彼此相对的位置处，并且由至少两个产生各个传感器信号s1，s2的传感器S1，S2测量。传感器S1，S2的传感器信号s1，s2被叠加以产生由控制装置转换成驱动信号d1的反馈信号ms，fs。然后使用驱动信号来控制至少一个补偿线圈（Hh）的磁场方向。版权所有（C）2005，JPO＆NCIPI

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