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1. 发明授权

US08736177B2 Compact RF antenna for an inductively coupled plasma ion source 有权
标题翻译：用于电感耦合等离子体离子源的紧凑型RF天线
公开(公告)号：US08736177B2
公开(公告)日：2014-05-27
申请号：US12894779
申请日：2010-09-30
申请人： Shouyin Zhang
发明人： Shouyin Zhang
IPC分类号： H01J7/24
CPC分类号： H01J37/08 , H01J37/3211 , H01J2237/0815
摘要： An inductively coupled plasma ion source for a focused ion beam (FIB) system is disclosed, comprising an insulating plasma chamber with a feed gas delivery system, a compact radio frequency (RF) antenna coil positioned concentric to the plasma chamber and in proximity to, or in contact with, the outer diameter of the plasma chamber. In some embodiments, the plasma chamber is surrounded by a Faraday shield to prevent capacitive coupling between the RF voltage on the antenna and the plasma within the plasma chamber. High dielectric strength insulating tubing is heat shrunk onto the outer diameter of the conductive tubing or wire used to form the antenna to allow close packing of turns within the antenna coil. The insulating tubing is capable of standing off the RF voltage differences between different portions of the antenna, and between the antenna and the Faraday shield.
摘要翻译：公开了一种用于聚焦离子束（FIB）系统的电感耦合等离子体离子源，其包括具有进料气体输送系统的绝缘等离子体室，与等离子体室同心定位的紧凑射频（RF）天线线圈，或与等离子体室的外径接触。在一些实施例中，等离子体室由法拉第屏蔽围绕，以防止天线上的RF电压与等离子体室内的等离子体之间的电容耦合。高介电强度绝缘管热收缩到用于形成天线的导电管或导线的外径上，以允许天线线圈内的匝紧密封装。绝缘管能够防止天线的不同部分之间以及天线和法拉第屏蔽之间的RF电压差异。

2. 发明授权

US08742361B2 Focused charged particle column for operation at different beam energies at a target 有权
标题翻译：用于在目标处的不同射束能量下操作的聚焦带电粒子柱
公开(公告)号：US08742361B2
公开(公告)日：2014-06-03
申请号：US13490650
申请日：2012-06-07
申请人： Mostafa Maazouz , Jonathan H. Orloff
发明人： Mostafa Maazouz , Jonathan H. Orloff
IPC分类号： H01J37/12 , H01J37/153 , H01J37/21 , H01J37/04
CPC分类号： H01J37/153 , H01J37/04 , H01J37/12 , H01J37/21 , H01J2237/047 , H01J2237/04924 , H01J2237/12 , H01J2237/121 , H01J2237/31749
摘要： A charged particle column having improved performance at multiple beam energies. The column employs a four-element objective lens to enable improved beam focusing performance at both high and low beam energies at a target, with differing focus voltage configurations for different beam energies. By changing the voltages applied to the four electrodes of the objective lens, different focusing conditions may be rapidly configured, enabling rapid toggling between optimized imaging and optimized processing of a target.
摘要翻译：带电粒子柱在多光束能量下具有改进的性能。该列采用四元件物镜，以在目标的高和低光束能量下实现改进的光束聚焦性能，对于不同的光束能量具有不同的聚焦电压配置。通过改变施加到物镜的四个电极的电压，可以快速地配置不同的聚焦条件，使得能够在优化的成像和目标的优化处理之间快速切换。

3. 发明授权

US08736170B1 Stable cold field emission electron source 有权
标题翻译：稳定的冷场发射电子源
公开(公告)号：US08736170B1
公开(公告)日：2014-05-27
申请号：US13032488
申请日：2011-02-22
申请人： Kun Liu , Gregory A. Schwind
发明人： Kun Liu , Gregory A. Schwind
IPC分类号： H01J25/50 , H01J23/06
CPC分类号： H01J23/06 , H01J37/063 , H01J37/073 , H01J2237/022
摘要： A cold field emission (CFE) electron source for a focused electron beam system such as a transmission electron microscope (TEM), scanning transmission electron microscope (STEM), or scanning electron microscope (SEM) is disclosed. The source employs an emitter enclosure electrode behind the CFE tip which, in conjunction with the extractor electrode, defines a closed volume that can be thoroughly cleaned by electron impact desorption (EID) and radiative heating from a heated filament located between the emitter enclosure electrode and extractor electrode. The extractor electrode may have a counterbore which restricts backscattered electrons generated at the extractor from reaching portions of the source and gun which have not been cleaned by EID. Pre-cleaning of the emitter enclosure electrode and extractor electrode prior to cold field emission substantially improves both source emission stability and frequency noise characteristics, enabling source operation over time intervals adequate for application to TEMs, STEMs, and SEMs.
摘要翻译：公开了透射电子显微镜（TEM），扫描透射电子显微镜（STEM）或扫描电子显微镜（SEM）等聚焦电子束系的冷场发射（CFE）电子源。该源在CFE尖端之后采用发射器外壳电极，其与提取器电极结合，限定可通过电子轰击解吸（EID）彻底清洁的封闭体积，以及位于发射体外壳电极和提取电极。提取器电极可以具有沉孔，其限制在提取器处产生的反向散射电子到达未被EID清洁的源和枪的部分。在冷场发射之前预先清洁发射器外壳电极和提取器电极大大改善了源发射稳定性和频率噪声特性，从而能够实现源于在适用于TEM，STEM和SEM的时间间隔的源操作。

4. 发明授权

US08759764B2 On-axis detector for charged particle beam system 有权
标题翻译：用于带电粒子束系统的轴上探测器
公开(公告)号：US08759764B2
公开(公告)日：2014-06-24
申请号：US13538851
申请日：2012-06-29
申请人： Anthony Graupera , N. William Parker , Mark W. Utlaut
发明人： Anthony Graupera , N. William Parker , Mark W. Utlaut
IPC分类号： H01J37/256
CPC分类号： H01J37/256 , H01J37/244 , H01J37/28 , H01J2237/2448
摘要： A split grid multi-channel secondary particle detector for a charged particle beam system includes a first grid segment and a second grid segment, each having independent bias voltages creating an electric field such that the on-axis secondary particles that are emitted from the target are directed to one of the grids. The bias voltages of the grids can be changed or reversed so that each grid can be used to detect the secondary particles and the multi-channel particle detector as a whole can extend its lifetime.
摘要翻译：用于带电粒子束系统的分裂网格多通道二次粒子检测器包括第一栅格区段和第二栅极区段，每个区段具有独立的偏置电压，从而产生电场，使得从靶发射的轴上二次颗粒为指向其中一个网格。网格的偏置电压可以改变或反转，以便每个网格可以用于检测次级粒子，并且多通道粒子检测器作为一个整体可以延长其寿命。

5. 发明授权

US08723143B2 Plasma igniter for an inductively coupled plasma ion source 有权
标题翻译：用于电感耦合等离子体离子源的等离子点火器
公开(公告)号：US08723143B2
公开(公告)日：2014-05-13
申请号：US13276731
申请日：2011-10-19
申请人： Anthony Graupera , Sean Kellogg , Tom Miller , Dustin Laur , Shouyin Zhang , Antonius Bastianus Wilhelmus Dirriwachter
发明人： Anthony Graupera , Sean Kellogg , Tom Miller , Dustin Laur , Shouyin Zhang , Antonius Bastianus Wilhelmus Dirriwachter
IPC分类号： G21G5/00
CPC分类号： H01J37/08 , H01J37/24 , H01J2237/0815 , H01J2237/31749 , H05H1/36
摘要： A focused ion beam (FIB) system is disclosed, comprising an inductively coupled plasma ion source, an insulating plasma chamber containing the plasma, a conducting source biasing electrode in contact with the plasma and biased to a high voltage to control the ion beam energy at a sample, and a plurality of apertures. The plasma within the plasma chamber serves as a virtual source for an ion column comprising one or more lenses which form a focused ion beam on the surface of a sample to be imaged and/or FIB-processed. The plasma is initiated by a plasma igniter mounted near or at the column which induces a high voltage oscillatory pulse on the source biasing electrode. By mounting the plasma igniter near the column, capacitive effects of the cable connecting the source biasing electrode to the biasing power supply are minimized. Ion beam sputtering of the apertures is minimized by proper aperture materials selection.
摘要翻译：公开了一种聚焦离子束（FIB）系统，其包括电感耦合等离子体离子源，包含等离子体的绝缘等离子体室，与等离子体接触并被偏压到高电压的导电源偏置电极，以控制离子束能量样品和多个孔。等离子体室内的等离子体用作离子柱的虚拟源，该离子柱包括一个或多个在待成像和/或FIB处理的样品的表面上形成聚焦离子束的透镜。等离子体由安装在塔附近或在柱上的等离子体点火器引发，其在源偏置电极上引起高电压振荡脉冲。通过将等离子体点火器安装在柱附近，将源偏置电极连接到偏压电源的电缆的电容效应最小化。通过适当的孔隙材料选择使孔径的离子束溅射最小化。

6. 发明授权

US08757873B2 Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus 有权
标题翻译：在带电粒子光学装置中测量样品载体的温度的方法
公开(公告)号：US08757873B2
公开(公告)日：2014-06-24
申请号：US13304181
申请日：2011-11-23
申请人： Stephanus Hubertus Leonardus van den Boom , Pleun Dona , Laurens Franz Taemsz Kwakman , Uwe Luecken , Hervé-William Rémigy , Hendrik Nicolaas Slingerland , Martin Verheijen , Gerbert Jeroen van de Water
发明人： Stephanus Hubertus Leonardus van den Boom , Pleun Dona , Laurens Franz Taemsz Kwakman , Uwe Luecken , Hervé-William Rémigy , Hendrik Nicolaas Slingerland , Martin Verheijen , Gerbert Jeroen van de Water
IPC分类号： G01K1/00 , G01K13/12 , G01K11/00 , G01K11/20 , G01K5/68 , H01J37/20 , H01J37/26
CPC分类号： G01K5/68 , G01K11/20 , H01J37/20 , H01J37/26 , H01J2237/2001 , H01J2237/24585
摘要： A method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier. The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier. The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals, showing metals with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.
摘要翻译：一种确定带电粒子光学装置中的样品载体的温度的方法，其特征在于，所述方法包括用带电粒子束观察样品载体，所述观察给出关于样品载体的温度的信息。本发明基于如下观点：带电粒子光学装置如TEM，STEM，SEM或FIB可用于观察样品载体的温度相关变化。这些改变可以是机械变化（例如双金属），晶体学变化（例如钙钛矿）和发光变化（强度或衰变时间）。在优选实施例中，样品载体显示两个双金属，显示具有不同热膨胀系数的金属，在相反方向上弯曲。两个双金属片之间的距离用作温度计。

7. 发明授权

US08692196B2 Method of use for a multipole detector for a transmission electron microscope 有权
标题翻译：用于透射电子显微镜的多极检测器的方法
公开(公告)号：US08692196B2
公开(公告)日：2014-04-08
申请号：US12564617
申请日：2009-09-22
申请人： Peter Christiaan Tiemeijer , Uwe Luecken , Alan Frank de Jong , Hendrik Nicolaas Slingerland
发明人： Peter Christiaan Tiemeijer , Uwe Luecken , Alan Frank de Jong , Hendrik Nicolaas Slingerland
IPC分类号： G01N23/00
CPC分类号： H01J37/153 , H01J37/263 , H01J2237/1534 , H01J2237/2823
摘要： The invention relates to a method for correcting distortions introduced by the projection system (106) of a TEM. As known to the person skilled in the art distortions may limit the resolution of a TEM, especially when making a 3D reconstruction of a feature using tomography. Also when using strain analysis in a TEM the distortions may limit the detection of strain.To this end the invention discloses a detector equipped with multipoles (152), the multipoles warping the image of the TEM in such a way that distortions introduced by the projection system are counteracted. The detector may further include a CCD or a fluorescent screen (151) for detecting the electrons.
摘要翻译：本发明涉及一种用于校正由TEM的投影系统（106）引入的失真的方法。如本领域技术人员所知，失真可能限制TEM的分辨率，特别是当使用层析成像进行特征的3D重建时。此外，当在TEM中使用应变分析时，失真可能会限制应变的检测。为此，本发明公开了一种装备有多极（152）的检测器，该多极体使得TEM的图像翘曲，使得由投影系统引入的失真被抵消。检测器还可以包括用于检测电子的CCD或荧光屏（151）。

8. 发明授权

US08710452B2 Charged particle source with integrated electrostatic energy filter 有权
标题翻译：带集成静电能量滤波器的带电粒子源
公开(公告)号：US08710452B2
公开(公告)日：2014-04-29
申请号：US13294067
申请日：2011-11-10
申请人： Alexander Henstra
发明人： Alexander Henstra
IPC分类号： G21K1/08 , H01J3/14 , H01J3/26 , H01J49/22
CPC分类号： H01J37/05 , H01J37/06 , H01J37/08 , H01J37/09 , H01J37/26 , H01J37/28 , H01J2237/0453 , H01J2237/053 , H01J2237/057 , H01J2237/31713
摘要： A charged particle filter with an integrated energy filter, in which the charged particle emitter, the focusing electrodes, and the deflection electrodes are arranged round a straight axis. Where most energy filters used have a highly curved optical axis, and thus use parts with forms that are difficult to manufacture, the source according the invention uses electrodes surrounding a straight optical axis. A beam of charged particles can be deflected quite far from the axis showing respectable energy dispersion at an energy selecting slit without introducing coma or astigmatism that cannot be corrected, provided that some of the are formed as 120°/60°/120°/60°. Such electrodes can be attached to each other by gluing or brazing of ceramic, and then series of a highly concentric bores can be formed by, e.g., spark erosion.
摘要翻译：具有集成能量滤波器的带电粒子滤波器，其中带电粒子发射器，聚焦电极和偏转电极绕直线布置。在使用大多数能量过滤器具有高度弯曲的光轴的情况下，因此使用具有难以制造的形式的部件，根据本发明的源使用围绕直线光轴的电极。带电粒子的束可以在能量选择狭缝处偏离显示出可观的能量分散的轴线，而不引入无法校正的彗差或像散，只要其中一些形成为120°/ 60°/ 120°/ 60° °。这样的电极可以通过陶瓷的胶合或钎焊而彼此附接，然后可以通过例如火花腐蚀形成一系列高度同心的孔。

9. 发明授权

US08707876B2 Stepped floor for solid fuel boilers 有权
标题翻译：固体燃料锅炉的阶梯式地板
公开(公告)号：US08707876B2
公开(公告)日：2014-04-29
申请号：US12557085
申请日：2009-09-10
申请人： Daniel Richard Higgins , Eugene Sullivan
发明人： Daniel Richard Higgins , Eugene Sullivan
IPC分类号： F23L1/00 , F23C7/02
CPC分类号： F23B30/06 , F23B80/02 , F23J1/06 , F23L1/00 , F23N3/002 , F23N2021/08 , F23N2021/12 , F23N2025/08 , F23N2031/26
摘要： A design and method of operation for the floor of solid fuel boilers is described. The combustion region includes a stepped-floor that improves combustion in the lower furnace. In some embodiments, the fuel is moved between the steps of the floor by a gas, rather than by mechanical means, and the fuel is moved from an upper to a lower step as it is burned. In some embodiments, the steps are fixed steps having a layer of a refractory material.
摘要翻译：描述了固体燃料锅炉地板的设计和操作方法。燃烧区域包括一个阶梯式地板，其改善下部炉中的燃烧。在一些实施例中，燃料通过气体而不是通过机械装置在地板的台阶之间移动，并且燃料在燃烧时从上部移动到下部台阶。在一些实施例中，步骤是具有耐火材料层的固定步骤。

10. 发明授权

US08692217B2 Multi-source plasma focused ion beam system 有权
标题翻译：多源等离子体聚焦离子束系统
公开(公告)号：US08692217B2
公开(公告)日：2014-04-08
申请号：US13850721
申请日：2013-03-26
申请人： FEI Company
发明人： Noel Smith , Clive D. Chandler , Mark W. Utlaut , Paul P. Tesch , Dave Tuggle
IPC分类号： H01J37/08 , H01J27/02
CPC分类号： H01J37/3007 , C23C14/0031 , C23C14/221 , H01J27/16 , H01J37/08 , H01J37/305 , H01J37/3053 , H01J37/3056 , H01J37/3178 , H01J37/32082 , H01J37/3211 , H01J2237/006 , H01J2237/0817 , H01J2237/0827 , H01J2237/31 , H01J2237/31749
摘要： The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter submicron features of a work piece. The system preferably uses an inductively coupled, magnetically enhanced ion beam source, suitable in conjunction with probe-forming optics sources to produce ion beams of a wide variety of ions without substantial kinetic energy oscillations induced by the source, thereby permitting formation of a high resolution beam.
摘要翻译：本发明提供了一种等离子体离子束系统，其包括多个气体源，并且可用于使用不同离子种类进行多个操作以产生或改变工件的亚微米特征。该系统优选使用电感耦合的磁增强离子束源，其适合与探针形成光学源结合以产生各种离子的离子束，而不会由源引起的实质动能振荡，从而允许形成高分辨率光束。

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