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    • 2. 发明申请
    • LOAD DETECTOR AND LOAD DETECTION SYSTEM
    • 负载检测器和负载检测系统
    • WO2016199414A1
    • 2016-12-15
    • PCT/JP2016/002779
    • 2016-06-08
    • MINEBEA CO., LTD.
    • SATO, KunihikoHATCHO, Jun
    • G01G3/14G01G19/44G01G21/14
    • G01G3/1412G01G19/445G01G21/14
    • There is provided a load detector which detects a load successfully while reducing the influence of a position deviation error. The load detector (100) includes: a first beam type load cell (21) which is supported on a first support base (11b) in a cantilever manner to have a free end (21sf); a second beam type load cell (22) which is disposed to face the first beam type load cell (21) and which is supported on a second support base (12b) in a cantilever manner to have a free end (22sf); and a mounting part (3) on which an object is to be placed, which includes a first connection part (32) connected to the first beam type load cell and a second connection part (33) connected to the second beam type load cell, and which is disposed between the first beam type load cell and the second beam type load cell. The free end of the first beam type load cell and the free end of the second beam type load cell face opposite directions to each other in an extending direction of the first beam type load cell. The first connection part of the mounting part is connected to the first beam type load cell on a side of the free end of the first beam type load cell and the second connection part of the mounting part is connected to the second beam type load cell on a side of the free end of the second beam type load cell.
    • 提供了一种负载检测器,其在减少位置偏差误差的影响的同时成功地检测负载。 负载检测器(100)包括:以悬臂方式支撑在第一支撑基座(11b)上以具有自由端(21sf)的第一梁式称重传感器(21); 第二梁式称重传感器(22),其设置成面对第一梁式称重传感器(21)并且以悬臂方式支撑在第二支撑基座(12b)上以具有自由端(22sf); 和安装部件(3),其上放置有物体,其包括连接到第一光束型测力传感器的第一连接部分(32)和连接到第二光束式称重传感器的第二连接部分(33) 并且其设置在第一光束型称重传感器和第二光束型称重传感器之间。 第一光束型测力传感器的自由端和第二光束型测力传感器的自由端在第一光束型测力传感器的延伸方向上彼此相反的方向。 安装部的第一连接部在第一梁型称重传感器的自由端的一侧与第一梁型称重传感器连接,安装部的第二连接部与第二梁型称重传感器连接 第二束型称重传感器的自由端的一侧。
    • 4. 发明申请
    • ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR PRODUCING DEVICE
    • 照明光学装置,曝光装置及制造装置的方法
    • WO2009069817A2
    • 2009-06-04
    • PCT/JP2008/071992
    • 2008-11-27
    • NIKON CORPORATIONNISHIKAWA, Jin
    • NISHIKAWA, Jin
    • G03F7/20
    • G03F7/70916G03F7/702G03F7/70841G03F7/70883
    • A reflection type illumination optical apparatus, which guides an exposure light EL to a reticle surface Ra via a curved mirror 24, a concave mirror 25, etc. includes a vacuum chamber 1 which accommodates the curved mirror 24, the concave mirror 25, etc,; and a subchamber 4D which is arranged in the vacuum chamber 1 and which accommodates the curved mirror 24. The subchamber 4D has openings 4Da, 4Db through which the exposure light EL coming into the curved mirror 24 and the exposure light EL exiting from the curved mirror 24 pass, respectively. Each of the openings 4Da, 4Db is arranged in the vicinity of a position at which the cross-sectional area of the light flux is smallest. It is possible to decrease the amount of adhesion of minute particles such as debris to the reflecting optical element, without unnecessarily enhancing the ability of the vacuum gas discharge mechanism.
    • 通过曲面镜24,凹面镜25等将曝光用光EL引导至标线片表面Ra的反射型照明光学装置具备:收纳曲面镜24的真空室1 ,凹面镜25等等; 以及设置在真空室1中并容纳曲面镜24的子室4D。子室4D具有开口4Da,4Db,通过该开口4Da和4Db,进入曲面镜24的曝光光EL和从曲面镜出射的曝光光EL 24次通过。 每个开口4Da,4Db布置在光通量的截面面积最小的位置附近。 不会不必要地增强真空气体放电机构的能力,可以减少诸如碎屑之类的微小颗粒对反射光学元件的附着量。
    • 7. 发明申请
    • LIQUID CONSUMING APPARATUS
    • 液体消耗装置
    • WO2016117331A1
    • 2016-07-28
    • PCT/JP2016/000253
    • 2016-01-19
    • BROTHER KOGYO KABUSHIKI KAISHA
    • OSAKABE, Yoshinori
    • B41J2/175
    • B41J2/1754B41J2/175B41J2/17509B41J2/1752B41J2/17536B41J29/13
    • There is provided a liquid consuming apparatus including: a liquid consuming section; a tank having a liquid storage chamber and an inlet port; a cap; and a casing having a cover movable with respect to the tank between a closed position and an open positon. The cover has an inner surface and a projection projected from the inner surface toward the tank. The projection of the cover is provided with a pressing portion facing the outer surface of the cap at a predetermined spacing distance, under a condition that the liquid consuming apparatus is in a normal state in which the cover is in the closed position and that the cap is installed in the inlet port, and the pressing portion abuts firstly against the outer surface, under a condition that the cap is moved in the insertion direction for allowing the cap to be removed from the inlet port.
    • 提供了一种液体消耗装置,包括:液体消耗部; 具有液体储存室和入口的罐; 一顶帽子; 以及具有可在关闭位置和打开位置之间相对于罐移动的盖的壳体。 盖具有内表面和从内表面朝向罐突出的突起。 在液体消耗装置处于处于关闭位置的正常状态的情况下,盖的突出部设置有以预定的间隔距离面向罩的外表面的按压部,并且帽 安装在入口端口,并且压盖部分首先抵靠外表面,在帽沿插入方向移动以允许帽从入口移除的条件下抵靠外表面。
    • 8. 发明申请
    • REFLECTIVE IMAGING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD FOR PRODUCING DEVICE
    • 反射成像光学系统,曝光装置及其制造方法
    • WO2012033230A1
    • 2012-03-15
    • PCT/JP2011/071166
    • 2011-09-09
    • NIKON CORPORATIONKAWABE, Yoshio
    • KAWABE, Yoshio
    • G03F7/20
    • G03F7/70233
    • An reflective imaging optical system (6) of the far pupil type, which is applicable to an exposure apparatus using for example the EUV light, forms on a second plane (7) an image of a predetermined area on a first plane (4) and is provided with first to eighth reflecting mirrors (M1 to M8) arranged in an order of reflection from the first plane toward the second plane. An entrance pupil of reflective imaging optical system is positioned on a side opposite to the reflective imaging optical system with the first plane intervening therebetween; and the following condition is fulfilled provided that PD represents a distance along an optical axis (AX) between the entrance pupil and the first plane, TT represents a distance along the optical axis between the first plane and the second plane, and R represents an angle of incidence of a main light beam coming into the first plane: -14.3
    • 可应用于使用例如EUV光的曝光装置的远光瞳型的反射成像光学系统(6)在第二平面(7)上形成第一平面(4)上的预定区域的图像,以及 设置有从第一平面朝向第二平面的反射顺序排列的第一至第八反射镜(M1至M8)。 反射成像光学系统的入射光瞳位于与反射成像光学系统相对的一侧,其中介于其间的第一平面; 并且如果PD表示沿着入射光瞳和第一平面之间的光轴(AX)的距离,则TT表示沿着第一平面和第二平面之间的光轴的距离,并且R表示角度 进入第一平面的主光束的入射角:-14.3 <(PD / TT)/ R <-2.5。
    • 10. 发明申请
    • ANTI-GRAVITY MOUNT WITH AIR AND MAGNETS
    • 具有空气和磁铁的防灰尘安装
    • WO2003071155A1
    • 2003-08-28
    • PCT/JP2003/001717
    • 2003-02-18
    • NIKON CORPORATION
    • ONO, KazuyaGERY, Jean-Marc
    • F16F6/00
    • G03F7/709F16F6/00F16F2228/063G03F7/70833
    • An apparatus (400) for providing support between a first structure (402) and a second structure (404) is described. The apparatus includes a supporting member (406, 450), and first and second sections. The supporting member is mounted to the first structure and second structure, and has positive stiffness with respect to a lateral direction (r). The first section (414) has at least one magnetic member, and is coupled to the first structure. The second section (416) has at least one magnetic member, and is coupled to the second structure. The first and second sections present negative stiffness caused by magnetic attractive force at a neutral position, thereby canceling at least a part of the positive stiffness of the supporting member.
    • 描述了一种用于在第一结构(402)和第二结构(404)之间提供支撑的装置(400)。 该装置包括支撑构件(406,450)以及第一和第二部分。 支撑构件安装到第一结构和第二结构,并且相对于横向(r)具有正刚度。 第一部分(414)具有至少一个磁性部件,并且耦合到第一结构。 第二部分(416)具有至少一个磁性部件,并且联接到第二结构。 第一和第二部分呈现由中性位置处的磁性吸引力引起的负刚度,从而抵消支撑构件的正刚度的至少一部分。