会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明申请
    • Method of manufacturing vacuum plasma treated workpieces and system for vacuum plasma treating workpieces
    • 制造真空等离子体处理工件的方法和真空等离子体处理工件系统
    • US20050051269A1
    • 2005-03-10
    • US10898458
    • 2004-07-23
    • Mustapha ElyaakoubiPhannara AingRainer OstermannKlaus NeubeckBenoit Riou
    • Mustapha ElyaakoubiPhannara AingRainer OstermannKlaus NeubeckBenoit Riou
    • C23C16/44C23F1/00H01J37/32H05H1/24
    • H01J37/32449C23C16/4405H01J37/32091H01J37/32165
    • A method of manufacturing vacuum plasma treated workpieces includes the steps of introducing at least one workpiece to be treated into a vacuum chamber; treating the workpiece in the vacuum chamber, thereby establishing a plasma discharge in the vacuum chamber by a supply signal with maximum energy at a first frequency which is at least in the Hf frequency range; removing the workpiece treated from the vacuum chamber; performing a cleaning inside the vacuum chamber, thereby establishing the plasma discharge by a supply signal with maximum energy at a second frequency higher than the Hf frequency; and repeating these steps at least one time. A system for vacuum plasma treating workpieces includes an evacuatable vacuum recipient. A gas inlet arrangement in the vacuum recipient is connectable to a first gas supply and to a second gas supply. A plasma generating arrangement in the recipient has an electric input to an electrode. A generator arrangement with a first and with a second output generates at the first output an output signal having maximum energy at a first frequency being at least in the Hf frequency range. The generator arrangement generates at the second output a signal with a maximum energy at a second frequency which is higher than the first frequency. A control unit alternatively operationally connects the first output of the generator arrangement to the electric input and the first gas supply to the gas inlet or the second output of the generator arrangement to the electric input and the second gas supply to the gas inlet.
    • 制造真空等离子体处理的工件的方法包括以下步骤:将待处理的至少一个工件引入真空室; 处理真空室中的工件,从而通过具有至少在Hf频率范围内的第一频率的最大能量的供应信号在真空室中建立等离子体放电; 去除从真空室处理的工件; 在真空室内进行清洗,从而通过具有高于Hf频率的第二频率的最大能量的供给信号建立等离子体放电; 并重复这些步骤至少一次。 用于真空等离子体处理工件的系统包括可抽空的真空接收器。 真空接收器中的气体入口装置可连接到第一气体供应和第二气体供应。 接收器中的等离子体产生装置具有对电极的电输入。 具有第一和第二输出的发生器装置在第一输出处产生具有至少在Hf频率范围内的第一频率处的最大能量的输出信号。 发生器装置在第二输出处产生具有高于第一频率的第二频率的最大能量的信号。 控制单元可交替地将发电机装置的第一输出端与电输入端连接,并将第一气体供应到气体入口或发电机装置的第二输出端到电输入口,而第二气体供应到气体入口。