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1. 发明专利

JP2012516239A Micro structure, bonding apparatus and a method for manufacturing, micro-structure and micro system 有权
公开(公告)号：JP2012516239A
公开(公告)日：2012-07-19
申请号：JP2011546592
申请日：2010-01-26
申请人：テヒニッシェウニヴァーズィテートケムニッツTechnische Universitaet Chemnitz , フラウンホーファー−ゲゼルシャフトツルフェルデルングデルアンゲヴァンテンフォルシュングエーファウFraunhofer−Gesellschaft zur Foerderung der angewandten Forschung e.V.
发明人：ウィーメル、マイク , ゲスナー、トーマス , バーム、マリオ , バウアー、エルク , フォーミュラ、エルク , ホフマン、ルッツ , レッシュ、ホルガー
IPC分类号： B81B1/00 , B81C3/00
CPC分类号： B81C3/001 , B81C2203/019 , B81C2203/032
摘要： A microstructure has at least one bonding substrate and a reactive multilayer system. The reactive multilayer system has at least one surface layer of the bonding substrate with vertically oriented nanostructures spaced apart from one another. Regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A method for producing at least one bonding substrate and a reactive multilayer system, includes, for forming the reactive multilayer system, at least one surface layer of the bonding substrate is patterned or deposited in patterned fashion with the formation of vertically oriented nanostructures spaced apart from one another, and regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A microsystem is formed from two bonding substrates and a construction lying between the bonding substrates, the construction having a reacted reactive layer system. The microsystem is a sensor coated with biomaterial and/or has elements composed of polymeric material and/or at least one magnetic and/or piezoelectric and/or piezoresistive component.

3. 发明专利

JP2009537831A mems vacuum sensor due to the friction principle 审中-公开
公开(公告)号：JP2009537831A
公开(公告)日：2009-10-29
申请号：JP2009511361
申请日：2007-05-09
申请人：テヒニッシェウニヴァーズィテートケムニッツTechnische Universitaet Chemnitz , フラウンホーファー−ゲゼルシャフトツルフェルデルングデルアンゲヴァンテンフォルシュングエーファウFraunhofer−Gesellschaft zur Foerderung der angewandten Forschung e.V.
发明人：デッツェルヴォルフラム , ヒラーカーラ , カウフマンクリスティアン , クルトシュテフェン , テンホルテディルク , ゲスナートーマス
IPC分类号： G01L21/16
CPC分类号： G01L21/22
摘要：本発明は、基板（５）と少なくとも１つの質量要素（１）を有する圧力測定用のセンサ素子であって、前記質量要素（１）は、前記基板（５）に対して間隔を置いて配置されており、かつ前記質量要素（１）は、前記基板（５）および／または前記基板（５）に対して相対的に不動の支持体（６）と振動可能であるように接続されており、前記質量要素（１）と前記基板（５）との間に空隙が形成されており、該空隙の幅は、前記質量要素（１）の振動によって変化するセンサ素子に関する。空隙を画定する基板（５）の面には少なくとも１つの凹部および／または少なくとも１つの貫通部が設けられており、これは質量要素を包囲するガスまたはプラズマによる、質量要素の振動の減衰を小さくするために用いられる。このセンサ素子は、真空領域の圧力を測定するための圧力センサに使用される。本発明のセンサ素子を圧力記録器として使用することにより、大気空気圧の領域までの最大圧を検出することができる。検出できる最低圧は10
-6 mbrの領域にある。

4. 发明专利

DE9109767U1 未知
公开(公告)号：DE9109767U1
公开(公告)日：1991-10-31
申请号：DE9109767
申请日：1991-08-07
申请人： TECHNISCHE UNIVERSITAET CHEMNITZ, O-9010 CHEMNITZ, DE
IPC分类号： G03F7/20

5. 发明专利

DE9107119U1 未知
公开(公告)号：DE9107119U1
公开(公告)日：1991-07-25
申请号：DE9107119
申请日：1991-06-10
申请人： TECHNISCHE UNIVERSITAET CHEMNITZ, O-9010 CHEMNITZ, DE
IPC分类号： B05B15/12 , B05B16/60

6. 发明专利

DE9017167U1 未知
公开(公告)号：DE9017167U1
公开(公告)日：1991-04-04
申请号：DE9017167
申请日：1990-12-15
申请人： TECHNISCHE UNIVERSITAET CHEMNITZ, O-9010 CHEMNITZ, DE
IPC分类号： G01D5/14 , G01D5/16 , G01D5/249 , G01P3/46 , G01P3/481 , H03M1/24

7. 发明专利

DE9017166U1 未知
公开(公告)号：DE9017166U1
公开(公告)日：1991-04-04
申请号：DE9017166
申请日：1990-12-15
申请人： TECHNISCHE UNIVERSITAET CHEMNITZ, O-9010 CHEMNITZ, DE
IPC分类号： F04D25/06 , F04D29/04 , F04D29/058 , F16C39/06 , H02K7/09

8. 发明申请

US20160240806A1 DEVICES FOR EMITTING AND/OR RECEIVING ELECTROMAGNETIC RADIATION, AND METHOD FOR PROVIDING SAME 审中-公开
标题翻译：用于发射和/或接收电磁辐射的装置及其提供方法
公开(公告)号：US20160240806A1
公开(公告)日：2016-08-18
申请号：US15137288
申请日：2016-04-25
申请人： Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V. , Technische Universitaet Chemnitz
发明人： Thomas Gessner , Thomas Otto , Stefan Schulz , Sascha Hermann , Thomas Blaudeck , Christian Spudat
IPC分类号： H01L51/50 , H01L51/56 , H01L25/04 , H01L51/44 , H01L51/00
CPC分类号： H01L51/502 , B82Y10/00 , B82Y20/00 , H01L25/046 , H01L29/0673 , H01L29/127 , H01L29/413 , H01L29/42316 , H01L29/775 , H01L33/16 , H01L33/34 , H01L33/38 , H01L51/0048 , H01L51/428 , H01L51/447 , H01L51/5296 , H01L51/56
摘要： The invention describes a device for emitting or detecting electromagnetic radiation. The device has a first and a second electrode which are connected to each other via an electrically conductive nanostructure. The electrically conductive nanostructure is configured to receive electrons and holes from the first and second electrode or transport same to the first and second electrode. In addition, the device has a radiation molecule arranged at a circumferential surface of the electrically conductive nanostructure. The radiation molecule is configured to absorb electrons and holes or electromagnetic radiation and emit the electromagnetic radiation with recombination of electrons absorbed and holes absorbed, or emit electrons and holes based on the electromagnetic radiation absorbed. The electrically conductive nanostructure is, in the region of a circumferential surface, surrounded at least partly by the first or second electrode at an end arranged at the first or second electrode in order to provide electrical contact of the first or second electrode and the electrically conductive nanostructure.
摘要翻译：本发明描述了用于发射或检测电磁辐射的装置。该器件具有通过导电纳米结构彼此连接的第一和第二电极。导电纳米结构被配置为从第一和第二电极接收电子和空穴或将其传输到第一和第二电极。此外，该器件具有布置在导电纳米结构的圆周表面处的辐射分子。辐射分子被配置为吸收电子和空穴或电磁辐射，并且通过吸收的电子和吸收的空穴的复合发射电磁辐射，或者基于吸收的电磁辐射发射电子和空穴。导电纳米结构在圆周表面的区域中至少部分地被第一或第二电极在位于第一或第二电极处的端部处包围，以便提供第一或第二电极与导电的电接触纳米结构。

9. 发明申请

US20110284975A1 MICROSTRUCTURE, METHOD FOR PRODUCING THE SAME, DEVICE FOR BONDING A MICROSTRUCTURE AND MICROSYSTEM 有权
公开(公告)号：US20110284975A1
公开(公告)日：2011-11-24
申请号：US13146759
申请日：2010-01-26
申请人： Joerg Braeuer , Thomas Gessner , Lutz Hofmann , Joerg Froemel , Maik Wiemer , Holger Letsch , Mario Baum
发明人： Joerg Braeuer , Thomas Gessner , Lutz Hofmann , Joerg Froemel , Maik Wiemer , Holger Letsch , Mario Baum
IPC分类号： H01L29/06 , H01L29/82 , H01L21/28 , H01L29/84 , B82Y99/00
CPC分类号： B81C3/001 , B81C2203/019 , B81C2203/032
摘要： A microstructure has at least one bonding substrate and a reactive multilayer system. The reactive multilayer system has at least one surface layer of the bonding substrate with vertically oriented nanostructures spaced apart from one another. Regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A method for producing at least one bonding substrate and a reactive multilayer system, includes, for forming the reactive multilayer system, at least one surface layer of the bonding substrate is patterned or deposited in patterned fashion with the formation of vertically oriented nanostructures spaced apart from one another, and regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A device for bonding a microstructure, which has at least one bonding substrate and a reactive multilayer system, to a further structure, which has a bonding substrate. The device has a bonding chamber, which can be opened and closed and evacuated and in which the microstructure and the further structure can be introduced and aligned with one another, and also an activation mechanism, which is coupled to the bonding chamber and by means of which the reactive multilayer system of the microstructure, said reactive multilayer system being formed from reactive nanostructures with—situated therebetween—a material constituting a reaction partner with respect to the material of the nanostructures, can be activated mechanically, electrically, electromagnetically, optically and/or thermally in such a way that a self-propagating, exothermic reaction takes place between the nanostructures and the material constituting a reaction partner with respect to the material of the nanostructures. A microsystem is formed from two bonding substrates and a construction lying between the bonding substrates, the construction having a reacted reactive layer system, wherein the reacted reactive layer system is a reacted structure sequence composed of at least one surface layer—provided on the bonding substrate—with vertically oriented nanostructures spaced apart from one another, and regions filled between the nanostructures with at least one material constituting a reaction partner with respect to the material of the nanostructures. The microsystem is a sensor coated with biomaterial and/or has elements composed of polymeric material and/or at least one magnetic and/or piezoelectric and/or piezoresistive component.

10. 发明申请

WO2012069527A2 MIKROFLUIDVORRICHTUNG UND VERFAHREN ZUM HERSTELLEN DERSELBEN 审中-公开
标题翻译：微流体设备和方法生产同样
公开(公告)号：WO2012069527A2
公开(公告)日：2012-05-31
申请号：PCT/EP2011/070788
申请日：2011-11-23
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , OTTO, Thomas , NESTLER, Jörg , GESSNER, Thomas , TECHNISCHE UNIVERSITAET CHEMNITZ
发明人： OTTO, Thomas , NESTLER, Jörg , GESSNER, Thomas
IPC分类号： B01L3/00 , B29C65/50
CPC分类号： B01L3/502707 , B01L3/502715 , B01L3/502723 , B01L3/50273 , B01L3/502738 , B01L2200/025 , B01L2200/028 , B01L2200/0684 , B01L2200/0689 , B01L2300/0816 , B01L2300/0861 , B01L2300/0874 , B01L2300/0887 , B01L2400/0481 , B01L2400/0655
摘要： Eine Folie mit einer Öffnung wird dazu verwendet, preisgünstig zumindest ein Bauteil, in dem bzw. in denen Kanalstrukturen gebildet sind, die zumindest teilweise zu einer jeweiligen Bauteiloberfläche des zumindest einen Bauteils offen sind, zu einer jeweiligen aus einer Mehrzahl von Kanal Strukturkombinationen zu individualisieren. Die Herstellungskosten für die Mikrofluidvorrichtungen können somit gering gehalten werden, da eine Vielzahl von einem solchen zumindest einen Bauteil, die zueinander identisch sind, verwendet werden können, um unterschiedliche Mikrofluidvorrichtungen herzustellen, die sich in der Verbindungskombination der Kanalstrukturen unterscheiden.
摘要翻译：具有开口的膜被使用，便宜的，至少一种组分，其中或在其中形成通道结构，其是至少部分打开到至少一个部件的相应部件表面赋予个性多个信道结构组合中的相应的一个。微流体装置的生产成本可以保持较小因此，由于多个这样的部件，它们是彼此相同的，可以使用至少产生不同的微流体装置，其在信道结构的连接组合而有所不同。

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