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1. 发明申请

WO1987004257A1 METROLOGICAL APPARATUS AND METHOD USING POLARISATION MODULATION 审中-公开
标题翻译：使用极化调制的计量装置和方法
公开(公告)号：WO1987004257A1
公开(公告)日：1987-07-16
申请号：PCT/GB1987000001
申请日：1987-01-06
申请人： RANK TAYLOR HOBSON LIMITED
发明人： RANK TAYLOR HOBSON LIMITED , FROOME, Keith, Davy
IPC分类号： G01S17/08
CPC分类号： G01S7/4812 , G01S7/4972 , G01S7/499 , G01S17/08
摘要： In a distance measuring system, polarised light is projected from a main unit (8) to a target reflector (46) and is reflected back. The polarisation is modulated by an electro-optical Pockels crystal (20) in the projected and returned paths, and a variable light path (42, 44) is adjusted to obtain a null at a photodetector (50) after the returned light has passed through a polarising filter (18). In order to enable a single filter (18) to be used for polarising the projected beam and filtering the returned beam, a relative retardation of about one quarter wavelength may be introduced into the projected and returned beams by a rhomb (38). In order to obviate the need to align the filter (18) direction with the axes of the crystal transverse to the beam, the rhomb may be placed before the crystal (20) in the projected beam so that the crystal receives generally circularly polarised light. In order to adjust the quality of the null obtainable at the photodetector, the orientation of the rhomb may be adjustable. In order to enable the null to be resolved more acurately, the modulation wavelength, the length of the light path, or a time delay in the light path may be ''wobbled''. In order to take measurements of a structure corrected to a datum temperature, the modulation wavelength may be defined with respect to a reference resonator (72) of the same material as the structure and placed in contact with the structure.

2. 发明授权

EP0404597B1 Metrological apparatus and calibration method therefor 失效
标题翻译：计量装置和校准方法为此
公开(公告)号：EP0404597B1
公开(公告)日：1996-08-21
申请号：EP90306869.0
申请日：1990-06-22
申请人： RANK TAYLOR HOBSON LIMITED
发明人： Garratt, John David , Scott, Paul James , Buehring, Ian Karl
IPC分类号： G01R15/00 , G01N3/62
CPC分类号： G01B7/34 , G01B7/28

3. 发明公开

EP0620911A1 METROLOGICAL APPARATUS 失效
标题翻译：麦德龙逻辑单元。
公开(公告)号：EP0620911A1
公开(公告)日：1994-10-26
申请号：EP93901819.0
申请日：1993-01-08
申请人： RANK TAYLOR HOBSON LIMITED
发明人： BARNABY, Anthony, Bruce 9 London Road
IPC分类号： G01B5 , G01B21
CPC分类号： G01B5/0009
摘要： Un appareil métrologique comporte un bras mobile (15) qui monte et descend entre deux supports (13), ceux-ci définissant les positions de référence du bras (15). Le bras (15) possède des paliers d'air situés sur les supports (13) de façon à ce qu'il adopte une position équidistante entre les supports (13). De cette façon, la position du bras (15) est affectée par la moyenne des erreurs des deux positions de référence définies par les supports (13). Lorsque les supports (13) ont des erreurs symétriques, celles-ci sont annulées. Etant donné que la voie de rectitude maximum suivie par le bras (15) dans son déplacement est espacée des supports (13), il est possible de placer une pièce (3) sur cette voie et une table rotative (5) pour soutenir la pièce (3) est agencée de manière à ce que son axe de rotation soit dans l'alignement de la voie de rectitude maximum. La position verticale de chaque extrémité du bras (15) est mesurée à l'aide d'une grille (25) respective et la moyenne des mesures est prise afin d'obtenir une mesure précise de la hauteur du point central du bras (15) sur la pièce (3), pratiquement sans erreurs d'Abbe.

4. 发明授权

EP0240150B1 Workpiece position control 失效
标题翻译：工作位置控制
公开(公告)号：EP0240150B1
公开(公告)日：1991-04-17
申请号：EP87301711.5
申请日：1987-02-26
申请人： RANK TAYLOR HOBSON LIMITED
发明人： Barnaby, Anthony Bruce , Mills, Michael Walter
IPC分类号： G01B5/00 , G01B7/00 , B23Q1/00
CPC分类号： B23Q1/5462 , G01B5/0004 , G01B7/282

5. 发明公开

EP0240150A2 Workpiece position control 失效
标题翻译： Positionskontrolle eines zu bearbeitendenWerkstücks。
公开(公告)号：EP0240150A2
公开(公告)日：1987-10-07
申请号：EP87301711.5
申请日：1987-02-26
申请人： RANK TAYLOR HOBSON LIMITED
发明人： Barnaby, Anthony Bruce , Mills, Michael Walter
IPC分类号： G01B5/00 , G01B7/00 , B23Q1/00
CPC分类号： B23Q1/5462 , G01B5/0004 , G01B7/282
摘要： Metrological apparatus is provided with a turntable (4) which is movable horizontally and pivotally for centring and levelling. The turntable (4) is supported at three points (A,B,P), one (P) of which is fixed and the other two (A,B) of which are vertically movable by motorized jacks. Centring and levelling is achieved automatically by means of a computer (72) which calculates the required horizontal and pivotal movements of the turntable (4) from data obtained by sensing the workpiece surface with a transducer (12).
摘要翻译：计量装置设置有可以水平和枢轴移动的转盘（4），用于定心和调平。转盘（4）由三个点（A，B，P）支撑，一个（P）固定，另一个（A，B）由电动千斤顶垂直移动。通过计算机（72）自动实现对中和调平，计算机（72）根据通过用换能器（12）感测工件表面而获得的数据来计算转台（4）所需的水平和枢转运动。

6. 发明公开

EP0232609A2 Measurement and control apparatus 失效
标题翻译：测量和控制装置。
公开(公告)号：EP0232609A2
公开(公告)日：1987-08-19
申请号：EP86309681.4
申请日：1986-12-11
申请人： RANK TAYLOR HOBSON LIMITED
发明人： Onyon, Peter Dean
IPC分类号： G01P3/44
CPC分类号： G01P3/44 , G01P3/36 , G01R23/02
摘要： Apparatus for measuring velocity, utilizes quadrature input signals, provided by a transducer and divides the derivative of one of the signals by the magnitude of the other to obtain a measure of velocity. The apparatus may be digital or analogue. It is particularly suitable for the measurement of velocity where the quadrature signals are provided by an optical grating and transducer arrangement.

7. 发明公开

EP0230345A1 Metrological apparatus and method using polarisation modulation 失效
标题翻译： Anlage und Verfahren zur Vermessung mit Polarization der Modulation。
公开(公告)号：EP0230345A1
公开(公告)日：1987-07-29
申请号：EP87300059.0
申请日：1987-01-06
申请人： RANK TAYLOR HOBSON LIMITED
发明人： Froome, Keith Davy
IPC分类号： G01S17/08 , G01S7/48
CPC分类号： G01S7/4812 , G01S7/4972 , G01S7/499 , G01S17/08
摘要： In a distance measuring system, polarised light is projected from a main unit (8) to a target reflector (46) and is reflected back. The polarisation is modulated by an electro-optical Pockels crystal (20) in the projected and returned paths, and a variable light path (42, 44) is adjusted to obtain a null at a photodetector (50) after the returned light has passed through a polarising filter (18). In order to enable a single filter (18) to be used for polarising the projecting beam and filtering the returned beam, a relative retardation of about one quarter wavelength may be introduced into the projected and returned beams by a rhomb (38). In orderto obviate the need to align the filter (18) direction with the axes of the crystal transverse to the beam, the rhomb may be placed before the crystal (20) in the projected beam so that the crystal receives generally circularly polarised light. In order to adjust the quality of the null obtainable at the photodetector, the orientation of the rhomb may be adjustable. In orderto enable the null to be resolved more accurately, the modulation wavelength, the length of the light path, or a time delay in the light path may be «wobbled». In order to take measurements of a structure corrected to a datum temperature, the modulation wavelength may be defined with respect to a reference resonator (72) of the same material as the structure and placed in contact with the structure.
摘要翻译：在距离测量系统中，偏振光从主单元（8）投影到目标反射器（46）并被反射回来。在投影和返回的路径中，偏振由电光Pockels晶体（20）调制，并且在返回的光通过之后调整可变光路（42,44）以在光电检测器（50）处获得零点偏振滤光器（18）。为了使单个滤光器（18）能够用于使投影光束偏振并对所返回的光束进行滤光，可以通过菱形（38）将约四分之一波长的相对延迟引入到投影和返回的光束中。为了避免使过滤器（18）方向与晶体横向于晶体轴的方向对准，菱形托盘放置在投影光束中的晶体（20）之前，使得晶体通常受到圆偏振光的接收。为了调整在光电检测器可获得的空白质量，菱形的取向可以是可调节的。为了更准确地解决零点，光路中的调制波长，光路长度或时间延迟可以是“摆动”。为了对校正到基准温度的结构进行测量，调制波长可以相对于与结构相同的材料的参考谐振器（72）来定义并且与结构接触。

8. 发明申请

WO1996012929A1 STYLUS ATTACHMENT FOR A METROLOGICAL INSTRUMENT 审中-公开
标题翻译：用于仪表仪器的STYLUS附件
公开(公告)号：WO1996012929A1
公开(公告)日：1996-05-02
申请号：PCT/GB1995002450
申请日：1995-10-17
申请人： RANK TAYLOR HOBSON LIMITED , NETTLETON, David, John
发明人： RANK TAYLOR HOBSON LIMITED
IPC分类号： G01B05/012
CPC分类号： G01B5/012 , G01B5/28
摘要： An arrangement for mounting a stylus (9) on a stylus support (19) for a metrological instrument includes a camming pin (65) on a mounting disc (21) of the stylus support (19), which passes through a mounting hole (53) in a mounting disc (45) of the stylus (9). A spring (51) applies a sideway force to a sloping cam surface (71) of the camming pin (65), which is converted into a force pulling the camming pin (65) through the mounting hole (53) and thus holding the mounting discs (45, 21) together. An operator can deform the spring (51) so that it releases the camming pin (65), allowing the stylus (9) to be mounted or dismounted without applying significant force to the pivot bearing of the stylus support (19). If excessive radial force is applied to the stylus arm (43), the spring (51) will ride up the cam surface (71) allowing the stylus (9) to be released from the stylus support (19), thereby avoiding applying extreme forces to the pivot bearing.
摘要翻译：用于将测针（9）安装在用于计量仪器的触针支架（19）上的布置包括在触针支架（19）的安装盘（21）上的凸轮销（65），其穿过安装孔（53 ）在触针（9）的安装盘（45）中。弹簧（51）向凸轮销（65）的倾斜凸轮表面（71）施加侧向力，其转换成通过安装孔（53）拉动凸轮销（65）的力，从而保持安装光盘（45,21）在一起。操作者可以使弹簧（51）变形，使得其释放凸轮销（65），从而允许触针（9）被安装或拆卸，而不会对触针支撑件（19）的枢转轴承施加显着的力。如果向触针臂（43）施加过大的径向力，则弹簧（51）将骑行凸轮表面（71），从而允许触针（9）从触针支架（19）释放，从而避免施加极大的力到枢轴轴承。

9. 发明申请

WO1996012162A1 ROUNDNESS MEASURING 审中-公开
标题翻译：圆度测量
公开(公告)号：WO1996012162A1
公开(公告)日：1996-04-25
申请号：PCT/GB1995002460
申请日：1995-10-18
申请人： RANK TAYLOR HOBSON LIMITED , SCOTT, Paul, James
发明人： RANK TAYLOR HOBSON LIMITED
IPC分类号： G01B21/20
CPC分类号： G01B21/20
摘要： A roundness measuring machine measures the position of the surface of an object (23) as the object is rotated on a turntable (7). The machine determines the circle (51) which is the best fit to the measured points (P) and converts the measurements (x) to distances (m) from the best fit circle. An improved algorithm for determining the best fit circle is used in place of the limacon fit. Calculated differences (1) between the measured surface position and the best fit circle are corrected for the effect of measuring the difference in the direction towards the centre (S) of rotation of the turntable (7) instead of in the direction towards the centre (W) of the circle (51). Data values are calculated representing points at equal angles ( theta ) around the centre (W) of the best fit circle rather than equal angles ( alpha ) around the centre (S) of rotation of the turntable. The improved accuracy of correction allows the machine to tolerate greater eccentricity of the workpiece (23) relative to the turntable (7), reducing the necessity for accurate centering of the workpiece.
摘要翻译：当物体在转台（7）上旋转时，圆度测量机测量物体（23）的表面的位置。机器确定与测量点（P）最佳拟合的圆（51），并将测量值（x）从最佳拟合圆转换为距离（m）。使用用于确定最佳拟合圆的改进的算法来代替limacon拟合。校正测量的表面位置和最佳拟合圆之间的计算差异（1），用于测量朝向转台（7）的旋转中心（S）的方向上的差异的效果，而不是沿朝向中心的方向 W）。计算数据值，代表最佳拟合圆周围中心（W）的相等角度（θ）的点，而不是围绕转盘旋转中心（S）的等角度（α）。改进的校正精度允许机器相对于转台（7）容忍工件（23）更大的偏心度，从而减少了精确对准工件的必要性。

10. 发明申请

WO1995025940A2 METROLOGICAL STYLUS ASSEMBLY 审中-公开
标题翻译：计量学大纲
公开(公告)号：WO1995025940A2
公开(公告)日：1995-09-28
申请号：PCT/GB1995000559
申请日：1995-03-15
申请人： RANK TAYLOR HOBSON LIMITED , MORRISON, Euan
发明人： RANK TAYLOR HOBSON LIMITED
IPC分类号： G01B07/34
CPC分类号： G01B7/34 , G01B5/28
摘要： A metrological instrument usable for scanning a small area (for example 0.5 mm x 0.5 mm) of the surface of a workpiece to detect roughness features has a stylus assembly in which a short (10 mm) lightweight (5 mg) stylus arm (9) is loaded with a hairspring (17) which provides most of the static stylus force (100 mg force). This construction provides a high acceleration for the stylus tip (13), allowing the stylus to track features of an amplitude over 0.1 mu m with data points 1 mu m apart and a stylus traverse speed of at least 5 mm s . The stylus assembly (7) is supported and driven by a two dimensional traverse unit (5) having two one dimensional stages. Each stage has a balanced compound rectilinear spring mounting using flexure springs arranged to resist gravity through their resistance to bending within the plane of the spring.
摘要翻译：可用于扫描工件表面的小面积（例如0.5mm×0.5mm）以检测粗糙度特征的计量仪器具有触针组件，其中短（10mm）轻量（5mg）触针臂（9）装有游丝（17），其提供大部分静态触针力（100mg力）。这种结构为触针尖端（13）提供了高加速度，使得触针能够跟踪超过0.1微米的幅度的特征，数据点相差1微米，而触针横切速度至少为5mm·s -1。触针组件（7）由具有两个一维级的二维横移单元（5）支撑和驱动。每个阶段都有一个平衡的复合直线弹簧安装，使用弯曲弹簧，弹簧布置成通过弹簧的平面内的弯曲抵抗重力。

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