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    • 2. 发明授权
    • Nanolaminate deformable mirrors
    • Naminaminate可变形镜
    • US07518780B2
    • 2009-04-14
    • US11501590
    • 2006-08-08
    • Alexandros P. PapavasiliouScot S. Olivier
    • Alexandros P. PapavasiliouScot S. Olivier
    • G02B26/00G02B7/182
    • G02B26/0841
    • A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.
    • 引入由两层附着在刚性基材上的纳米层压箔形成的可变形反射镜。 变形由两层之间的静电力提供。 结构的内部刚度允许高空间频率形状。 本发明的纳米脂肪酸箔允许高质量的镜面。 该装置通过使用具有精确控制厚度的箔而在垂直方向上实现高精度,但是不需要在侧向尺寸上的高精度,允许使用粗光刻技术来制造这样的反射镜。 这种技术允许制造高达约计量表的结构。